10/17/2011	7:29:01 AM	Recipe started at 7:28 AM
10/17/2011	7:29:01 AM	Helium valve closed
10/17/2011	7:29:01 AM	H2 valve closed
10/17/2011	7:29:01 AM	BCl3 valve closed
10/17/2011	7:29:01 AM	PH3 valve closed
10/17/2011	7:29:01 AM	SiCl4 pre valve closed
10/17/2011	7:29:01 AM	SiCl4 post valve closed
10/17/2011	7:29:01 AM	Bypass valve closed
10/17/2011	7:29:01 AM	Bubbler valve closed
10/17/2011	7:29:01 AM	Main Vac valve opened
10/17/2011	7:29:01 AM	Helium MFC set to  0.000000
10/17/2011	7:29:01 AM	H2 MFC set to  0.000000
10/17/2011	7:29:01 AM	BCl3 MFC set to  0.000000
10/17/2011	7:29:01 AM	PHl3 MFC set to  0.000000
10/17/2011	7:29:01 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:29:01 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:29:01 AM	Tube furnace set to 150
10/17/2011	7:29:31 AM	H2 valve closed
10/17/2011	7:29:31 AM	BCl3 valve closed
10/17/2011	7:29:31 AM	PH3 valve closed
10/17/2011	7:29:31 AM	SiCl4 pre valve closed
10/17/2011	7:29:31 AM	SiCl4 post valve closed
10/17/2011	7:29:31 AM	Bypass valve closed
10/17/2011	7:29:31 AM	Bubbler valve closed
10/17/2011	7:29:31 AM	Helium valve opened
10/17/2011	7:29:31 AM	Main Vac valve opened
10/17/2011	7:29:31 AM	Helium MFC set to  20.000000
10/17/2011	7:29:31 AM	H2 MFC set to  0.000000
10/17/2011	7:29:31 AM	BCl3 MFC set to  0.000000
10/17/2011	7:29:31 AM	PHl3 MFC set to  0.000000
10/17/2011	7:29:31 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:29:31 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:29:31 AM	Tube furnace set to 150
10/17/2011	7:30:02 AM	Helium valve closed
10/17/2011	7:30:02 AM	H2 valve closed
10/17/2011	7:30:02 AM	BCl3 valve closed
10/17/2011	7:30:02 AM	PH3 valve closed
10/17/2011	7:30:02 AM	SiCl4 pre valve closed
10/17/2011	7:30:02 AM	SiCl4 post valve closed
10/17/2011	7:30:02 AM	Bypass valve closed
10/17/2011	7:30:02 AM	Bubbler valve closed
10/17/2011	7:30:02 AM	Main Vac valve opened
10/17/2011	7:30:02 AM	Helium MFC set to  0.000000
10/17/2011	7:30:02 AM	H2 MFC set to  0.000000
10/17/2011	7:30:02 AM	BCl3 MFC set to  0.000000
10/17/2011	7:30:02 AM	PHl3 MFC set to  0.000000
10/17/2011	7:30:02 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:30:02 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:30:02 AM	Tube furnace set to 150
10/17/2011	7:30:32 AM	H2 valve closed
10/17/2011	7:30:32 AM	BCl3 valve closed
10/17/2011	7:30:32 AM	PH3 valve closed
10/17/2011	7:30:32 AM	SiCl4 pre valve closed
10/17/2011	7:30:32 AM	SiCl4 post valve closed
10/17/2011	7:30:32 AM	Bypass valve closed
10/17/2011	7:30:32 AM	Bubbler valve closed
10/17/2011	7:30:32 AM	Helium valve opened
10/17/2011	7:30:32 AM	Main Vac valve opened
10/17/2011	7:30:32 AM	Helium MFC set to  20.000000
10/17/2011	7:30:32 AM	H2 MFC set to  0.000000
10/17/2011	7:30:32 AM	BCl3 MFC set to  0.000000
10/17/2011	7:30:32 AM	PHl3 MFC set to  0.000000
10/17/2011	7:30:32 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:30:32 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:30:32 AM	Tube furnace set to 150
10/17/2011	7:31:02 AM	Helium valve closed
10/17/2011	7:31:02 AM	H2 valve closed
10/17/2011	7:31:02 AM	BCl3 valve closed
10/17/2011	7:31:02 AM	PH3 valve closed
10/17/2011	7:31:02 AM	SiCl4 pre valve closed
10/17/2011	7:31:02 AM	SiCl4 post valve closed
10/17/2011	7:31:02 AM	Bypass valve closed
10/17/2011	7:31:02 AM	Bubbler valve closed
10/17/2011	7:31:02 AM	Main Vac valve opened
10/17/2011	7:31:02 AM	Helium MFC set to  0.000000
10/17/2011	7:31:02 AM	H2 MFC set to  0.000000
10/17/2011	7:31:02 AM	BCl3 MFC set to  0.000000
10/17/2011	7:31:02 AM	PHl3 MFC set to  0.000000
10/17/2011	7:31:02 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:31:02 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:31:02 AM	Tube furnace set to 150
10/17/2011	7:31:32 AM	H2 valve closed
10/17/2011	7:31:32 AM	BCl3 valve closed
10/17/2011	7:31:32 AM	PH3 valve closed
10/17/2011	7:31:32 AM	SiCl4 pre valve closed
10/17/2011	7:31:32 AM	SiCl4 post valve closed
10/17/2011	7:31:32 AM	Bypass valve closed
10/17/2011	7:31:32 AM	Bubbler valve closed
10/17/2011	7:31:32 AM	Helium valve opened
10/17/2011	7:31:32 AM	Main Vac valve opened
10/17/2011	7:31:32 AM	Helium MFC set to  20.000000
10/17/2011	7:31:32 AM	H2 MFC set to  0.000000
10/17/2011	7:31:32 AM	BCl3 MFC set to  0.000000
10/17/2011	7:31:32 AM	PHl3 MFC set to  0.000000
10/17/2011	7:31:32 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:31:32 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:31:32 AM	Tube furnace set to 150
10/17/2011	7:32:02 AM	Helium valve closed
10/17/2011	7:32:02 AM	H2 valve closed
10/17/2011	7:32:02 AM	BCl3 valve closed
10/17/2011	7:32:02 AM	PH3 valve closed
10/17/2011	7:32:02 AM	SiCl4 pre valve closed
10/17/2011	7:32:02 AM	SiCl4 post valve closed
10/17/2011	7:32:02 AM	Bypass valve closed
10/17/2011	7:32:02 AM	Bubbler valve closed
10/17/2011	7:32:02 AM	Main Vac valve opened
10/17/2011	7:32:02 AM	Helium MFC set to  0.000000
10/17/2011	7:32:02 AM	H2 MFC set to  0.000000
10/17/2011	7:32:02 AM	BCl3 MFC set to  0.000000
10/17/2011	7:32:02 AM	PHl3 MFC set to  0.000000
10/17/2011	7:32:02 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:32:02 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:32:02 AM	Tube furnace set to 150
10/17/2011	7:32:32 AM	H2 valve closed
10/17/2011	7:32:32 AM	BCl3 valve closed
10/17/2011	7:32:33 AM	PH3 valve closed
10/17/2011	7:32:33 AM	SiCl4 pre valve closed
10/17/2011	7:32:33 AM	SiCl4 post valve closed
10/17/2011	7:32:33 AM	Bypass valve closed
10/17/2011	7:32:33 AM	Bubbler valve closed
10/17/2011	7:32:33 AM	Helium valve opened
10/17/2011	7:32:33 AM	Main Vac valve opened
10/17/2011	7:32:33 AM	Helium MFC set to  20.000000
10/17/2011	7:32:33 AM	H2 MFC set to  0.000000
10/17/2011	7:32:33 AM	BCl3 MFC set to  0.000000
10/17/2011	7:32:33 AM	PHl3 MFC set to  0.000000
10/17/2011	7:32:33 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:32:33 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:32:33 AM	Tube furnace set to 150
10/17/2011	7:33:03 AM	Helium valve closed
10/17/2011	7:33:03 AM	H2 valve closed
10/17/2011	7:33:03 AM	BCl3 valve closed
10/17/2011	7:33:03 AM	PH3 valve closed
10/17/2011	7:33:03 AM	SiCl4 pre valve closed
10/17/2011	7:33:03 AM	SiCl4 post valve closed
10/17/2011	7:33:03 AM	Bypass valve closed
10/17/2011	7:33:03 AM	Bubbler valve closed
10/17/2011	7:33:03 AM	Main Vac valve opened
10/17/2011	7:33:03 AM	Helium MFC set to  0.000000
10/17/2011	7:33:03 AM	H2 MFC set to  0.000000
10/17/2011	7:33:03 AM	BCl3 MFC set to  0.000000
10/17/2011	7:33:03 AM	PHl3 MFC set to  0.000000
10/17/2011	7:33:03 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:33:03 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:33:03 AM	Tube furnace set to 150
10/17/2011	7:33:33 AM	H2 valve closed
10/17/2011	7:33:33 AM	BCl3 valve closed
10/17/2011	7:33:33 AM	PH3 valve closed
10/17/2011	7:33:33 AM	SiCl4 pre valve closed
10/17/2011	7:33:33 AM	SiCl4 post valve closed
10/17/2011	7:33:33 AM	Bypass valve closed
10/17/2011	7:33:33 AM	Bubbler valve closed
10/17/2011	7:33:33 AM	Helium valve opened
10/17/2011	7:33:33 AM	Main Vac valve opened
10/17/2011	7:33:33 AM	Helium MFC set to  20.000000
10/17/2011	7:33:33 AM	H2 MFC set to  0.000000
10/17/2011	7:33:33 AM	BCl3 MFC set to  0.000000
10/17/2011	7:33:33 AM	PHl3 MFC set to  0.000000
10/17/2011	7:33:33 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:33:33 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:33:33 AM	Tube furnace set to 150
10/17/2011	7:34:03 AM	Helium valve closed
10/17/2011	7:34:03 AM	H2 valve closed
10/17/2011	7:34:03 AM	BCl3 valve closed
10/17/2011	7:34:03 AM	PH3 valve closed
10/17/2011	7:34:03 AM	SiCl4 pre valve closed
10/17/2011	7:34:03 AM	SiCl4 post valve closed
10/17/2011	7:34:03 AM	Bypass valve closed
10/17/2011	7:34:03 AM	Bubbler valve closed
10/17/2011	7:34:03 AM	Main Vac valve opened
10/17/2011	7:34:03 AM	Helium MFC set to  0.000000
10/17/2011	7:34:03 AM	H2 MFC set to  0.000000
10/17/2011	7:34:03 AM	BCl3 MFC set to  0.000000
10/17/2011	7:34:03 AM	PHl3 MFC set to  0.000000
10/17/2011	7:34:03 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:34:03 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:34:03 AM	Tube furnace set to 150
10/17/2011	7:34:33 AM	H2 valve closed
10/17/2011	7:34:33 AM	BCl3 valve closed
10/17/2011	7:34:33 AM	PH3 valve closed
10/17/2011	7:34:33 AM	SiCl4 pre valve closed
10/17/2011	7:34:33 AM	SiCl4 post valve closed
10/17/2011	7:34:33 AM	Bypass valve closed
10/17/2011	7:34:33 AM	Bubbler valve closed
10/17/2011	7:34:33 AM	Helium valve opened
10/17/2011	7:34:33 AM	Main Vac valve opened
10/17/2011	7:34:33 AM	Helium MFC set to  20.000000
10/17/2011	7:34:33 AM	H2 MFC set to  0.000000
10/17/2011	7:34:33 AM	BCl3 MFC set to  0.000000
10/17/2011	7:34:33 AM	PHl3 MFC set to  0.000000
10/17/2011	7:34:33 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:34:33 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:34:33 AM	Tube furnace set to 150
10/17/2011	7:35:03 AM	Helium valve closed
10/17/2011	7:35:03 AM	H2 valve closed
10/17/2011	7:35:03 AM	BCl3 valve closed
10/17/2011	7:35:03 AM	PH3 valve closed
10/17/2011	7:35:03 AM	SiCl4 pre valve closed
10/17/2011	7:35:03 AM	SiCl4 post valve closed
10/17/2011	7:35:03 AM	Bypass valve closed
10/17/2011	7:35:03 AM	Bubbler valve closed
10/17/2011	7:35:03 AM	Main Vac valve opened
10/17/2011	7:35:04 AM	Helium MFC set to  0.000000
10/17/2011	7:35:04 AM	H2 MFC set to  0.000000
10/17/2011	7:35:04 AM	BCl3 MFC set to  0.000000
10/17/2011	7:35:04 AM	PHl3 MFC set to  0.000000
10/17/2011	7:35:04 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:35:04 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:35:04 AM	Tube furnace set to 150
10/17/2011	7:35:34 AM	H2 valve closed
10/17/2011	7:35:34 AM	BCl3 valve closed
10/17/2011	7:35:34 AM	PH3 valve closed
10/17/2011	7:35:34 AM	SiCl4 pre valve closed
10/17/2011	7:35:34 AM	SiCl4 post valve closed
10/17/2011	7:35:34 AM	Bypass valve closed
10/17/2011	7:35:34 AM	Bubbler valve closed
10/17/2011	7:35:34 AM	Helium valve opened
10/17/2011	7:35:34 AM	Main Vac valve opened
10/17/2011	7:35:34 AM	Helium MFC set to  20.000000
10/17/2011	7:35:34 AM	H2 MFC set to  0.000000
10/17/2011	7:35:34 AM	BCl3 MFC set to  0.000000
10/17/2011	7:35:34 AM	PHl3 MFC set to  0.000000
10/17/2011	7:35:34 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:35:34 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:35:34 AM	Tube furnace set to 150
10/17/2011	7:36:04 AM	Helium valve closed
10/17/2011	7:36:04 AM	H2 valve closed
10/17/2011	7:36:04 AM	BCl3 valve closed
10/17/2011	7:36:04 AM	PH3 valve closed
10/17/2011	7:36:04 AM	SiCl4 pre valve closed
10/17/2011	7:36:04 AM	SiCl4 post valve closed
10/17/2011	7:36:04 AM	Bypass valve closed
10/17/2011	7:36:04 AM	Bubbler valve closed
10/17/2011	7:36:04 AM	Main Vac valve opened
10/17/2011	7:36:04 AM	Helium MFC set to  0.000000
10/17/2011	7:36:04 AM	H2 MFC set to  0.000000
10/17/2011	7:36:04 AM	BCl3 MFC set to  0.000000
10/17/2011	7:36:04 AM	PHl3 MFC set to  0.000000
10/17/2011	7:36:04 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:36:04 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:36:04 AM	Tube furnace set to 150
10/17/2011	7:36:34 AM	H2 valve closed
10/17/2011	7:36:34 AM	BCl3 valve closed
10/17/2011	7:36:34 AM	PH3 valve closed
10/17/2011	7:36:34 AM	SiCl4 pre valve closed
10/17/2011	7:36:34 AM	SiCl4 post valve closed
10/17/2011	7:36:34 AM	Bypass valve closed
10/17/2011	7:36:34 AM	Bubbler valve closed
10/17/2011	7:36:34 AM	Helium valve opened
10/17/2011	7:36:34 AM	Main Vac valve opened
10/17/2011	7:36:34 AM	Helium MFC set to  20.000000
10/17/2011	7:36:34 AM	H2 MFC set to  0.000000
10/17/2011	7:36:34 AM	BCl3 MFC set to  0.000000
10/17/2011	7:36:34 AM	PHl3 MFC set to  0.000000
10/17/2011	7:36:34 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:36:34 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:36:34 AM	Tube furnace set to 150
10/17/2011	7:37:04 AM	Helium valve closed
10/17/2011	7:37:04 AM	H2 valve closed
10/17/2011	7:37:04 AM	BCl3 valve closed
10/17/2011	7:37:04 AM	PH3 valve closed
10/17/2011	7:37:04 AM	SiCl4 pre valve closed
10/17/2011	7:37:04 AM	SiCl4 post valve closed
10/17/2011	7:37:04 AM	Bypass valve closed
10/17/2011	7:37:04 AM	Bubbler valve closed
10/17/2011	7:37:04 AM	Main Vac valve opened
10/17/2011	7:37:04 AM	Helium MFC set to  0.000000
10/17/2011	7:37:04 AM	H2 MFC set to  0.000000
10/17/2011	7:37:04 AM	BCl3 MFC set to  0.000000
10/17/2011	7:37:04 AM	PHl3 MFC set to  0.000000
10/17/2011	7:37:04 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:37:04 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:37:04 AM	Tube furnace set to 150
10/17/2011	7:37:34 AM	H2 valve closed
10/17/2011	7:37:34 AM	BCl3 valve closed
10/17/2011	7:37:34 AM	PH3 valve closed
10/17/2011	7:37:34 AM	SiCl4 pre valve closed
10/17/2011	7:37:34 AM	SiCl4 post valve closed
10/17/2011	7:37:35 AM	Bypass valve closed
10/17/2011	7:37:35 AM	Bubbler valve closed
10/17/2011	7:37:35 AM	Helium valve opened
10/17/2011	7:37:35 AM	Main Vac valve opened
10/17/2011	7:37:35 AM	Helium MFC set to  20.000000
10/17/2011	7:37:35 AM	H2 MFC set to  0.000000
10/17/2011	7:37:35 AM	BCl3 MFC set to  0.000000
10/17/2011	7:37:35 AM	PHl3 MFC set to  0.000000
10/17/2011	7:37:35 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:37:35 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:37:35 AM	Tube furnace set to 150
10/17/2011	7:38:05 AM	Helium valve closed
10/17/2011	7:38:05 AM	H2 valve closed
10/17/2011	7:38:05 AM	BCl3 valve closed
10/17/2011	7:38:05 AM	PH3 valve closed
10/17/2011	7:38:05 AM	SiCl4 pre valve closed
10/17/2011	7:38:05 AM	SiCl4 post valve closed
10/17/2011	7:38:05 AM	Bypass valve closed
10/17/2011	7:38:05 AM	Bubbler valve closed
10/17/2011	7:38:05 AM	Main Vac valve opened
10/17/2011	7:38:05 AM	Helium MFC set to  0.000000
10/17/2011	7:38:05 AM	H2 MFC set to  0.000000
10/17/2011	7:38:05 AM	BCl3 MFC set to  0.000000
10/17/2011	7:38:05 AM	PHl3 MFC set to  0.000000
10/17/2011	7:38:05 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:38:05 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:38:05 AM	Tube furnace set to 150
10/17/2011	7:38:35 AM	H2 valve closed
10/17/2011	7:38:35 AM	BCl3 valve closed
10/17/2011	7:38:35 AM	PH3 valve closed
10/17/2011	7:38:35 AM	SiCl4 pre valve closed
10/17/2011	7:38:35 AM	SiCl4 post valve closed
10/17/2011	7:38:35 AM	Bypass valve closed
10/17/2011	7:38:35 AM	Bubbler valve closed
10/17/2011	7:38:35 AM	Helium valve opened
10/17/2011	7:38:35 AM	Main Vac valve opened
10/17/2011	7:38:35 AM	Helium MFC set to  20.000000
10/17/2011	7:38:35 AM	H2 MFC set to  0.000000
10/17/2011	7:38:35 AM	BCl3 MFC set to  0.000000
10/17/2011	7:38:35 AM	PHl3 MFC set to  0.000000
10/17/2011	7:38:35 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:38:35 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:38:35 AM	Tube furnace set to 150
10/17/2011	7:39:05 AM	Helium valve closed
10/17/2011	7:39:05 AM	H2 valve closed
10/17/2011	7:39:05 AM	BCl3 valve closed
10/17/2011	7:39:05 AM	PH3 valve closed
10/17/2011	7:39:05 AM	SiCl4 pre valve closed
10/17/2011	7:39:05 AM	SiCl4 post valve closed
10/17/2011	7:39:05 AM	Bypass valve closed
10/17/2011	7:39:05 AM	Bubbler valve closed
10/17/2011	7:39:05 AM	Main Vac valve opened
10/17/2011	7:39:05 AM	Helium MFC set to  0.000000
10/17/2011	7:39:05 AM	H2 MFC set to  0.000000
10/17/2011	7:39:05 AM	BCl3 MFC set to  0.000000
10/17/2011	7:39:05 AM	PHl3 MFC set to  0.000000
10/17/2011	7:39:05 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:39:05 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:39:05 AM	Tube furnace set to 150
10/17/2011	7:39:06 AM	Run finished at 7:39 AM
10/17/2011	7:54:38 AM	Main Vac valve closed
10/17/2011	7:55:22 AM	Main Vac valve opened
10/17/2011	7:56:52 AM	Recipe started at 7:56 AM
10/17/2011	7:56:52 AM	Helium valve closed
10/17/2011	7:56:52 AM	H2 valve closed
10/17/2011	7:56:52 AM	BCl3 valve closed
10/17/2011	7:56:52 AM	PH3 valve closed
10/17/2011	7:56:52 AM	SiCl4 pre valve closed
10/17/2011	7:56:52 AM	SiCl4 post valve closed
10/17/2011	7:56:52 AM	Main Vac valve closed
10/17/2011	7:56:52 AM	Bypass valve closed
10/17/2011	7:56:52 AM	Bubbler valve closed
10/17/2011	7:56:52 AM	Helium MFC set to  0.000000
10/17/2011	7:56:52 AM	H2 MFC set to  0.000000
10/17/2011	7:56:52 AM	BCl3 MFC set to  0.000000
10/17/2011	7:56:52 AM	PHl3 MFC set to  0.000000
10/17/2011	7:56:52 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:56:52 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:56:52 AM	Tube furnace set to 0
10/17/2011	7:56:55 AM	Helium valve closed
10/17/2011	7:56:55 AM	BCl3 valve closed
10/17/2011	7:56:55 AM	PH3 valve closed
10/17/2011	7:56:55 AM	SiCl4 pre valve closed
10/17/2011	7:56:55 AM	SiCl4 post valve closed
10/17/2011	7:56:55 AM	Main Vac valve closed
10/17/2011	7:56:55 AM	Bypass valve closed
10/17/2011	7:56:55 AM	Bubbler valve closed
10/17/2011	7:56:55 AM	H2 valve opened
10/17/2011	7:56:55 AM	Helium MFC set to  0.000000
10/17/2011	7:56:55 AM	H2 MFC set to  500.000000
10/17/2011	7:56:55 AM	BCl3 MFC set to  0.000000
10/17/2011	7:56:55 AM	PHl3 MFC set to  0.000000
10/17/2011	7:56:55 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:56:55 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:56:55 AM	Tube furnace set to 0
10/17/2011	7:57:58 AM	Helium valve closed
10/17/2011	7:57:58 AM	BCl3 valve closed
10/17/2011	7:57:58 AM	PH3 valve closed
10/17/2011	7:57:58 AM	SiCl4 pre valve closed
10/17/2011	7:57:58 AM	SiCl4 post valve closed
10/17/2011	7:57:58 AM	Main Vac valve closed
10/17/2011	7:57:58 AM	Bypass valve closed
10/17/2011	7:57:58 AM	H2 valve opened
10/17/2011	7:57:58 AM	Bubbler valve opened
10/17/2011	7:57:58 AM	Helium MFC set to  0.000000
10/17/2011	7:57:58 AM	H2 MFC set to  500.000000
10/17/2011	7:57:58 AM	BCl3 MFC set to  0.000000
10/17/2011	7:57:58 AM	PHl3 MFC set to  0.000000
10/17/2011	7:57:58 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:57:58 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:57:58 AM	Tube furnace set to 0
10/17/2011	7:57:59 AM	Helium valve closed
10/17/2011	7:57:59 AM	BCl3 valve closed
10/17/2011	7:57:59 AM	PH3 valve closed
10/17/2011	7:57:59 AM	SiCl4 pre valve closed
10/17/2011	7:57:59 AM	SiCl4 post valve closed
10/17/2011	7:57:59 AM	Main Vac valve closed
10/17/2011	7:57:59 AM	Bypass valve closed
10/17/2011	7:57:59 AM	H2 valve opened
10/17/2011	7:57:59 AM	Bubbler valve opened
10/17/2011	7:57:59 AM	Helium MFC set to  0.000000
10/17/2011	7:57:59 AM	H2 MFC set to  500.000000
10/17/2011	7:57:59 AM	BCl3 MFC set to  0.000000
10/17/2011	7:57:59 AM	PHl3 MFC set to  0.000000
10/17/2011	7:57:59 AM	SiCl4 MFC set to  0.000000
10/17/2011	7:57:59 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:57:59 AM	Tube furnace set to 1000
10/17/2011	8:17:59 AM	Helium valve closed
10/17/2011	8:17:59 AM	PH3 valve closed
10/17/2011	8:17:59 AM	Main Vac valve closed
10/17/2011	8:17:59 AM	Bypass valve closed
10/17/2011	8:17:59 AM	H2 valve opened
10/17/2011	8:17:59 AM	BCl3 valve opened
10/17/2011	8:17:59 AM	SiCl4 pre valve opened
10/17/2011	8:17:59 AM	SiCl4 post valve opened
10/17/2011	8:17:59 AM	Bubbler valve opened
10/17/2011	8:17:59 AM	Helium MFC set to  0.000000
10/17/2011	8:17:59 AM	H2 MFC set to  500.000000
10/17/2011	8:17:59 AM	BCl3 MFC set to  2.500000
10/17/2011	8:17:59 AM	PHl3 MFC set to  0.000000
10/17/2011	8:17:59 AM	SiCl4 MFC set to  50.000000
10/17/2011	8:17:59 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	8:17:59 AM	Tube furnace set to 1000
10/17/2011	8:32:59 AM	Helium valve closed
10/17/2011	8:32:59 AM	BCl3 valve closed
10/17/2011	8:32:59 AM	PH3 valve closed
10/17/2011	8:32:59 AM	SiCl4 pre valve closed
10/17/2011	8:32:59 AM	SiCl4 post valve closed
10/17/2011	8:32:59 AM	Main Vac valve closed
10/17/2011	8:32:59 AM	Bypass valve closed
10/17/2011	8:32:59 AM	H2 valve opened
10/17/2011	8:32:59 AM	Bubbler valve opened
10/17/2011	8:32:59 AM	Helium MFC set to  0.000000
10/17/2011	8:32:59 AM	H2 MFC set to  500.000000
10/17/2011	8:33:00 AM	BCl3 MFC set to  0.000000
10/17/2011	8:33:00 AM	PHl3 MFC set to  0.000000
10/17/2011	8:33:00 AM	SiCl4 MFC set to  0.000000
10/17/2011	8:33:00 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	8:33:00 AM	Tube furnace set to 750
10/17/2011	8:38:00 AM	H2 valve closed
10/17/2011	8:38:00 AM	BCl3 valve closed
10/17/2011	8:38:00 AM	PH3 valve closed
10/17/2011	8:38:00 AM	SiCl4 pre valve closed
10/17/2011	8:38:00 AM	SiCl4 post valve closed
10/17/2011	8:38:00 AM	Main Vac valve closed
10/17/2011	8:38:00 AM	Bypass valve closed
10/17/2011	8:38:00 AM	Helium valve opened
10/17/2011	8:38:00 AM	Bubbler valve opened
10/17/2011	8:38:00 AM	Helium MFC set to  500.000000
10/17/2011	8:38:00 AM	H2 MFC set to  0.000000
10/17/2011	8:38:00 AM	BCl3 MFC set to  0.000000
10/17/2011	8:38:00 AM	PHl3 MFC set to  0.000000
10/17/2011	8:38:00 AM	SiCl4 MFC set to  0.000000
10/17/2011	8:38:00 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	8:38:00 AM	Tube furnace set to 0
10/17/2011	8:58:00 AM	Helium valve closed
10/17/2011	8:58:00 AM	H2 valve closed
10/17/2011	8:58:00 AM	BCl3 valve closed
10/17/2011	8:58:00 AM	PH3 valve closed
10/17/2011	8:58:00 AM	SiCl4 pre valve closed
10/17/2011	8:58:00 AM	SiCl4 post valve closed
10/17/2011	8:58:00 AM	Main Vac valve closed
10/17/2011	8:58:00 AM	Bypass valve closed
10/17/2011	8:58:00 AM	Bubbler valve closed
10/17/2011	8:58:00 AM	Helium MFC set to  0.000000
10/17/2011	8:58:00 AM	H2 MFC set to  0.000000
10/17/2011	8:58:00 AM	BCl3 MFC set to  0.000000
10/17/2011	8:58:00 AM	PHl3 MFC set to  0.000000
10/17/2011	8:58:00 AM	SiCl4 MFC set to  0.000000
10/17/2011	8:58:00 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	8:58:00 AM	Tube furnace set to 0
10/17/2011	8:58:01 AM	Run finished at 8:58 AM
10/17/2011	9:09:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2011	9:09:39 AM	Recipe started at 9:09 AM
10/17/2011	9:09:39 AM	Helium valve closed
10/17/2011	9:09:39 AM	H2 valve closed
10/17/2011	9:09:39 AM	BCl3 valve closed
10/17/2011	9:09:39 AM	PH3 valve closed
10/17/2011	9:09:39 AM	SiCl4 pre valve closed
10/17/2011	9:09:39 AM	SiCl4 post valve closed
10/17/2011	9:09:39 AM	Main Vac valve closed
10/17/2011	9:09:39 AM	Bubbler valve closed
10/17/2011	9:09:39 AM	Bypass valve opened
10/17/2011	9:09:39 AM	Helium MFC set to  0.000000
10/17/2011	9:09:39 AM	H2 MFC set to  0.000000
10/17/2011	9:09:39 AM	BCl3 MFC set to  0.000000
10/17/2011	9:09:39 AM	PHl3 MFC set to  0.000000
10/17/2011	9:09:39 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:09:39 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:09:39 AM	Tube furnace set to 0
10/17/2011	9:10:47 AM	Helium valve closed
10/17/2011	9:10:47 AM	H2 valve closed
10/17/2011	9:10:47 AM	BCl3 valve closed
10/17/2011	9:10:47 AM	PH3 valve closed
10/17/2011	9:10:47 AM	SiCl4 pre valve closed
10/17/2011	9:10:47 AM	SiCl4 post valve closed
10/17/2011	9:10:47 AM	Main Vac valve closed
10/17/2011	9:10:47 AM	Bubbler valve closed
10/17/2011	9:10:47 AM	Bypass valve opened
10/17/2011	9:10:47 AM	Helium MFC set to  0.000000
10/17/2011	9:10:47 AM	H2 MFC set to  0.000000
10/17/2011	9:10:47 AM	BCl3 MFC set to  0.000000
10/17/2011	9:10:47 AM	PHl3 MFC set to  0.000000
10/17/2011	9:10:47 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:10:47 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:10:47 AM	Tube furnace set to 0
10/17/2011	9:11:47 AM	Helium valve closed
10/17/2011	9:11:47 AM	H2 valve closed
10/17/2011	9:11:47 AM	BCl3 valve closed
10/17/2011	9:11:47 AM	PH3 valve closed
10/17/2011	9:11:47 AM	SiCl4 pre valve closed
10/17/2011	9:11:47 AM	SiCl4 post valve closed
10/17/2011	9:11:47 AM	Bypass valve closed
10/17/2011	9:11:47 AM	Bubbler valve closed
10/17/2011	9:11:47 AM	Main Vac valve opened
10/17/2011	9:11:47 AM	Helium MFC set to  0.000000
10/17/2011	9:11:47 AM	H2 MFC set to  0.000000
10/17/2011	9:11:47 AM	BCl3 MFC set to  0.000000
10/17/2011	9:11:47 AM	PHl3 MFC set to  0.000000
10/17/2011	9:11:47 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:11:47 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:11:47 AM	Tube furnace set to 0
10/17/2011	9:11:48 AM	Run finished at 9:11 AM
10/17/2011	9:11:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2011	9:17:43 AM	Recipe started at 9:17 AM
10/17/2011	9:17:43 AM	Helium valve closed
10/17/2011	9:17:43 AM	H2 valve closed
10/17/2011	9:17:43 AM	BCl3 valve closed
10/17/2011	9:17:43 AM	PH3 valve closed
10/17/2011	9:17:43 AM	SiCl4 pre valve closed
10/17/2011	9:17:43 AM	SiCl4 post valve closed
10/17/2011	9:17:43 AM	Bypass valve closed
10/17/2011	9:17:43 AM	Bubbler valve closed
10/17/2011	9:17:43 AM	Main Vac valve opened
10/17/2011	9:17:43 AM	Helium MFC set to  0.000000
10/17/2011	9:17:43 AM	H2 MFC set to  0.000000
10/17/2011	9:17:43 AM	BCl3 MFC set to  0.000000
10/17/2011	9:17:43 AM	PHl3 MFC set to  0.000000
10/17/2011	9:17:43 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:17:43 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:17:43 AM	Tube furnace set to 150
10/17/2011	9:18:13 AM	H2 valve closed
10/17/2011	9:18:13 AM	BCl3 valve closed
10/17/2011	9:18:13 AM	PH3 valve closed
10/17/2011	9:18:13 AM	SiCl4 pre valve closed
10/17/2011	9:18:13 AM	SiCl4 post valve closed
10/17/2011	9:18:13 AM	Bypass valve closed
10/17/2011	9:18:13 AM	Bubbler valve closed
10/17/2011	9:18:13 AM	Helium valve opened
10/17/2011	9:18:13 AM	Main Vac valve opened
10/17/2011	9:18:13 AM	Helium MFC set to  20.000000
10/17/2011	9:18:13 AM	H2 MFC set to  0.000000
10/17/2011	9:18:13 AM	BCl3 MFC set to  0.000000
10/17/2011	9:18:13 AM	PHl3 MFC set to  0.000000
10/17/2011	9:18:13 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:18:13 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:18:13 AM	Tube furnace set to 150
10/17/2011	9:18:43 AM	Helium valve closed
10/17/2011	9:18:43 AM	H2 valve closed
10/17/2011	9:18:43 AM	BCl3 valve closed
10/17/2011	9:18:43 AM	PH3 valve closed
10/17/2011	9:18:43 AM	SiCl4 pre valve closed
10/17/2011	9:18:43 AM	SiCl4 post valve closed
10/17/2011	9:18:43 AM	Bypass valve closed
10/17/2011	9:18:43 AM	Bubbler valve closed
10/17/2011	9:18:43 AM	Main Vac valve opened
10/17/2011	9:18:43 AM	Helium MFC set to  0.000000
10/17/2011	9:18:43 AM	H2 MFC set to  0.000000
10/17/2011	9:18:43 AM	BCl3 MFC set to  0.000000
10/17/2011	9:18:43 AM	PHl3 MFC set to  0.000000
10/17/2011	9:18:43 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:18:43 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:18:43 AM	Tube furnace set to 150
10/17/2011	9:19:13 AM	H2 valve closed
10/17/2011	9:19:13 AM	BCl3 valve closed
10/17/2011	9:19:13 AM	PH3 valve closed
10/17/2011	9:19:13 AM	SiCl4 pre valve closed
10/17/2011	9:19:13 AM	SiCl4 post valve closed
10/17/2011	9:19:13 AM	Bypass valve closed
10/17/2011	9:19:13 AM	Bubbler valve closed
10/17/2011	9:19:13 AM	Helium valve opened
10/17/2011	9:19:13 AM	Main Vac valve opened
10/17/2011	9:19:13 AM	Helium MFC set to  20.000000
10/17/2011	9:19:13 AM	H2 MFC set to  0.000000
10/17/2011	9:19:13 AM	BCl3 MFC set to  0.000000
10/17/2011	9:19:13 AM	PHl3 MFC set to  0.000000
10/17/2011	9:19:13 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:19:13 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:19:13 AM	Tube furnace set to 150
10/17/2011	9:19:43 AM	Helium valve closed
10/17/2011	9:19:43 AM	H2 valve closed
10/17/2011	9:19:43 AM	BCl3 valve closed
10/17/2011	9:19:43 AM	PH3 valve closed
10/17/2011	9:19:43 AM	SiCl4 pre valve closed
10/17/2011	9:19:43 AM	SiCl4 post valve closed
10/17/2011	9:19:43 AM	Bypass valve closed
10/17/2011	9:19:43 AM	Bubbler valve closed
10/17/2011	9:19:43 AM	Main Vac valve opened
10/17/2011	9:19:43 AM	Helium MFC set to  0.000000
10/17/2011	9:19:43 AM	H2 MFC set to  0.000000
10/17/2011	9:19:43 AM	BCl3 MFC set to  0.000000
10/17/2011	9:19:43 AM	PHl3 MFC set to  0.000000
10/17/2011	9:19:43 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:19:43 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:19:44 AM	Tube furnace set to 150
10/17/2011	9:20:14 AM	H2 valve closed
10/17/2011	9:20:14 AM	BCl3 valve closed
10/17/2011	9:20:14 AM	PH3 valve closed
10/17/2011	9:20:14 AM	SiCl4 pre valve closed
10/17/2011	9:20:14 AM	SiCl4 post valve closed
10/17/2011	9:20:14 AM	Bypass valve closed
10/17/2011	9:20:14 AM	Bubbler valve closed
10/17/2011	9:20:14 AM	Helium valve opened
10/17/2011	9:20:14 AM	Main Vac valve opened
10/17/2011	9:20:14 AM	Helium MFC set to  20.000000
10/17/2011	9:20:14 AM	H2 MFC set to  0.000000
10/17/2011	9:20:14 AM	BCl3 MFC set to  0.000000
10/17/2011	9:20:14 AM	PHl3 MFC set to  0.000000
10/17/2011	9:20:14 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:20:14 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:20:14 AM	Tube furnace set to 150
10/17/2011	9:20:44 AM	Helium valve closed
10/17/2011	9:20:44 AM	H2 valve closed
10/17/2011	9:20:44 AM	BCl3 valve closed
10/17/2011	9:20:44 AM	PH3 valve closed
10/17/2011	9:20:44 AM	SiCl4 pre valve closed
10/17/2011	9:20:44 AM	SiCl4 post valve closed
10/17/2011	9:20:44 AM	Bypass valve closed
10/17/2011	9:20:44 AM	Bubbler valve closed
10/17/2011	9:20:44 AM	Main Vac valve opened
10/17/2011	9:20:44 AM	Helium MFC set to  0.000000
10/17/2011	9:20:44 AM	H2 MFC set to  0.000000
10/17/2011	9:20:44 AM	BCl3 MFC set to  0.000000
10/17/2011	9:20:44 AM	PHl3 MFC set to  0.000000
10/17/2011	9:20:44 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:20:44 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:20:44 AM	Tube furnace set to 150
10/17/2011	9:21:14 AM	H2 valve closed
10/17/2011	9:21:14 AM	BCl3 valve closed
10/17/2011	9:21:14 AM	PH3 valve closed
10/17/2011	9:21:14 AM	SiCl4 pre valve closed
10/17/2011	9:21:14 AM	SiCl4 post valve closed
10/17/2011	9:21:14 AM	Bypass valve closed
10/17/2011	9:21:14 AM	Bubbler valve closed
10/17/2011	9:21:14 AM	Helium valve opened
10/17/2011	9:21:14 AM	Main Vac valve opened
10/17/2011	9:21:14 AM	Helium MFC set to  20.000000
10/17/2011	9:21:14 AM	H2 MFC set to  0.000000
10/17/2011	9:21:14 AM	BCl3 MFC set to  0.000000
10/17/2011	9:21:14 AM	PHl3 MFC set to  0.000000
10/17/2011	9:21:14 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:21:14 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:21:14 AM	Tube furnace set to 150
10/17/2011	9:21:44 AM	Helium valve closed
10/17/2011	9:21:44 AM	H2 valve closed
10/17/2011	9:21:44 AM	BCl3 valve closed
10/17/2011	9:21:44 AM	PH3 valve closed
10/17/2011	9:21:44 AM	SiCl4 pre valve closed
10/17/2011	9:21:44 AM	SiCl4 post valve closed
10/17/2011	9:21:44 AM	Bypass valve closed
10/17/2011	9:21:44 AM	Bubbler valve closed
10/17/2011	9:21:44 AM	Main Vac valve opened
10/17/2011	9:21:44 AM	Helium MFC set to  0.000000
10/17/2011	9:21:44 AM	H2 MFC set to  0.000000
10/17/2011	9:21:44 AM	BCl3 MFC set to  0.000000
10/17/2011	9:21:44 AM	PHl3 MFC set to  0.000000
10/17/2011	9:21:44 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:21:44 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:21:44 AM	Tube furnace set to 150
10/17/2011	9:22:14 AM	H2 valve closed
10/17/2011	9:22:14 AM	BCl3 valve closed
10/17/2011	9:22:14 AM	PH3 valve closed
10/17/2011	9:22:14 AM	SiCl4 pre valve closed
10/17/2011	9:22:14 AM	SiCl4 post valve closed
10/17/2011	9:22:14 AM	Bypass valve closed
10/17/2011	9:22:14 AM	Bubbler valve closed
10/17/2011	9:22:14 AM	Helium valve opened
10/17/2011	9:22:14 AM	Main Vac valve opened
10/17/2011	9:22:14 AM	Helium MFC set to  20.000000
10/17/2011	9:22:14 AM	H2 MFC set to  0.000000
10/17/2011	9:22:14 AM	BCl3 MFC set to  0.000000
10/17/2011	9:22:14 AM	PHl3 MFC set to  0.000000
10/17/2011	9:22:14 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:22:15 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:22:15 AM	Tube furnace set to 150
10/17/2011	9:22:45 AM	Helium valve closed
10/17/2011	9:22:45 AM	H2 valve closed
10/17/2011	9:22:45 AM	BCl3 valve closed
10/17/2011	9:22:45 AM	PH3 valve closed
10/17/2011	9:22:45 AM	SiCl4 pre valve closed
10/17/2011	9:22:45 AM	SiCl4 post valve closed
10/17/2011	9:22:45 AM	Bypass valve closed
10/17/2011	9:22:45 AM	Bubbler valve closed
10/17/2011	9:22:45 AM	Main Vac valve opened
10/17/2011	9:22:45 AM	Helium MFC set to  0.000000
10/17/2011	9:22:45 AM	H2 MFC set to  0.000000
10/17/2011	9:22:45 AM	BCl3 MFC set to  0.000000
10/17/2011	9:22:45 AM	PHl3 MFC set to  0.000000
10/17/2011	9:22:45 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:22:45 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:22:45 AM	Tube furnace set to 150
10/17/2011	9:23:15 AM	H2 valve closed
10/17/2011	9:23:15 AM	BCl3 valve closed
10/17/2011	9:23:15 AM	PH3 valve closed
10/17/2011	9:23:15 AM	SiCl4 pre valve closed
10/17/2011	9:23:15 AM	SiCl4 post valve closed
10/17/2011	9:23:15 AM	Bypass valve closed
10/17/2011	9:23:15 AM	Bubbler valve closed
10/17/2011	9:23:15 AM	Helium valve opened
10/17/2011	9:23:15 AM	Main Vac valve opened
10/17/2011	9:23:15 AM	Helium MFC set to  20.000000
10/17/2011	9:23:15 AM	H2 MFC set to  0.000000
10/17/2011	9:23:15 AM	BCl3 MFC set to  0.000000
10/17/2011	9:23:15 AM	PHl3 MFC set to  0.000000
10/17/2011	9:23:15 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:23:15 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:23:15 AM	Tube furnace set to 150
10/17/2011	9:23:45 AM	Helium valve closed
10/17/2011	9:23:45 AM	H2 valve closed
10/17/2011	9:23:45 AM	BCl3 valve closed
10/17/2011	9:23:45 AM	PH3 valve closed
10/17/2011	9:23:45 AM	SiCl4 pre valve closed
10/17/2011	9:23:45 AM	SiCl4 post valve closed
10/17/2011	9:23:45 AM	Bypass valve closed
10/17/2011	9:23:45 AM	Bubbler valve closed
10/17/2011	9:23:45 AM	Main Vac valve opened
10/17/2011	9:23:45 AM	Helium MFC set to  0.000000
10/17/2011	9:23:45 AM	H2 MFC set to  0.000000
10/17/2011	9:23:45 AM	BCl3 MFC set to  0.000000
10/17/2011	9:23:45 AM	PHl3 MFC set to  0.000000
10/17/2011	9:23:45 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:23:45 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:23:45 AM	Tube furnace set to 150
10/17/2011	9:24:15 AM	H2 valve closed
10/17/2011	9:24:15 AM	BCl3 valve closed
10/17/2011	9:24:15 AM	PH3 valve closed
10/17/2011	9:24:15 AM	SiCl4 pre valve closed
10/17/2011	9:24:15 AM	SiCl4 post valve closed
10/17/2011	9:24:15 AM	Bypass valve closed
10/17/2011	9:24:15 AM	Bubbler valve closed
10/17/2011	9:24:15 AM	Helium valve opened
10/17/2011	9:24:15 AM	Main Vac valve opened
10/17/2011	9:24:15 AM	Helium MFC set to  20.000000
10/17/2011	9:24:15 AM	H2 MFC set to  0.000000
10/17/2011	9:24:15 AM	BCl3 MFC set to  0.000000
10/17/2011	9:24:15 AM	PHl3 MFC set to  0.000000
10/17/2011	9:24:15 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:24:15 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:24:16 AM	Tube furnace set to 150
10/17/2011	9:24:46 AM	Helium valve closed
10/17/2011	9:24:46 AM	H2 valve closed
10/17/2011	9:24:46 AM	BCl3 valve closed
10/17/2011	9:24:46 AM	PH3 valve closed
10/17/2011	9:24:46 AM	SiCl4 pre valve closed
10/17/2011	9:24:46 AM	SiCl4 post valve closed
10/17/2011	9:24:46 AM	Bypass valve closed
10/17/2011	9:24:46 AM	Bubbler valve closed
10/17/2011	9:24:46 AM	Main Vac valve opened
10/17/2011	9:24:46 AM	Helium MFC set to  0.000000
10/17/2011	9:24:46 AM	H2 MFC set to  0.000000
10/17/2011	9:24:46 AM	BCl3 MFC set to  0.000000
10/17/2011	9:24:46 AM	PHl3 MFC set to  0.000000
10/17/2011	9:24:46 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:24:46 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:24:46 AM	Tube furnace set to 150
10/17/2011	9:25:16 AM	H2 valve closed
10/17/2011	9:25:16 AM	BCl3 valve closed
10/17/2011	9:25:16 AM	PH3 valve closed
10/17/2011	9:25:16 AM	SiCl4 pre valve closed
10/17/2011	9:25:16 AM	SiCl4 post valve closed
10/17/2011	9:25:16 AM	Bypass valve closed
10/17/2011	9:25:16 AM	Bubbler valve closed
10/17/2011	9:25:16 AM	Helium valve opened
10/17/2011	9:25:16 AM	Main Vac valve opened
10/17/2011	9:25:16 AM	Helium MFC set to  20.000000
10/17/2011	9:25:16 AM	H2 MFC set to  0.000000
10/17/2011	9:25:16 AM	BCl3 MFC set to  0.000000
10/17/2011	9:25:16 AM	PHl3 MFC set to  0.000000
10/17/2011	9:25:16 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:25:16 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:25:16 AM	Tube furnace set to 150
10/17/2011	9:25:46 AM	Helium valve closed
10/17/2011	9:25:46 AM	H2 valve closed
10/17/2011	9:25:46 AM	BCl3 valve closed
10/17/2011	9:25:46 AM	PH3 valve closed
10/17/2011	9:25:46 AM	SiCl4 pre valve closed
10/17/2011	9:25:46 AM	SiCl4 post valve closed
10/17/2011	9:25:46 AM	Bypass valve closed
10/17/2011	9:25:46 AM	Bubbler valve closed
10/17/2011	9:25:46 AM	Main Vac valve opened
10/17/2011	9:25:46 AM	Helium MFC set to  0.000000
10/17/2011	9:25:46 AM	H2 MFC set to  0.000000
10/17/2011	9:25:46 AM	BCl3 MFC set to  0.000000
10/17/2011	9:25:46 AM	PHl3 MFC set to  0.000000
10/17/2011	9:25:46 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:25:46 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:25:46 AM	Tube furnace set to 150
10/17/2011	9:26:16 AM	H2 valve closed
10/17/2011	9:26:16 AM	BCl3 valve closed
10/17/2011	9:26:16 AM	PH3 valve closed
10/17/2011	9:26:16 AM	SiCl4 pre valve closed
10/17/2011	9:26:16 AM	SiCl4 post valve closed
10/17/2011	9:26:16 AM	Bypass valve closed
10/17/2011	9:26:16 AM	Bubbler valve closed
10/17/2011	9:26:16 AM	Helium valve opened
10/17/2011	9:26:16 AM	Main Vac valve opened
10/17/2011	9:26:16 AM	Helium MFC set to  20.000000
10/17/2011	9:26:16 AM	H2 MFC set to  0.000000
10/17/2011	9:26:16 AM	BCl3 MFC set to  0.000000
10/17/2011	9:26:16 AM	PHl3 MFC set to  0.000000
10/17/2011	9:26:16 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:26:16 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:26:16 AM	Tube furnace set to 150
10/17/2011	9:26:46 AM	Helium valve closed
10/17/2011	9:26:46 AM	H2 valve closed
10/17/2011	9:26:46 AM	BCl3 valve closed
10/17/2011	9:26:46 AM	PH3 valve closed
10/17/2011	9:26:46 AM	SiCl4 pre valve closed
10/17/2011	9:26:46 AM	SiCl4 post valve closed
10/17/2011	9:26:46 AM	Bypass valve closed
10/17/2011	9:26:46 AM	Bubbler valve closed
10/17/2011	9:26:46 AM	Main Vac valve opened
10/17/2011	9:26:46 AM	Helium MFC set to  0.000000
10/17/2011	9:26:46 AM	H2 MFC set to  0.000000
10/17/2011	9:26:46 AM	BCl3 MFC set to  0.000000
10/17/2011	9:26:46 AM	PHl3 MFC set to  0.000000
10/17/2011	9:26:46 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:26:46 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:26:47 AM	Tube furnace set to 150
10/17/2011	9:27:17 AM	H2 valve closed
10/17/2011	9:27:17 AM	BCl3 valve closed
10/17/2011	9:27:17 AM	PH3 valve closed
10/17/2011	9:27:17 AM	SiCl4 pre valve closed
10/17/2011	9:27:17 AM	SiCl4 post valve closed
10/17/2011	9:27:17 AM	Bypass valve closed
10/17/2011	9:27:17 AM	Bubbler valve closed
10/17/2011	9:27:17 AM	Helium valve opened
10/17/2011	9:27:17 AM	Main Vac valve opened
10/17/2011	9:27:17 AM	Helium MFC set to  20.000000
10/17/2011	9:27:17 AM	H2 MFC set to  0.000000
10/17/2011	9:27:17 AM	BCl3 MFC set to  0.000000
10/17/2011	9:27:17 AM	PHl3 MFC set to  0.000000
10/17/2011	9:27:17 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:27:17 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:27:17 AM	Tube furnace set to 150
10/17/2011	9:27:47 AM	Helium valve closed
10/17/2011	9:27:47 AM	H2 valve closed
10/17/2011	9:27:47 AM	BCl3 valve closed
10/17/2011	9:27:47 AM	PH3 valve closed
10/17/2011	9:27:47 AM	SiCl4 pre valve closed
10/17/2011	9:27:47 AM	SiCl4 post valve closed
10/17/2011	9:27:47 AM	Bypass valve closed
10/17/2011	9:27:47 AM	Bubbler valve closed
10/17/2011	9:27:47 AM	Main Vac valve opened
10/17/2011	9:27:47 AM	Helium MFC set to  0.000000
10/17/2011	9:27:47 AM	H2 MFC set to  0.000000
10/17/2011	9:27:47 AM	BCl3 MFC set to  0.000000
10/17/2011	9:27:47 AM	PHl3 MFC set to  0.000000
10/17/2011	9:27:47 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:27:47 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:27:47 AM	Tube furnace set to 150
10/17/2011	9:27:48 AM	Run finished at 9:27 AM
10/17/2011	9:30:22 AM	Main Vac valve closed
10/17/2011	9:30:42 AM	Main Vac valve opened
10/17/2011	9:33:09 AM	Main Vac valve closed
10/17/2011	9:33:30 AM	Main Vac valve opened
10/17/2011	9:35:16 AM	Recipe started at 9:35 AM
10/17/2011	9:35:16 AM	Helium valve closed
10/17/2011	9:35:16 AM	H2 valve closed
10/17/2011	9:35:16 AM	BCl3 valve closed
10/17/2011	9:35:16 AM	PH3 valve closed
10/17/2011	9:35:16 AM	SiCl4 pre valve closed
10/17/2011	9:35:16 AM	SiCl4 post valve closed
10/17/2011	9:35:16 AM	Main Vac valve closed
10/17/2011	9:35:16 AM	Bypass valve closed
10/17/2011	9:35:16 AM	Bubbler valve closed
10/17/2011	9:35:16 AM	Helium MFC set to  0.000000
10/17/2011	9:35:16 AM	H2 MFC set to  0.000000
10/17/2011	9:35:16 AM	BCl3 MFC set to  0.000000
10/17/2011	9:35:16 AM	PHl3 MFC set to  0.000000
10/17/2011	9:35:16 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:35:16 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:35:16 AM	Tube furnace set to 0
10/17/2011	9:35:19 AM	Helium valve closed
10/17/2011	9:35:19 AM	BCl3 valve closed
10/17/2011	9:35:19 AM	PH3 valve closed
10/17/2011	9:35:19 AM	SiCl4 pre valve closed
10/17/2011	9:35:19 AM	SiCl4 post valve closed
10/17/2011	9:35:19 AM	Main Vac valve closed
10/17/2011	9:35:19 AM	Bypass valve closed
10/17/2011	9:35:19 AM	Bubbler valve closed
10/17/2011	9:35:19 AM	H2 valve opened
10/17/2011	9:35:19 AM	Helium MFC set to  0.000000
10/17/2011	9:35:19 AM	H2 MFC set to  500.000000
10/17/2011	9:35:19 AM	BCl3 MFC set to  0.000000
10/17/2011	9:35:19 AM	PHl3 MFC set to  0.000000
10/17/2011	9:35:19 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:35:19 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:35:19 AM	Tube furnace set to 0
10/17/2011	9:36:23 AM	Helium valve closed
10/17/2011	9:36:23 AM	BCl3 valve closed
10/17/2011	9:36:23 AM	PH3 valve closed
10/17/2011	9:36:23 AM	SiCl4 pre valve closed
10/17/2011	9:36:23 AM	SiCl4 post valve closed
10/17/2011	9:36:23 AM	Main Vac valve closed
10/17/2011	9:36:23 AM	Bypass valve closed
10/17/2011	9:36:23 AM	H2 valve opened
10/17/2011	9:36:23 AM	Bubbler valve opened
10/17/2011	9:36:23 AM	Helium MFC set to  0.000000
10/17/2011	9:36:23 AM	H2 MFC set to  500.000000
10/17/2011	9:36:23 AM	BCl3 MFC set to  0.000000
10/17/2011	9:36:23 AM	PHl3 MFC set to  0.000000
10/17/2011	9:36:23 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:36:23 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:36:23 AM	Tube furnace set to 0
10/17/2011	9:36:24 AM	Helium valve closed
10/17/2011	9:36:24 AM	BCl3 valve closed
10/17/2011	9:36:24 AM	PH3 valve closed
10/17/2011	9:36:24 AM	SiCl4 pre valve closed
10/17/2011	9:36:24 AM	SiCl4 post valve closed
10/17/2011	9:36:24 AM	Main Vac valve closed
10/17/2011	9:36:24 AM	Bypass valve closed
10/17/2011	9:36:24 AM	H2 valve opened
10/17/2011	9:36:24 AM	Bubbler valve opened
10/17/2011	9:36:24 AM	Helium MFC set to  0.000000
10/17/2011	9:36:24 AM	H2 MFC set to  500.000000
10/17/2011	9:36:24 AM	BCl3 MFC set to  0.000000
10/17/2011	9:36:24 AM	PHl3 MFC set to  0.000000
10/17/2011	9:36:24 AM	SiCl4 MFC set to  0.000000
10/17/2011	9:36:24 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:36:24 AM	Tube furnace set to 1000
10/17/2011	9:56:24 AM	Helium valve closed
10/17/2011	9:56:24 AM	PH3 valve closed
10/17/2011	9:56:24 AM	Main Vac valve closed
10/17/2011	9:56:24 AM	Bypass valve closed
10/17/2011	9:56:24 AM	H2 valve opened
10/17/2011	9:56:24 AM	BCl3 valve opened
10/17/2011	9:56:24 AM	SiCl4 pre valve opened
10/17/2011	9:56:24 AM	SiCl4 post valve opened
10/17/2011	9:56:24 AM	Bubbler valve opened
10/17/2011	9:56:24 AM	Helium MFC set to  0.000000
10/17/2011	9:56:24 AM	H2 MFC set to  500.000000
10/17/2011	9:56:24 AM	BCl3 MFC set to  2.000000
10/17/2011	9:56:24 AM	PHl3 MFC set to  0.000000
10/17/2011	9:56:24 AM	SiCl4 MFC set to  40.000000
10/17/2011	9:56:24 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	9:56:25 AM	Tube furnace set to 1000
10/17/2011	10:11:25 AM	Helium valve closed
10/17/2011	10:11:25 AM	BCl3 valve closed
10/17/2011	10:11:25 AM	PH3 valve closed
10/17/2011	10:11:25 AM	SiCl4 pre valve closed
10/17/2011	10:11:25 AM	SiCl4 post valve closed
10/17/2011	10:11:25 AM	Main Vac valve closed
10/17/2011	10:11:25 AM	Bypass valve closed
10/17/2011	10:11:25 AM	H2 valve opened
10/17/2011	10:11:25 AM	Bubbler valve opened
10/17/2011	10:11:25 AM	Helium MFC set to  0.000000
10/17/2011	10:11:25 AM	H2 MFC set to  500.000000
10/17/2011	10:11:25 AM	BCl3 MFC set to  0.000000
10/17/2011	10:11:25 AM	PHl3 MFC set to  0.000000
10/17/2011	10:11:25 AM	SiCl4 MFC set to  0.000000
10/17/2011	10:11:25 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	10:11:25 AM	Tube furnace set to 750
10/17/2011	10:16:25 AM	H2 valve closed
10/17/2011	10:16:25 AM	BCl3 valve closed
10/17/2011	10:16:25 AM	PH3 valve closed
10/17/2011	10:16:25 AM	SiCl4 pre valve closed
10/17/2011	10:16:25 AM	SiCl4 post valve closed
10/17/2011	10:16:25 AM	Main Vac valve closed
10/17/2011	10:16:25 AM	Bypass valve closed
10/17/2011	10:16:25 AM	Helium valve opened
10/17/2011	10:16:25 AM	Bubbler valve opened
10/17/2011	10:16:25 AM	Helium MFC set to  500.000000
10/17/2011	10:16:25 AM	H2 MFC set to  0.000000
10/17/2011	10:16:25 AM	BCl3 MFC set to  0.000000
10/17/2011	10:16:25 AM	PHl3 MFC set to  0.000000
10/17/2011	10:16:25 AM	SiCl4 MFC set to  0.000000
10/17/2011	10:16:25 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	10:16:25 AM	Tube furnace set to 0
10/17/2011	10:36:25 AM	Helium valve closed
10/17/2011	10:36:25 AM	H2 valve closed
10/17/2011	10:36:25 AM	BCl3 valve closed
10/17/2011	10:36:25 AM	PH3 valve closed
10/17/2011	10:36:25 AM	SiCl4 pre valve closed
10/17/2011	10:36:25 AM	SiCl4 post valve closed
10/17/2011	10:36:25 AM	Main Vac valve closed
10/17/2011	10:36:25 AM	Bypass valve closed
10/17/2011	10:36:25 AM	Bubbler valve closed
10/17/2011	10:36:25 AM	Helium MFC set to  0.000000
10/17/2011	10:36:25 AM	H2 MFC set to  0.000000
10/17/2011	10:36:25 AM	BCl3 MFC set to  0.000000
10/17/2011	10:36:25 AM	PHl3 MFC set to  0.000000
10/17/2011	10:36:25 AM	SiCl4 MFC set to  0.000000
10/17/2011	10:36:25 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	10:36:25 AM	Tube furnace set to 0
10/17/2011	10:36:26 AM	Run finished at 10:36 AM
10/17/2011	10:45:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2011	10:45:07 AM	Recipe started at 10:45 AM
10/17/2011	10:45:07 AM	Helium valve closed
10/17/2011	10:45:07 AM	H2 valve closed
10/17/2011	10:45:07 AM	BCl3 valve closed
10/17/2011	10:45:07 AM	PH3 valve closed
10/17/2011	10:45:07 AM	SiCl4 pre valve closed
10/17/2011	10:45:07 AM	SiCl4 post valve closed
10/17/2011	10:45:07 AM	Main Vac valve closed
10/17/2011	10:45:07 AM	Bubbler valve closed
10/17/2011	10:45:07 AM	Bypass valve opened
10/17/2011	10:45:07 AM	Helium MFC set to  0.000000
10/17/2011	10:45:07 AM	H2 MFC set to  0.000000
10/17/2011	10:45:07 AM	BCl3 MFC set to  0.000000
10/17/2011	10:45:07 AM	PHl3 MFC set to  0.000000
10/17/2011	10:45:07 AM	SiCl4 MFC set to  0.000000
10/17/2011	10:45:07 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	10:45:07 AM	Tube furnace set to 0
10/17/2011	10:46:15 AM	Helium valve closed
10/17/2011	10:46:15 AM	H2 valve closed
10/17/2011	10:46:15 AM	BCl3 valve closed
10/17/2011	10:46:15 AM	PH3 valve closed
10/17/2011	10:46:15 AM	SiCl4 pre valve closed
10/17/2011	10:46:15 AM	SiCl4 post valve closed
10/17/2011	10:46:15 AM	Main Vac valve closed
10/17/2011	10:46:15 AM	Bubbler valve closed
10/17/2011	10:46:15 AM	Bypass valve opened
10/17/2011	10:46:15 AM	Helium MFC set to  0.000000
10/17/2011	10:46:15 AM	H2 MFC set to  0.000000
10/17/2011	10:46:15 AM	BCl3 MFC set to  0.000000
10/17/2011	10:46:15 AM	PHl3 MFC set to  0.000000
10/17/2011	10:46:15 AM	SiCl4 MFC set to  0.000000
10/17/2011	10:46:15 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	10:46:15 AM	Tube furnace set to 0
10/17/2011	10:47:15 AM	Helium valve closed
10/17/2011	10:47:15 AM	H2 valve closed
10/17/2011	10:47:15 AM	BCl3 valve closed
10/17/2011	10:47:15 AM	PH3 valve closed
10/17/2011	10:47:15 AM	SiCl4 pre valve closed
10/17/2011	10:47:15 AM	SiCl4 post valve closed
10/17/2011	10:47:15 AM	Bypass valve closed
10/17/2011	10:47:15 AM	Bubbler valve closed
10/17/2011	10:47:15 AM	Main Vac valve opened
10/17/2011	10:47:15 AM	Helium MFC set to  0.000000
10/17/2011	10:47:15 AM	H2 MFC set to  0.000000
10/17/2011	10:47:15 AM	BCl3 MFC set to  0.000000
10/17/2011	10:47:15 AM	PHl3 MFC set to  0.000000
10/17/2011	10:47:15 AM	SiCl4 MFC set to  0.000000
10/17/2011	10:47:15 AM	Bypass solenoid MFC set to  0.000000
10/17/2011	10:47:15 AM	Tube furnace set to 0
10/17/2011	10:47:16 AM	Run finished at 10:47 AM
10/17/2011	10:47:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2011	12:13:22 PM	Main Vac valve closed
10/17/2011	12:14:06 PM	Main Vac valve opened
10/17/2011	12:14:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/17/2011	12:14:56 PM	Recipe started at 12:14 PM
10/17/2011	12:14:56 PM	Helium valve closed
10/17/2011	12:14:56 PM	H2 valve closed
10/17/2011	12:14:56 PM	BCl3 valve closed
10/17/2011	12:14:56 PM	PH3 valve closed
10/17/2011	12:14:56 PM	SiCl4 pre valve closed
10/17/2011	12:14:56 PM	SiCl4 post valve closed
10/17/2011	12:14:56 PM	Main Vac valve closed
10/17/2011	12:14:56 PM	Bubbler valve closed
10/17/2011	12:14:56 PM	Bypass valve opened
10/17/2011	12:14:56 PM	Helium MFC set to  0.000000
10/17/2011	12:14:56 PM	H2 MFC set to  0.000000
10/17/2011	12:14:56 PM	BCl3 MFC set to  0.000000
10/17/2011	12:14:56 PM	PHl3 MFC set to  0.000000
10/17/2011	12:14:56 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:14:56 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:14:56 PM	Tube furnace set to 0
10/17/2011	12:14:56 PM	Helium valve closed
10/17/2011	12:14:56 PM	H2 valve closed
10/17/2011	12:14:56 PM	BCl3 valve closed
10/17/2011	12:14:56 PM	PH3 valve closed
10/17/2011	12:14:56 PM	SiCl4 pre valve closed
10/17/2011	12:14:56 PM	SiCl4 post valve closed
10/17/2011	12:14:56 PM	Main Vac valve closed
10/17/2011	12:14:56 PM	Bubbler valve closed
10/17/2011	12:14:56 PM	Bypass valve opened
10/17/2011	12:14:56 PM	Helium MFC set to  0.000000
10/17/2011	12:14:56 PM	H2 MFC set to  0.000000
10/17/2011	12:14:56 PM	BCl3 MFC set to  0.000000
10/17/2011	12:14:56 PM	PHl3 MFC set to  0.000000
10/17/2011	12:14:56 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:14:56 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:14:57 PM	Tube furnace set to 0
10/17/2011	12:15:05 PM	Helium valve closed
10/17/2011	12:15:05 PM	H2 valve closed
10/17/2011	12:15:05 PM	BCl3 valve closed
10/17/2011	12:15:05 PM	PH3 valve closed
10/17/2011	12:15:05 PM	SiCl4 pre valve closed
10/17/2011	12:15:05 PM	SiCl4 post valve closed
10/17/2011	12:15:05 PM	Bypass valve closed
10/17/2011	12:15:05 PM	Bubbler valve closed
10/17/2011	12:15:05 PM	Main Vac valve opened
10/17/2011	12:15:05 PM	Helium MFC set to  0.000000
10/17/2011	12:15:05 PM	H2 MFC set to  0.000000
10/17/2011	12:15:05 PM	BCl3 MFC set to  0.000000
10/17/2011	12:15:05 PM	PHl3 MFC set to  0.000000
10/17/2011	12:15:05 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:15:05 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:15:05 PM	Tube furnace set to 0
10/17/2011	12:15:13 PM	H2 valve closed
10/17/2011	12:15:13 PM	BCl3 valve closed
10/17/2011	12:15:13 PM	PH3 valve closed
10/17/2011	12:15:13 PM	SiCl4 pre valve closed
10/17/2011	12:15:13 PM	SiCl4 post valve closed
10/17/2011	12:15:13 PM	Bypass valve closed
10/17/2011	12:15:13 PM	Bubbler valve closed
10/17/2011	12:15:13 PM	Helium valve opened
10/17/2011	12:15:13 PM	Main Vac valve opened
10/17/2011	12:15:13 PM	Helium MFC set to  20.000000
10/17/2011	12:15:13 PM	H2 MFC set to  0.000000
10/17/2011	12:15:13 PM	BCl3 MFC set to  0.000000
10/17/2011	12:15:13 PM	PHl3 MFC set to  0.000000
10/17/2011	12:15:13 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:15:13 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:15:13 PM	Tube furnace set to 0
10/17/2011	12:15:43 PM	Helium valve closed
10/17/2011	12:15:43 PM	H2 valve closed
10/17/2011	12:15:43 PM	BCl3 valve closed
10/17/2011	12:15:43 PM	PH3 valve closed
10/17/2011	12:15:43 PM	SiCl4 pre valve closed
10/17/2011	12:15:43 PM	SiCl4 post valve closed
10/17/2011	12:15:43 PM	Bypass valve closed
10/17/2011	12:15:43 PM	Bubbler valve closed
10/17/2011	12:15:43 PM	Main Vac valve opened
10/17/2011	12:15:43 PM	Helium MFC set to  0.000000
10/17/2011	12:15:43 PM	H2 MFC set to  0.000000
10/17/2011	12:15:43 PM	BCl3 MFC set to  0.000000
10/17/2011	12:15:43 PM	PHl3 MFC set to  0.000000
10/17/2011	12:15:43 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:15:43 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:15:43 PM	Tube furnace set to 0
10/17/2011	12:16:13 PM	H2 valve closed
10/17/2011	12:16:13 PM	BCl3 valve closed
10/17/2011	12:16:13 PM	PH3 valve closed
10/17/2011	12:16:13 PM	SiCl4 pre valve closed
10/17/2011	12:16:13 PM	SiCl4 post valve closed
10/17/2011	12:16:13 PM	Bypass valve closed
10/17/2011	12:16:13 PM	Bubbler valve closed
10/17/2011	12:16:13 PM	Helium valve opened
10/17/2011	12:16:13 PM	Main Vac valve opened
10/17/2011	12:16:13 PM	Helium MFC set to  20.000000
10/17/2011	12:16:13 PM	H2 MFC set to  0.000000
10/17/2011	12:16:13 PM	BCl3 MFC set to  0.000000
10/17/2011	12:16:13 PM	PHl3 MFC set to  0.000000
10/17/2011	12:16:13 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:16:13 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:16:13 PM	Tube furnace set to 0
10/17/2011	12:16:43 PM	Helium valve closed
10/17/2011	12:16:43 PM	H2 valve closed
10/17/2011	12:16:43 PM	BCl3 valve closed
10/17/2011	12:16:43 PM	PH3 valve closed
10/17/2011	12:16:43 PM	SiCl4 pre valve closed
10/17/2011	12:16:43 PM	SiCl4 post valve closed
10/17/2011	12:16:43 PM	Bypass valve closed
10/17/2011	12:16:43 PM	Bubbler valve closed
10/17/2011	12:16:43 PM	Main Vac valve opened
10/17/2011	12:16:43 PM	Helium MFC set to  0.000000
10/17/2011	12:16:43 PM	H2 MFC set to  0.000000
10/17/2011	12:16:43 PM	BCl3 MFC set to  0.000000
10/17/2011	12:16:43 PM	PHl3 MFC set to  0.000000
10/17/2011	12:16:43 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:16:43 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:16:44 PM	Tube furnace set to 0
10/17/2011	12:17:14 PM	H2 valve closed
10/17/2011	12:17:14 PM	BCl3 valve closed
10/17/2011	12:17:14 PM	PH3 valve closed
10/17/2011	12:17:14 PM	SiCl4 pre valve closed
10/17/2011	12:17:14 PM	SiCl4 post valve closed
10/17/2011	12:17:14 PM	Bypass valve closed
10/17/2011	12:17:14 PM	Bubbler valve closed
10/17/2011	12:17:14 PM	Helium valve opened
10/17/2011	12:17:14 PM	Main Vac valve opened
10/17/2011	12:17:14 PM	Helium MFC set to  20.000000
10/17/2011	12:17:14 PM	H2 MFC set to  0.000000
10/17/2011	12:17:14 PM	BCl3 MFC set to  0.000000
10/17/2011	12:17:14 PM	PHl3 MFC set to  0.000000
10/17/2011	12:17:14 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:17:14 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:17:14 PM	Tube furnace set to 0
10/17/2011	12:17:44 PM	Helium valve closed
10/17/2011	12:17:44 PM	H2 valve closed
10/17/2011	12:17:44 PM	BCl3 valve closed
10/17/2011	12:17:44 PM	PH3 valve closed
10/17/2011	12:17:44 PM	SiCl4 pre valve closed
10/17/2011	12:17:44 PM	SiCl4 post valve closed
10/17/2011	12:17:44 PM	Bypass valve closed
10/17/2011	12:17:44 PM	Bubbler valve closed
10/17/2011	12:17:44 PM	Main Vac valve opened
10/17/2011	12:17:44 PM	Helium MFC set to  0.000000
10/17/2011	12:17:44 PM	H2 MFC set to  0.000000
10/17/2011	12:17:44 PM	BCl3 MFC set to  0.000000
10/17/2011	12:17:44 PM	PHl3 MFC set to  0.000000
10/17/2011	12:17:44 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:17:44 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:17:44 PM	Tube furnace set to 0
10/17/2011	12:18:14 PM	H2 valve closed
10/17/2011	12:18:14 PM	BCl3 valve closed
10/17/2011	12:18:14 PM	PH3 valve closed
10/17/2011	12:18:14 PM	SiCl4 pre valve closed
10/17/2011	12:18:14 PM	SiCl4 post valve closed
10/17/2011	12:18:14 PM	Bypass valve closed
10/17/2011	12:18:14 PM	Bubbler valve closed
10/17/2011	12:18:14 PM	Helium valve opened
10/17/2011	12:18:14 PM	Main Vac valve opened
10/17/2011	12:18:14 PM	Helium MFC set to  20.000000
10/17/2011	12:18:14 PM	H2 MFC set to  0.000000
10/17/2011	12:18:14 PM	BCl3 MFC set to  0.000000
10/17/2011	12:18:14 PM	PHl3 MFC set to  0.000000
10/17/2011	12:18:14 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:18:14 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:18:14 PM	Tube furnace set to 0
10/17/2011	12:18:44 PM	Helium valve closed
10/17/2011	12:18:44 PM	H2 valve closed
10/17/2011	12:18:44 PM	BCl3 valve closed
10/17/2011	12:18:44 PM	PH3 valve closed
10/17/2011	12:18:44 PM	SiCl4 pre valve closed
10/17/2011	12:18:44 PM	SiCl4 post valve closed
10/17/2011	12:18:44 PM	Bypass valve closed
10/17/2011	12:18:44 PM	Bubbler valve closed
10/17/2011	12:18:44 PM	Main Vac valve opened
10/17/2011	12:18:44 PM	Helium MFC set to  0.000000
10/17/2011	12:18:44 PM	H2 MFC set to  0.000000
10/17/2011	12:18:44 PM	BCl3 MFC set to  0.000000
10/17/2011	12:18:44 PM	PHl3 MFC set to  0.000000
10/17/2011	12:18:44 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:18:44 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:18:44 PM	Tube furnace set to 0
10/17/2011	12:19:14 PM	H2 valve closed
10/17/2011	12:19:14 PM	BCl3 valve closed
10/17/2011	12:19:14 PM	PH3 valve closed
10/17/2011	12:19:14 PM	SiCl4 pre valve closed
10/17/2011	12:19:14 PM	SiCl4 post valve closed
10/17/2011	12:19:14 PM	Bypass valve closed
10/17/2011	12:19:14 PM	Bubbler valve closed
10/17/2011	12:19:14 PM	Helium valve opened
10/17/2011	12:19:14 PM	Main Vac valve opened
10/17/2011	12:19:14 PM	Helium MFC set to  20.000000
10/17/2011	12:19:14 PM	H2 MFC set to  0.000000
10/17/2011	12:19:14 PM	BCl3 MFC set to  0.000000
10/17/2011	12:19:14 PM	PHl3 MFC set to  0.000000
10/17/2011	12:19:14 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:19:14 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:19:15 PM	Tube furnace set to 0
10/17/2011	12:19:45 PM	Helium valve closed
10/17/2011	12:19:45 PM	H2 valve closed
10/17/2011	12:19:45 PM	BCl3 valve closed
10/17/2011	12:19:45 PM	PH3 valve closed
10/17/2011	12:19:45 PM	SiCl4 pre valve closed
10/17/2011	12:19:45 PM	SiCl4 post valve closed
10/17/2011	12:19:45 PM	Bypass valve closed
10/17/2011	12:19:45 PM	Bubbler valve closed
10/17/2011	12:19:45 PM	Main Vac valve opened
10/17/2011	12:19:45 PM	Helium MFC set to  0.000000
10/17/2011	12:19:45 PM	H2 MFC set to  0.000000
10/17/2011	12:19:45 PM	BCl3 MFC set to  0.000000
10/17/2011	12:19:45 PM	PHl3 MFC set to  0.000000
10/17/2011	12:19:45 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:19:45 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:19:45 PM	Tube furnace set to 0
10/17/2011	12:20:15 PM	H2 valve closed
10/17/2011	12:20:15 PM	BCl3 valve closed
10/17/2011	12:20:15 PM	PH3 valve closed
10/17/2011	12:20:15 PM	SiCl4 pre valve closed
10/17/2011	12:20:15 PM	SiCl4 post valve closed
10/17/2011	12:20:15 PM	Bypass valve closed
10/17/2011	12:20:15 PM	Bubbler valve closed
10/17/2011	12:20:15 PM	Helium valve opened
10/17/2011	12:20:15 PM	Main Vac valve opened
10/17/2011	12:20:15 PM	Helium MFC set to  20.000000
10/17/2011	12:20:15 PM	H2 MFC set to  0.000000
10/17/2011	12:20:15 PM	BCl3 MFC set to  0.000000
10/17/2011	12:20:15 PM	PHl3 MFC set to  0.000000
10/17/2011	12:20:15 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:20:15 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:20:15 PM	Tube furnace set to 0
10/17/2011	12:20:45 PM	Helium valve closed
10/17/2011	12:20:45 PM	H2 valve closed
10/17/2011	12:20:45 PM	BCl3 valve closed
10/17/2011	12:20:45 PM	PH3 valve closed
10/17/2011	12:20:45 PM	SiCl4 pre valve closed
10/17/2011	12:20:45 PM	SiCl4 post valve closed
10/17/2011	12:20:45 PM	Bypass valve closed
10/17/2011	12:20:45 PM	Bubbler valve closed
10/17/2011	12:20:45 PM	Main Vac valve opened
10/17/2011	12:20:45 PM	Helium MFC set to  0.000000
10/17/2011	12:20:45 PM	H2 MFC set to  0.000000
10/17/2011	12:20:45 PM	BCl3 MFC set to  0.000000
10/17/2011	12:20:45 PM	PHl3 MFC set to  0.000000
10/17/2011	12:20:45 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:20:45 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:20:45 PM	Tube furnace set to 0
10/17/2011	12:21:15 PM	H2 valve closed
10/17/2011	12:21:15 PM	BCl3 valve closed
10/17/2011	12:21:15 PM	PH3 valve closed
10/17/2011	12:21:15 PM	SiCl4 pre valve closed
10/17/2011	12:21:15 PM	SiCl4 post valve closed
10/17/2011	12:21:15 PM	Bypass valve closed
10/17/2011	12:21:15 PM	Bubbler valve closed
10/17/2011	12:21:15 PM	Helium valve opened
10/17/2011	12:21:15 PM	Main Vac valve opened
10/17/2011	12:21:15 PM	Helium MFC set to  20.000000
10/17/2011	12:21:15 PM	H2 MFC set to  0.000000
10/17/2011	12:21:15 PM	BCl3 MFC set to  0.000000
10/17/2011	12:21:15 PM	PHl3 MFC set to  0.000000
10/17/2011	12:21:15 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:21:15 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:21:15 PM	Tube furnace set to 0
10/17/2011	12:21:45 PM	Helium valve closed
10/17/2011	12:21:45 PM	H2 valve closed
10/17/2011	12:21:45 PM	BCl3 valve closed
10/17/2011	12:21:45 PM	PH3 valve closed
10/17/2011	12:21:45 PM	SiCl4 pre valve closed
10/17/2011	12:21:45 PM	SiCl4 post valve closed
10/17/2011	12:21:45 PM	Bypass valve closed
10/17/2011	12:21:45 PM	Bubbler valve closed
10/17/2011	12:21:45 PM	Main Vac valve opened
10/17/2011	12:21:45 PM	Helium MFC set to  0.000000
10/17/2011	12:21:45 PM	H2 MFC set to  0.000000
10/17/2011	12:21:45 PM	BCl3 MFC set to  0.000000
10/17/2011	12:21:45 PM	PHl3 MFC set to  0.000000
10/17/2011	12:21:45 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:21:45 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:21:46 PM	Tube furnace set to 0
10/17/2011	12:22:16 PM	H2 valve closed
10/17/2011	12:22:16 PM	BCl3 valve closed
10/17/2011	12:22:16 PM	PH3 valve closed
10/17/2011	12:22:16 PM	SiCl4 pre valve closed
10/17/2011	12:22:16 PM	SiCl4 post valve closed
10/17/2011	12:22:16 PM	Bypass valve closed
10/17/2011	12:22:16 PM	Bubbler valve closed
10/17/2011	12:22:16 PM	Helium valve opened
10/17/2011	12:22:16 PM	Main Vac valve opened
10/17/2011	12:22:16 PM	Helium MFC set to  20.000000
10/17/2011	12:22:16 PM	H2 MFC set to  0.000000
10/17/2011	12:22:16 PM	BCl3 MFC set to  0.000000
10/17/2011	12:22:16 PM	PHl3 MFC set to  0.000000
10/17/2011	12:22:16 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:22:16 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:22:16 PM	Tube furnace set to 0
10/17/2011	12:22:46 PM	Helium valve closed
10/17/2011	12:22:46 PM	H2 valve closed
10/17/2011	12:22:46 PM	BCl3 valve closed
10/17/2011	12:22:46 PM	PH3 valve closed
10/17/2011	12:22:46 PM	SiCl4 pre valve closed
10/17/2011	12:22:46 PM	SiCl4 post valve closed
10/17/2011	12:22:46 PM	Bypass valve closed
10/17/2011	12:22:46 PM	Bubbler valve closed
10/17/2011	12:22:46 PM	Main Vac valve opened
10/17/2011	12:22:46 PM	Helium MFC set to  0.000000
10/17/2011	12:22:46 PM	H2 MFC set to  0.000000
10/17/2011	12:22:46 PM	BCl3 MFC set to  0.000000
10/17/2011	12:22:46 PM	PHl3 MFC set to  0.000000
10/17/2011	12:22:46 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:22:46 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:22:46 PM	Tube furnace set to 0
10/17/2011	12:23:08 PM	H2 valve closed
10/17/2011	12:23:08 PM	BCl3 valve closed
10/17/2011	12:23:08 PM	PH3 valve closed
10/17/2011	12:23:08 PM	SiCl4 pre valve closed
10/17/2011	12:23:08 PM	SiCl4 post valve closed
10/17/2011	12:23:08 PM	Bypass valve closed
10/17/2011	12:23:08 PM	Bubbler valve closed
10/17/2011	12:23:08 PM	Helium valve opened
10/17/2011	12:23:08 PM	Main Vac valve opened
10/17/2011	12:23:08 PM	Helium MFC set to  20.000000
10/17/2011	12:23:08 PM	H2 MFC set to  0.000000
10/17/2011	12:23:08 PM	BCl3 MFC set to  0.000000
10/17/2011	12:23:08 PM	PHl3 MFC set to  0.000000
10/17/2011	12:23:08 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:23:08 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:23:08 PM	Tube furnace set to 0
10/17/2011	12:23:09 PM	Helium valve closed
10/17/2011	12:23:09 PM	H2 valve closed
10/17/2011	12:23:09 PM	BCl3 valve closed
10/17/2011	12:23:09 PM	PH3 valve closed
10/17/2011	12:23:09 PM	SiCl4 pre valve closed
10/17/2011	12:23:09 PM	SiCl4 post valve closed
10/17/2011	12:23:09 PM	Bypass valve closed
10/17/2011	12:23:09 PM	Bubbler valve closed
10/17/2011	12:23:09 PM	Main Vac valve opened
10/17/2011	12:23:09 PM	Helium MFC set to  0.000000
10/17/2011	12:23:09 PM	H2 MFC set to  0.000000
10/17/2011	12:23:09 PM	BCl3 MFC set to  0.000000
10/17/2011	12:23:09 PM	PHl3 MFC set to  0.000000
10/17/2011	12:23:09 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:23:09 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:23:10 PM	Tube furnace set to 0
10/17/2011	12:23:10 PM	H2 valve closed
10/17/2011	12:23:10 PM	BCl3 valve closed
10/17/2011	12:23:10 PM	PH3 valve closed
10/17/2011	12:23:10 PM	SiCl4 pre valve closed
10/17/2011	12:23:10 PM	SiCl4 post valve closed
10/17/2011	12:23:10 PM	Bypass valve closed
10/17/2011	12:23:10 PM	Bubbler valve closed
10/17/2011	12:23:10 PM	Helium valve opened
10/17/2011	12:23:10 PM	Main Vac valve opened
10/17/2011	12:23:10 PM	Helium MFC set to  20.000000
10/17/2011	12:23:10 PM	H2 MFC set to  0.000000
10/17/2011	12:23:10 PM	BCl3 MFC set to  0.000000
10/17/2011	12:23:10 PM	PHl3 MFC set to  0.000000
10/17/2011	12:23:10 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:23:10 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:23:11 PM	Tube furnace set to 0
10/17/2011	12:23:11 PM	Helium valve closed
10/17/2011	12:23:11 PM	H2 valve closed
10/17/2011	12:23:11 PM	BCl3 valve closed
10/17/2011	12:23:11 PM	PH3 valve closed
10/17/2011	12:23:11 PM	SiCl4 pre valve closed
10/17/2011	12:23:11 PM	SiCl4 post valve closed
10/17/2011	12:23:11 PM	Bypass valve closed
10/17/2011	12:23:11 PM	Bubbler valve closed
10/17/2011	12:23:11 PM	Main Vac valve opened
10/17/2011	12:23:11 PM	Helium MFC set to  0.000000
10/17/2011	12:23:11 PM	H2 MFC set to  0.000000
10/17/2011	12:23:11 PM	BCl3 MFC set to  0.000000
10/17/2011	12:23:11 PM	PHl3 MFC set to  0.000000
10/17/2011	12:23:11 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:23:11 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:23:11 PM	Tube furnace set to 0
10/17/2011	12:23:12 PM	Run finished at 12:23 PM
10/17/2011	12:23:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/17/2011	12:23:26 PM	Main Vac valve closed
10/17/2011	12:24:13 PM	Main Vac valve opened
10/17/2011	12:24:51 PM	Recipe started at 12:24 PM
10/17/2011	12:24:51 PM	Helium valve closed
10/17/2011	12:24:51 PM	H2 valve closed
10/17/2011	12:24:51 PM	BCl3 valve closed
10/17/2011	12:24:51 PM	PH3 valve closed
10/17/2011	12:24:51 PM	SiCl4 pre valve closed
10/17/2011	12:24:51 PM	SiCl4 post valve closed
10/17/2011	12:24:51 PM	Main Vac valve closed
10/17/2011	12:24:51 PM	Bypass valve closed
10/17/2011	12:24:51 PM	Bubbler valve closed
10/17/2011	12:24:51 PM	Helium MFC set to  0.000000
10/17/2011	12:24:51 PM	H2 MFC set to  0.000000
10/17/2011	12:24:51 PM	BCl3 MFC set to  0.000000
10/17/2011	12:24:51 PM	PHl3 MFC set to  0.000000
10/17/2011	12:24:51 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:24:51 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:24:51 PM	Tube furnace set to 0
10/17/2011	12:24:54 PM	Helium valve closed
10/17/2011	12:24:54 PM	BCl3 valve closed
10/17/2011	12:24:54 PM	PH3 valve closed
10/17/2011	12:24:54 PM	SiCl4 pre valve closed
10/17/2011	12:24:54 PM	SiCl4 post valve closed
10/17/2011	12:24:54 PM	Main Vac valve closed
10/17/2011	12:24:54 PM	Bypass valve closed
10/17/2011	12:24:54 PM	Bubbler valve closed
10/17/2011	12:24:54 PM	H2 valve opened
10/17/2011	12:24:54 PM	Helium MFC set to  0.000000
10/17/2011	12:24:54 PM	H2 MFC set to  500.000000
10/17/2011	12:24:54 PM	BCl3 MFC set to  0.000000
10/17/2011	12:24:54 PM	PHl3 MFC set to  0.000000
10/17/2011	12:24:54 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:24:54 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:24:54 PM	Tube furnace set to 0
10/17/2011	12:25:59 PM	Helium valve closed
10/17/2011	12:25:59 PM	BCl3 valve closed
10/17/2011	12:25:59 PM	PH3 valve closed
10/17/2011	12:25:59 PM	SiCl4 pre valve closed
10/17/2011	12:25:59 PM	SiCl4 post valve closed
10/17/2011	12:25:59 PM	Main Vac valve closed
10/17/2011	12:25:59 PM	Bypass valve closed
10/17/2011	12:25:59 PM	H2 valve opened
10/17/2011	12:25:59 PM	Bubbler valve opened
10/17/2011	12:25:59 PM	Helium MFC set to  0.000000
10/17/2011	12:25:59 PM	H2 MFC set to  500.000000
10/17/2011	12:25:59 PM	BCl3 MFC set to  0.000000
10/17/2011	12:25:59 PM	PHl3 MFC set to  0.000000
10/17/2011	12:25:59 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:25:59 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:25:59 PM	Tube furnace set to 0
10/17/2011	12:26:00 PM	Helium valve closed
10/17/2011	12:26:00 PM	BCl3 valve closed
10/17/2011	12:26:00 PM	PH3 valve closed
10/17/2011	12:26:00 PM	SiCl4 pre valve closed
10/17/2011	12:26:00 PM	SiCl4 post valve closed
10/17/2011	12:26:00 PM	Main Vac valve closed
10/17/2011	12:26:00 PM	Bypass valve closed
10/17/2011	12:26:00 PM	H2 valve opened
10/17/2011	12:26:00 PM	Bubbler valve opened
10/17/2011	12:26:00 PM	Helium MFC set to  0.000000
10/17/2011	12:26:00 PM	H2 MFC set to  500.000000
10/17/2011	12:26:00 PM	BCl3 MFC set to  0.000000
10/17/2011	12:26:00 PM	PHl3 MFC set to  0.000000
10/17/2011	12:26:00 PM	SiCl4 MFC set to  0.000000
10/17/2011	12:26:00 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:26:00 PM	Tube furnace set to 1000
10/17/2011	12:46:00 PM	Helium valve closed
10/17/2011	12:46:00 PM	PH3 valve closed
10/17/2011	12:46:01 PM	Main Vac valve closed
10/17/2011	12:46:01 PM	Bypass valve closed
10/17/2011	12:46:01 PM	H2 valve opened
10/17/2011	12:46:01 PM	BCl3 valve opened
10/17/2011	12:46:01 PM	SiCl4 pre valve opened
10/17/2011	12:46:01 PM	SiCl4 post valve opened
10/17/2011	12:46:01 PM	Bubbler valve opened
10/17/2011	12:46:01 PM	Helium MFC set to  0.000000
10/17/2011	12:46:01 PM	H2 MFC set to  500.000000
10/17/2011	12:46:01 PM	BCl3 MFC set to  2.250000
10/17/2011	12:46:01 PM	PHl3 MFC set to  0.000000
10/17/2011	12:46:01 PM	SiCl4 MFC set to  45.000000
10/17/2011	12:46:01 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	12:46:01 PM	Tube furnace set to 1000
10/17/2011	1:01:00 PM	Helium valve closed
10/17/2011	1:01:00 PM	BCl3 valve closed
10/17/2011	1:01:00 PM	PH3 valve closed
10/17/2011	1:01:00 PM	SiCl4 pre valve closed
10/17/2011	1:01:00 PM	SiCl4 post valve closed
10/17/2011	1:01:00 PM	Main Vac valve closed
10/17/2011	1:01:00 PM	Bypass valve closed
10/17/2011	1:01:00 PM	H2 valve opened
10/17/2011	1:01:00 PM	Bubbler valve opened
10/17/2011	1:01:00 PM	Helium MFC set to  0.000000
10/17/2011	1:01:00 PM	H2 MFC set to  500.000000
10/17/2011	1:01:00 PM	BCl3 MFC set to  0.000000
10/17/2011	1:01:00 PM	PHl3 MFC set to  0.000000
10/17/2011	1:01:00 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:01:00 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:01:01 PM	Tube furnace set to 750
10/17/2011	1:06:01 PM	H2 valve closed
10/17/2011	1:06:01 PM	BCl3 valve closed
10/17/2011	1:06:01 PM	PH3 valve closed
10/17/2011	1:06:01 PM	SiCl4 pre valve closed
10/17/2011	1:06:01 PM	SiCl4 post valve closed
10/17/2011	1:06:01 PM	Main Vac valve closed
10/17/2011	1:06:01 PM	Bypass valve closed
10/17/2011	1:06:01 PM	Helium valve opened
10/17/2011	1:06:01 PM	Bubbler valve opened
10/17/2011	1:06:01 PM	Helium MFC set to  500.000000
10/17/2011	1:06:01 PM	H2 MFC set to  0.000000
10/17/2011	1:06:01 PM	BCl3 MFC set to  0.000000
10/17/2011	1:06:01 PM	PHl3 MFC set to  0.000000
10/17/2011	1:06:01 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:06:01 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:06:01 PM	Tube furnace set to 0
10/17/2011	1:19:05 PM	Run aborted at 1:19 PM
10/17/2011	1:19:05 PM	Helium valve closed
10/17/2011	1:19:05 PM	H2 valve closed
10/17/2011	1:19:05 PM	BCl3 valve closed
10/17/2011	1:19:05 PM	PH3 valve closed
10/17/2011	1:19:05 PM	SiCl4 pre valve closed
10/17/2011	1:19:05 PM	SiCl4 post valve closed
10/17/2011	1:19:05 PM	Bypass valve closed
10/17/2011	1:19:05 PM	Main Vac valve closed
10/17/2011	1:19:05 PM	Bubbler valve closed
10/17/2011	1:19:05 PM	Helium MFC set to  0.000000
10/17/2011	1:19:05 PM	H2 MFC set to  0.000000
10/17/2011	1:19:05 PM	BCl3 MFC set to  0.000000
10/17/2011	1:19:05 PM	PHl3 MFC set to  0.000000
10/17/2011	1:19:05 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:19:05 PM	Tube furnace set to 0
10/17/2011	1:24:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2011	1:24:50 PM	Recipe started at 1:24 PM
10/17/2011	1:24:50 PM	Helium valve closed
10/17/2011	1:24:50 PM	H2 valve closed
10/17/2011	1:24:50 PM	BCl3 valve closed
10/17/2011	1:24:50 PM	PH3 valve closed
10/17/2011	1:24:50 PM	SiCl4 pre valve closed
10/17/2011	1:24:50 PM	SiCl4 post valve closed
10/17/2011	1:24:50 PM	Main Vac valve closed
10/17/2011	1:24:50 PM	Bubbler valve closed
10/17/2011	1:24:50 PM	Bypass valve opened
10/17/2011	1:24:50 PM	Helium MFC set to  0.000000
10/17/2011	1:24:50 PM	H2 MFC set to  0.000000
10/17/2011	1:24:50 PM	BCl3 MFC set to  0.000000
10/17/2011	1:24:50 PM	PHl3 MFC set to  0.000000
10/17/2011	1:24:50 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:24:50 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:24:51 PM	Tube furnace set to 0
10/17/2011	1:25:56 PM	Helium valve closed
10/17/2011	1:25:56 PM	H2 valve closed
10/17/2011	1:25:56 PM	BCl3 valve closed
10/17/2011	1:25:56 PM	PH3 valve closed
10/17/2011	1:25:56 PM	SiCl4 pre valve closed
10/17/2011	1:25:56 PM	SiCl4 post valve closed
10/17/2011	1:25:56 PM	Main Vac valve closed
10/17/2011	1:25:56 PM	Bubbler valve closed
10/17/2011	1:25:56 PM	Bypass valve opened
10/17/2011	1:25:56 PM	Helium MFC set to  0.000000
10/17/2011	1:25:56 PM	H2 MFC set to  0.000000
10/17/2011	1:25:56 PM	BCl3 MFC set to  0.000000
10/17/2011	1:25:56 PM	PHl3 MFC set to  0.000000
10/17/2011	1:25:56 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:25:56 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:25:56 PM	Tube furnace set to 0
10/17/2011	1:26:07 PM	Helium valve closed
10/17/2011	1:26:07 PM	H2 valve closed
10/17/2011	1:26:07 PM	BCl3 valve closed
10/17/2011	1:26:07 PM	PH3 valve closed
10/17/2011	1:26:07 PM	SiCl4 pre valve closed
10/17/2011	1:26:07 PM	SiCl4 post valve closed
10/17/2011	1:26:07 PM	Bypass valve closed
10/17/2011	1:26:07 PM	Bubbler valve closed
10/17/2011	1:26:07 PM	Main Vac valve opened
10/17/2011	1:26:07 PM	Helium MFC set to  0.000000
10/17/2011	1:26:07 PM	H2 MFC set to  0.000000
10/17/2011	1:26:07 PM	BCl3 MFC set to  0.000000
10/17/2011	1:26:07 PM	PHl3 MFC set to  0.000000
10/17/2011	1:26:07 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:26:07 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:26:07 PM	Tube furnace set to 0
10/17/2011	1:26:08 PM	Run finished at 1:26 PM
10/17/2011	1:26:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2011	1:26:16 PM	H2 MFC set to  500.000000
10/17/2011	1:26:18 PM	Main Vac valve closed
10/17/2011	1:26:19 PM	H2 valve opened
10/17/2011	1:27:23 PM	H2 valve closed
10/17/2011	1:27:24 PM	Bypass valve opened
10/17/2011	1:28:01 PM	Main Vac valve opened
10/17/2011	1:28:01 PM	Bypass valve closed
10/17/2011	1:28:35 PM	H2 MFC set to  0.000000
10/17/2011	1:28:37 PM	Helium MFC set to  500.000000
10/17/2011	1:28:39 PM	Main Vac valve closed
10/17/2011	1:28:40 PM	Helium valve opened
10/17/2011	1:29:44 PM	Helium valve closed
10/17/2011	1:29:45 PM	Bypass valve opened
10/17/2011	1:29:49 PM	Helium MFC set to  0.000000
10/17/2011	1:30:40 PM	Bypass valve closed
10/17/2011	1:30:40 PM	Main Vac valve opened
10/17/2011	1:32:00 PM	Helium MFC set to  100.000000
10/17/2011	1:32:01 PM	Helium valve opened
10/17/2011	1:32:09 PM	Helium valve closed
10/17/2011	1:32:48 PM	Helium valve opened
10/17/2011	1:33:08 PM	Helium valve closed
10/17/2011	1:33:26 PM	Main Vac valve closed
10/17/2011	1:33:37 PM	Main Vac valve opened
10/17/2011	1:33:40 PM	Helium valve opened
10/17/2011	1:33:50 PM	Helium valve closed
10/17/2011	1:34:49 PM	Helium valve opened
10/17/2011	1:36:16 PM	Helium valve closed
10/17/2011	1:36:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/17/2011	1:37:00 PM	Recipe started at 1:36 PM
10/17/2011	1:37:00 PM	Helium valve closed
10/17/2011	1:37:00 PM	H2 valve closed
10/17/2011	1:37:00 PM	BCl3 valve closed
10/17/2011	1:37:00 PM	PH3 valve closed
10/17/2011	1:37:00 PM	SiCl4 pre valve closed
10/17/2011	1:37:00 PM	SiCl4 post valve closed
10/17/2011	1:37:00 PM	Main Vac valve closed
10/17/2011	1:37:00 PM	Bubbler valve closed
10/17/2011	1:37:00 PM	Bypass valve opened
10/17/2011	1:37:00 PM	Helium MFC set to  0.000000
10/17/2011	1:37:00 PM	H2 MFC set to  0.000000
10/17/2011	1:37:00 PM	BCl3 MFC set to  0.000000
10/17/2011	1:37:00 PM	PHl3 MFC set to  0.000000
10/17/2011	1:37:00 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:37:00 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:37:00 PM	Tube furnace set to 0
10/17/2011	1:37:00 PM	Helium valve closed
10/17/2011	1:37:00 PM	H2 valve closed
10/17/2011	1:37:00 PM	BCl3 valve closed
10/17/2011	1:37:00 PM	PH3 valve closed
10/17/2011	1:37:00 PM	SiCl4 pre valve closed
10/17/2011	1:37:00 PM	SiCl4 post valve closed
10/17/2011	1:37:00 PM	Main Vac valve closed
10/17/2011	1:37:00 PM	Bubbler valve closed
10/17/2011	1:37:00 PM	Bypass valve opened
10/17/2011	1:37:00 PM	Helium MFC set to  0.000000
10/17/2011	1:37:00 PM	H2 MFC set to  0.000000
10/17/2011	1:37:00 PM	BCl3 MFC set to  0.000000
10/17/2011	1:37:00 PM	PHl3 MFC set to  0.000000
10/17/2011	1:37:00 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:37:00 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:37:00 PM	Tube furnace set to 0
10/17/2011	1:37:01 PM	Helium valve closed
10/17/2011	1:37:01 PM	H2 valve closed
10/17/2011	1:37:01 PM	BCl3 valve closed
10/17/2011	1:37:01 PM	PH3 valve closed
10/17/2011	1:37:01 PM	SiCl4 pre valve closed
10/17/2011	1:37:01 PM	SiCl4 post valve closed
10/17/2011	1:37:01 PM	Bypass valve closed
10/17/2011	1:37:01 PM	Bubbler valve closed
10/17/2011	1:37:01 PM	Main Vac valve opened
10/17/2011	1:37:01 PM	Helium MFC set to  0.000000
10/17/2011	1:37:01 PM	H2 MFC set to  0.000000
10/17/2011	1:37:01 PM	BCl3 MFC set to  0.000000
10/17/2011	1:37:01 PM	PHl3 MFC set to  0.000000
10/17/2011	1:37:01 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:37:01 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:37:01 PM	Tube furnace set to 0
10/17/2011	1:37:31 PM	H2 valve closed
10/17/2011	1:37:31 PM	BCl3 valve closed
10/17/2011	1:37:31 PM	PH3 valve closed
10/17/2011	1:37:31 PM	SiCl4 pre valve closed
10/17/2011	1:37:31 PM	SiCl4 post valve closed
10/17/2011	1:37:31 PM	Bypass valve closed
10/17/2011	1:37:31 PM	Bubbler valve closed
10/17/2011	1:37:31 PM	Helium valve opened
10/17/2011	1:37:31 PM	Main Vac valve opened
10/17/2011	1:37:31 PM	Helium MFC set to  20.000000
10/17/2011	1:37:31 PM	H2 MFC set to  0.000000
10/17/2011	1:37:31 PM	BCl3 MFC set to  0.000000
10/17/2011	1:37:31 PM	PHl3 MFC set to  0.000000
10/17/2011	1:37:31 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:37:31 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:37:32 PM	Tube furnace set to 0
10/17/2011	1:38:02 PM	Helium valve closed
10/17/2011	1:38:02 PM	H2 valve closed
10/17/2011	1:38:02 PM	BCl3 valve closed
10/17/2011	1:38:02 PM	PH3 valve closed
10/17/2011	1:38:02 PM	SiCl4 pre valve closed
10/17/2011	1:38:02 PM	SiCl4 post valve closed
10/17/2011	1:38:02 PM	Bypass valve closed
10/17/2011	1:38:02 PM	Bubbler valve closed
10/17/2011	1:38:02 PM	Main Vac valve opened
10/17/2011	1:38:02 PM	Helium MFC set to  0.000000
10/17/2011	1:38:02 PM	H2 MFC set to  0.000000
10/17/2011	1:38:02 PM	BCl3 MFC set to  0.000000
10/17/2011	1:38:02 PM	PHl3 MFC set to  0.000000
10/17/2011	1:38:02 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:38:02 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:38:02 PM	Tube furnace set to 0
10/17/2011	1:38:32 PM	H2 valve closed
10/17/2011	1:38:32 PM	BCl3 valve closed
10/17/2011	1:38:32 PM	PH3 valve closed
10/17/2011	1:38:32 PM	SiCl4 pre valve closed
10/17/2011	1:38:32 PM	SiCl4 post valve closed
10/17/2011	1:38:32 PM	Bypass valve closed
10/17/2011	1:38:32 PM	Bubbler valve closed
10/17/2011	1:38:32 PM	Helium valve opened
10/17/2011	1:38:32 PM	Main Vac valve opened
10/17/2011	1:38:32 PM	Helium MFC set to  20.000000
10/17/2011	1:38:32 PM	H2 MFC set to  0.000000
10/17/2011	1:38:32 PM	BCl3 MFC set to  0.000000
10/17/2011	1:38:32 PM	PHl3 MFC set to  0.000000
10/17/2011	1:38:32 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:38:32 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:38:32 PM	Tube furnace set to 0
10/17/2011	1:39:02 PM	Helium valve closed
10/17/2011	1:39:02 PM	H2 valve closed
10/17/2011	1:39:02 PM	BCl3 valve closed
10/17/2011	1:39:02 PM	PH3 valve closed
10/17/2011	1:39:02 PM	SiCl4 pre valve closed
10/17/2011	1:39:02 PM	SiCl4 post valve closed
10/17/2011	1:39:02 PM	Bypass valve closed
10/17/2011	1:39:02 PM	Bubbler valve closed
10/17/2011	1:39:02 PM	Main Vac valve opened
10/17/2011	1:39:02 PM	Helium MFC set to  0.000000
10/17/2011	1:39:02 PM	H2 MFC set to  0.000000
10/17/2011	1:39:02 PM	BCl3 MFC set to  0.000000
10/17/2011	1:39:02 PM	PHl3 MFC set to  0.000000
10/17/2011	1:39:02 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:39:02 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:39:02 PM	Tube furnace set to 0
10/17/2011	1:39:32 PM	H2 valve closed
10/17/2011	1:39:32 PM	BCl3 valve closed
10/17/2011	1:39:32 PM	PH3 valve closed
10/17/2011	1:39:32 PM	SiCl4 pre valve closed
10/17/2011	1:39:32 PM	SiCl4 post valve closed
10/17/2011	1:39:32 PM	Bypass valve closed
10/17/2011	1:39:32 PM	Bubbler valve closed
10/17/2011	1:39:32 PM	Helium valve opened
10/17/2011	1:39:32 PM	Main Vac valve opened
10/17/2011	1:39:32 PM	Helium MFC set to  20.000000
10/17/2011	1:39:32 PM	H2 MFC set to  0.000000
10/17/2011	1:39:32 PM	BCl3 MFC set to  0.000000
10/17/2011	1:39:32 PM	PHl3 MFC set to  0.000000
10/17/2011	1:39:32 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:39:32 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:39:32 PM	Tube furnace set to 0
10/17/2011	1:40:03 PM	Helium valve closed
10/17/2011	1:40:03 PM	H2 valve closed
10/17/2011	1:40:03 PM	BCl3 valve closed
10/17/2011	1:40:03 PM	PH3 valve closed
10/17/2011	1:40:03 PM	SiCl4 pre valve closed
10/17/2011	1:40:03 PM	SiCl4 post valve closed
10/17/2011	1:40:03 PM	Bypass valve closed
10/17/2011	1:40:03 PM	Bubbler valve closed
10/17/2011	1:40:03 PM	Main Vac valve opened
10/17/2011	1:40:03 PM	Helium MFC set to  0.000000
10/17/2011	1:40:03 PM	H2 MFC set to  0.000000
10/17/2011	1:40:03 PM	BCl3 MFC set to  0.000000
10/17/2011	1:40:03 PM	PHl3 MFC set to  0.000000
10/17/2011	1:40:03 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:40:03 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:40:03 PM	Tube furnace set to 0
10/17/2011	1:40:33 PM	H2 valve closed
10/17/2011	1:40:33 PM	BCl3 valve closed
10/17/2011	1:40:33 PM	PH3 valve closed
10/17/2011	1:40:33 PM	SiCl4 pre valve closed
10/17/2011	1:40:33 PM	SiCl4 post valve closed
10/17/2011	1:40:33 PM	Bypass valve closed
10/17/2011	1:40:33 PM	Bubbler valve closed
10/17/2011	1:40:33 PM	Helium valve opened
10/17/2011	1:40:33 PM	Main Vac valve opened
10/17/2011	1:40:33 PM	Helium MFC set to  20.000000
10/17/2011	1:40:33 PM	H2 MFC set to  0.000000
10/17/2011	1:40:33 PM	BCl3 MFC set to  0.000000
10/17/2011	1:40:33 PM	PHl3 MFC set to  0.000000
10/17/2011	1:40:33 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:40:33 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:40:33 PM	Tube furnace set to 0
10/17/2011	1:41:03 PM	Helium valve closed
10/17/2011	1:41:03 PM	H2 valve closed
10/17/2011	1:41:03 PM	BCl3 valve closed
10/17/2011	1:41:03 PM	PH3 valve closed
10/17/2011	1:41:03 PM	SiCl4 pre valve closed
10/17/2011	1:41:03 PM	SiCl4 post valve closed
10/17/2011	1:41:03 PM	Bypass valve closed
10/17/2011	1:41:03 PM	Bubbler valve closed
10/17/2011	1:41:03 PM	Main Vac valve opened
10/17/2011	1:41:03 PM	Helium MFC set to  0.000000
10/17/2011	1:41:03 PM	H2 MFC set to  0.000000
10/17/2011	1:41:03 PM	BCl3 MFC set to  0.000000
10/17/2011	1:41:03 PM	PHl3 MFC set to  0.000000
10/17/2011	1:41:03 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:41:03 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:41:03 PM	Tube furnace set to 0
10/17/2011	1:41:33 PM	H2 valve closed
10/17/2011	1:41:33 PM	BCl3 valve closed
10/17/2011	1:41:33 PM	PH3 valve closed
10/17/2011	1:41:33 PM	SiCl4 pre valve closed
10/17/2011	1:41:33 PM	SiCl4 post valve closed
10/17/2011	1:41:33 PM	Bypass valve closed
10/17/2011	1:41:33 PM	Bubbler valve closed
10/17/2011	1:41:33 PM	Helium valve opened
10/17/2011	1:41:33 PM	Main Vac valve opened
10/17/2011	1:41:33 PM	Helium MFC set to  20.000000
10/17/2011	1:41:33 PM	H2 MFC set to  0.000000
10/17/2011	1:41:33 PM	BCl3 MFC set to  0.000000
10/17/2011	1:41:33 PM	PHl3 MFC set to  0.000000
10/17/2011	1:41:33 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:41:33 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:41:33 PM	Tube furnace set to 0
10/17/2011	1:42:03 PM	Helium valve closed
10/17/2011	1:42:03 PM	H2 valve closed
10/17/2011	1:42:03 PM	BCl3 valve closed
10/17/2011	1:42:03 PM	PH3 valve closed
10/17/2011	1:42:03 PM	SiCl4 pre valve closed
10/17/2011	1:42:03 PM	SiCl4 post valve closed
10/17/2011	1:42:03 PM	Bypass valve closed
10/17/2011	1:42:03 PM	Bubbler valve closed
10/17/2011	1:42:03 PM	Main Vac valve opened
10/17/2011	1:42:03 PM	Helium MFC set to  0.000000
10/17/2011	1:42:03 PM	H2 MFC set to  0.000000
10/17/2011	1:42:03 PM	BCl3 MFC set to  0.000000
10/17/2011	1:42:03 PM	PHl3 MFC set to  0.000000
10/17/2011	1:42:03 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:42:03 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:42:04 PM	Tube furnace set to 0
10/17/2011	1:42:34 PM	H2 valve closed
10/17/2011	1:42:34 PM	BCl3 valve closed
10/17/2011	1:42:34 PM	PH3 valve closed
10/17/2011	1:42:34 PM	SiCl4 pre valve closed
10/17/2011	1:42:34 PM	SiCl4 post valve closed
10/17/2011	1:42:34 PM	Bypass valve closed
10/17/2011	1:42:34 PM	Bubbler valve closed
10/17/2011	1:42:34 PM	Helium valve opened
10/17/2011	1:42:34 PM	Main Vac valve opened
10/17/2011	1:42:34 PM	Helium MFC set to  20.000000
10/17/2011	1:42:34 PM	H2 MFC set to  0.000000
10/17/2011	1:42:34 PM	BCl3 MFC set to  0.000000
10/17/2011	1:42:34 PM	PHl3 MFC set to  0.000000
10/17/2011	1:42:34 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:42:34 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:42:34 PM	Tube furnace set to 0
10/17/2011	1:43:04 PM	Helium valve closed
10/17/2011	1:43:04 PM	H2 valve closed
10/17/2011	1:43:04 PM	BCl3 valve closed
10/17/2011	1:43:04 PM	PH3 valve closed
10/17/2011	1:43:04 PM	SiCl4 pre valve closed
10/17/2011	1:43:04 PM	SiCl4 post valve closed
10/17/2011	1:43:04 PM	Bypass valve closed
10/17/2011	1:43:04 PM	Bubbler valve closed
10/17/2011	1:43:04 PM	Main Vac valve opened
10/17/2011	1:43:04 PM	Helium MFC set to  0.000000
10/17/2011	1:43:04 PM	H2 MFC set to  0.000000
10/17/2011	1:43:04 PM	BCl3 MFC set to  0.000000
10/17/2011	1:43:04 PM	PHl3 MFC set to  0.000000
10/17/2011	1:43:04 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:43:04 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:43:04 PM	Tube furnace set to 0
10/17/2011	1:43:34 PM	H2 valve closed
10/17/2011	1:43:34 PM	BCl3 valve closed
10/17/2011	1:43:34 PM	PH3 valve closed
10/17/2011	1:43:34 PM	SiCl4 pre valve closed
10/17/2011	1:43:34 PM	SiCl4 post valve closed
10/17/2011	1:43:34 PM	Bypass valve closed
10/17/2011	1:43:34 PM	Bubbler valve closed
10/17/2011	1:43:34 PM	Helium valve opened
10/17/2011	1:43:34 PM	Main Vac valve opened
10/17/2011	1:43:34 PM	Helium MFC set to  20.000000
10/17/2011	1:43:34 PM	H2 MFC set to  0.000000
10/17/2011	1:43:34 PM	BCl3 MFC set to  0.000000
10/17/2011	1:43:34 PM	PHl3 MFC set to  0.000000
10/17/2011	1:43:34 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:43:34 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:43:34 PM	Tube furnace set to 0
10/17/2011	1:44:04 PM	Helium valve closed
10/17/2011	1:44:04 PM	H2 valve closed
10/17/2011	1:44:04 PM	BCl3 valve closed
10/17/2011	1:44:04 PM	PH3 valve closed
10/17/2011	1:44:04 PM	SiCl4 pre valve closed
10/17/2011	1:44:04 PM	SiCl4 post valve closed
10/17/2011	1:44:04 PM	Bypass valve closed
10/17/2011	1:44:04 PM	Bubbler valve closed
10/17/2011	1:44:04 PM	Main Vac valve opened
10/17/2011	1:44:04 PM	Helium MFC set to  0.000000
10/17/2011	1:44:04 PM	H2 MFC set to  0.000000
10/17/2011	1:44:04 PM	BCl3 MFC set to  0.000000
10/17/2011	1:44:04 PM	PHl3 MFC set to  0.000000
10/17/2011	1:44:04 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:44:04 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:44:04 PM	Tube furnace set to 0
10/17/2011	1:44:34 PM	H2 valve closed
10/17/2011	1:44:34 PM	BCl3 valve closed
10/17/2011	1:44:34 PM	PH3 valve closed
10/17/2011	1:44:34 PM	SiCl4 pre valve closed
10/17/2011	1:44:34 PM	SiCl4 post valve closed
10/17/2011	1:44:34 PM	Bypass valve closed
10/17/2011	1:44:34 PM	Bubbler valve closed
10/17/2011	1:44:34 PM	Helium valve opened
10/17/2011	1:44:34 PM	Main Vac valve opened
10/17/2011	1:44:34 PM	Helium MFC set to  20.000000
10/17/2011	1:44:34 PM	H2 MFC set to  0.000000
10/17/2011	1:44:34 PM	BCl3 MFC set to  0.000000
10/17/2011	1:44:34 PM	PHl3 MFC set to  0.000000
10/17/2011	1:44:34 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:44:34 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:44:35 PM	Tube furnace set to 0
10/17/2011	1:45:05 PM	Helium valve closed
10/17/2011	1:45:05 PM	H2 valve closed
10/17/2011	1:45:05 PM	BCl3 valve closed
10/17/2011	1:45:05 PM	PH3 valve closed
10/17/2011	1:45:05 PM	SiCl4 pre valve closed
10/17/2011	1:45:05 PM	SiCl4 post valve closed
10/17/2011	1:45:05 PM	Bypass valve closed
10/17/2011	1:45:05 PM	Bubbler valve closed
10/17/2011	1:45:05 PM	Main Vac valve opened
10/17/2011	1:45:05 PM	Helium MFC set to  0.000000
10/17/2011	1:45:05 PM	H2 MFC set to  0.000000
10/17/2011	1:45:05 PM	BCl3 MFC set to  0.000000
10/17/2011	1:45:05 PM	PHl3 MFC set to  0.000000
10/17/2011	1:45:05 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:45:05 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:45:05 PM	Tube furnace set to 0
10/17/2011	1:45:35 PM	H2 valve closed
10/17/2011	1:45:35 PM	BCl3 valve closed
10/17/2011	1:45:35 PM	PH3 valve closed
10/17/2011	1:45:35 PM	SiCl4 pre valve closed
10/17/2011	1:45:35 PM	SiCl4 post valve closed
10/17/2011	1:45:35 PM	Bypass valve closed
10/17/2011	1:45:35 PM	Bubbler valve closed
10/17/2011	1:45:35 PM	Helium valve opened
10/17/2011	1:45:35 PM	Main Vac valve opened
10/17/2011	1:45:35 PM	Helium MFC set to  20.000000
10/17/2011	1:45:35 PM	H2 MFC set to  0.000000
10/17/2011	1:45:35 PM	BCl3 MFC set to  0.000000
10/17/2011	1:45:35 PM	PHl3 MFC set to  0.000000
10/17/2011	1:45:35 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:45:35 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:45:35 PM	Tube furnace set to 0
10/17/2011	1:46:05 PM	Helium valve closed
10/17/2011	1:46:05 PM	H2 valve closed
10/17/2011	1:46:05 PM	BCl3 valve closed
10/17/2011	1:46:05 PM	PH3 valve closed
10/17/2011	1:46:05 PM	SiCl4 pre valve closed
10/17/2011	1:46:05 PM	SiCl4 post valve closed
10/17/2011	1:46:05 PM	Bypass valve closed
10/17/2011	1:46:05 PM	Bubbler valve closed
10/17/2011	1:46:05 PM	Main Vac valve opened
10/17/2011	1:46:05 PM	Helium MFC set to  0.000000
10/17/2011	1:46:05 PM	H2 MFC set to  0.000000
10/17/2011	1:46:05 PM	BCl3 MFC set to  0.000000
10/17/2011	1:46:05 PM	PHl3 MFC set to  0.000000
10/17/2011	1:46:05 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:46:05 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:46:05 PM	Tube furnace set to 0
10/17/2011	1:46:35 PM	H2 valve closed
10/17/2011	1:46:35 PM	BCl3 valve closed
10/17/2011	1:46:35 PM	PH3 valve closed
10/17/2011	1:46:35 PM	SiCl4 pre valve closed
10/17/2011	1:46:35 PM	SiCl4 post valve closed
10/17/2011	1:46:35 PM	Bypass valve closed
10/17/2011	1:46:35 PM	Bubbler valve closed
10/17/2011	1:46:35 PM	Helium valve opened
10/17/2011	1:46:35 PM	Main Vac valve opened
10/17/2011	1:46:35 PM	Helium MFC set to  20.000000
10/17/2011	1:46:35 PM	H2 MFC set to  0.000000
10/17/2011	1:46:35 PM	BCl3 MFC set to  0.000000
10/17/2011	1:46:35 PM	PHl3 MFC set to  0.000000
10/17/2011	1:46:35 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:46:35 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:46:35 PM	Tube furnace set to 0
10/17/2011	1:47:06 PM	Helium valve closed
10/17/2011	1:47:06 PM	H2 valve closed
10/17/2011	1:47:06 PM	BCl3 valve closed
10/17/2011	1:47:06 PM	PH3 valve closed
10/17/2011	1:47:06 PM	SiCl4 pre valve closed
10/17/2011	1:47:06 PM	SiCl4 post valve closed
10/17/2011	1:47:06 PM	Bypass valve closed
10/17/2011	1:47:06 PM	Bubbler valve closed
10/17/2011	1:47:06 PM	Main Vac valve opened
10/17/2011	1:47:06 PM	Helium MFC set to  0.000000
10/17/2011	1:47:06 PM	H2 MFC set to  0.000000
10/17/2011	1:47:06 PM	BCl3 MFC set to  0.000000
10/17/2011	1:47:06 PM	PHl3 MFC set to  0.000000
10/17/2011	1:47:06 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:47:06 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:47:06 PM	Tube furnace set to 0
10/17/2011	1:47:07 PM	Run finished at 1:47 PM
10/17/2011	1:47:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/17/2011	1:48:20 PM	Main Vac valve closed
10/17/2011	1:48:39 PM	Main Vac valve opened
10/17/2011	1:53:15 PM	Recipe started at 1:53 PM
10/17/2011	1:53:15 PM	Helium valve closed
10/17/2011	1:53:15 PM	H2 valve closed
10/17/2011	1:53:15 PM	BCl3 valve closed
10/17/2011	1:53:15 PM	PH3 valve closed
10/17/2011	1:53:15 PM	SiCl4 pre valve closed
10/17/2011	1:53:15 PM	SiCl4 post valve closed
10/17/2011	1:53:15 PM	Main Vac valve closed
10/17/2011	1:53:15 PM	Bypass valve closed
10/17/2011	1:53:15 PM	Bubbler valve closed
10/17/2011	1:53:15 PM	Helium MFC set to  0.000000
10/17/2011	1:53:15 PM	H2 MFC set to  0.000000
10/17/2011	1:53:15 PM	BCl3 MFC set to  0.000000
10/17/2011	1:53:15 PM	PHl3 MFC set to  0.000000
10/17/2011	1:53:15 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:53:15 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:53:15 PM	Tube furnace set to 0
10/17/2011	1:53:18 PM	Helium valve closed
10/17/2011	1:53:18 PM	BCl3 valve closed
10/17/2011	1:53:18 PM	PH3 valve closed
10/17/2011	1:53:18 PM	SiCl4 pre valve closed
10/17/2011	1:53:18 PM	SiCl4 post valve closed
10/17/2011	1:53:18 PM	Main Vac valve closed
10/17/2011	1:53:18 PM	Bypass valve closed
10/17/2011	1:53:18 PM	Bubbler valve closed
10/17/2011	1:53:18 PM	H2 valve opened
10/17/2011	1:53:18 PM	Helium MFC set to  0.000000
10/17/2011	1:53:18 PM	H2 MFC set to  500.000000
10/17/2011	1:53:18 PM	BCl3 MFC set to  0.000000
10/17/2011	1:53:18 PM	PHl3 MFC set to  0.000000
10/17/2011	1:53:18 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:53:18 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:53:18 PM	Tube furnace set to 0
10/17/2011	1:54:20 PM	Helium valve closed
10/17/2011	1:54:20 PM	BCl3 valve closed
10/17/2011	1:54:20 PM	PH3 valve closed
10/17/2011	1:54:20 PM	SiCl4 pre valve closed
10/17/2011	1:54:20 PM	SiCl4 post valve closed
10/17/2011	1:54:20 PM	Main Vac valve closed
10/17/2011	1:54:20 PM	Bypass valve closed
10/17/2011	1:54:20 PM	H2 valve opened
10/17/2011	1:54:20 PM	Bubbler valve opened
10/17/2011	1:54:20 PM	Helium MFC set to  0.000000
10/17/2011	1:54:20 PM	H2 MFC set to  500.000000
10/17/2011	1:54:20 PM	BCl3 MFC set to  0.000000
10/17/2011	1:54:20 PM	PHl3 MFC set to  0.000000
10/17/2011	1:54:20 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:54:20 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:54:20 PM	Tube furnace set to 0
10/17/2011	1:54:21 PM	Helium valve closed
10/17/2011	1:54:21 PM	BCl3 valve closed
10/17/2011	1:54:21 PM	PH3 valve closed
10/17/2011	1:54:21 PM	SiCl4 pre valve closed
10/17/2011	1:54:21 PM	SiCl4 post valve closed
10/17/2011	1:54:21 PM	Main Vac valve closed
10/17/2011	1:54:21 PM	Bypass valve closed
10/17/2011	1:54:21 PM	H2 valve opened
10/17/2011	1:54:21 PM	Bubbler valve opened
10/17/2011	1:54:21 PM	Helium MFC set to  0.000000
10/17/2011	1:54:21 PM	H2 MFC set to  500.000000
10/17/2011	1:54:21 PM	BCl3 MFC set to  0.000000
10/17/2011	1:54:21 PM	PHl3 MFC set to  0.000000
10/17/2011	1:54:21 PM	SiCl4 MFC set to  0.000000
10/17/2011	1:54:21 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	1:54:22 PM	Tube furnace set to 1000
10/17/2011	2:14:21 PM	Helium valve closed
10/17/2011	2:14:21 PM	PH3 valve closed
10/17/2011	2:14:21 PM	Main Vac valve closed
10/17/2011	2:14:21 PM	Bypass valve closed
10/17/2011	2:14:21 PM	H2 valve opened
10/17/2011	2:14:22 PM	BCl3 valve opened
10/17/2011	2:14:22 PM	SiCl4 pre valve opened
10/17/2011	2:14:22 PM	SiCl4 post valve opened
10/17/2011	2:14:22 PM	Bubbler valve opened
10/17/2011	2:14:22 PM	Helium MFC set to  0.000000
10/17/2011	2:14:22 PM	H2 MFC set to  500.000000
10/17/2011	2:14:22 PM	BCl3 MFC set to  2.500000
10/17/2011	2:14:22 PM	PHl3 MFC set to  0.000000
10/17/2011	2:14:22 PM	SiCl4 MFC set to  50.000000
10/17/2011	2:14:22 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	2:14:22 PM	Tube furnace set to 1000
10/17/2011	2:19:22 PM	Helium valve closed
10/17/2011	2:19:22 PM	BCl3 valve closed
10/17/2011	2:19:22 PM	PH3 valve closed
10/17/2011	2:19:22 PM	SiCl4 pre valve closed
10/17/2011	2:19:22 PM	SiCl4 post valve closed
10/17/2011	2:19:22 PM	Main Vac valve closed
10/17/2011	2:19:22 PM	Bypass valve closed
10/17/2011	2:19:22 PM	H2 valve opened
10/17/2011	2:19:22 PM	Bubbler valve opened
10/17/2011	2:19:22 PM	Helium MFC set to  0.000000
10/17/2011	2:19:22 PM	H2 MFC set to  500.000000
10/17/2011	2:19:22 PM	BCl3 MFC set to  0.000000
10/17/2011	2:19:22 PM	PHl3 MFC set to  0.000000
10/17/2011	2:19:22 PM	SiCl4 MFC set to  0.000000
10/17/2011	2:19:22 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	2:19:22 PM	Tube furnace set to 750
10/17/2011	2:24:22 PM	H2 valve closed
10/17/2011	2:24:22 PM	BCl3 valve closed
10/17/2011	2:24:22 PM	PH3 valve closed
10/17/2011	2:24:22 PM	SiCl4 pre valve closed
10/17/2011	2:24:22 PM	SiCl4 post valve closed
10/17/2011	2:24:22 PM	Main Vac valve closed
10/17/2011	2:24:22 PM	Bypass valve closed
10/17/2011	2:24:22 PM	Helium valve opened
10/17/2011	2:24:22 PM	Bubbler valve opened
10/17/2011	2:24:22 PM	Helium MFC set to  500.000000
10/17/2011	2:24:22 PM	H2 MFC set to  0.000000
10/17/2011	2:24:22 PM	BCl3 MFC set to  0.000000
10/17/2011	2:24:22 PM	PHl3 MFC set to  0.000000
10/17/2011	2:24:22 PM	SiCl4 MFC set to  0.000000
10/17/2011	2:24:22 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	2:24:22 PM	Tube furnace set to 0
10/17/2011	2:39:20 PM	Helium valve closed
10/17/2011	2:39:20 PM	H2 valve closed
10/17/2011	2:39:20 PM	BCl3 valve closed
10/17/2011	2:39:20 PM	PH3 valve closed
10/17/2011	2:39:20 PM	SiCl4 pre valve closed
10/17/2011	2:39:20 PM	SiCl4 post valve closed
10/17/2011	2:39:20 PM	Main Vac valve closed
10/17/2011	2:39:20 PM	Bypass valve closed
10/17/2011	2:39:20 PM	Bubbler valve closed
10/17/2011	2:39:20 PM	Helium MFC set to  0.000000
10/17/2011	2:39:20 PM	H2 MFC set to  0.000000
10/17/2011	2:39:20 PM	BCl3 MFC set to  0.000000
10/17/2011	2:39:20 PM	PHl3 MFC set to  0.000000
10/17/2011	2:39:20 PM	SiCl4 MFC set to  0.000000
10/17/2011	2:39:20 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	2:39:20 PM	Tube furnace set to 0
10/17/2011	2:39:21 PM	Run finished at 2:39 PM
10/17/2011	2:42:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2011	2:42:19 PM	Recipe started at 2:42 PM
10/17/2011	2:42:19 PM	Helium valve closed
10/17/2011	2:42:19 PM	H2 valve closed
10/17/2011	2:42:19 PM	BCl3 valve closed
10/17/2011	2:42:19 PM	PH3 valve closed
10/17/2011	2:42:19 PM	SiCl4 pre valve closed
10/17/2011	2:42:19 PM	SiCl4 post valve closed
10/17/2011	2:42:19 PM	Main Vac valve closed
10/17/2011	2:42:19 PM	Bubbler valve closed
10/17/2011	2:42:19 PM	Bypass valve opened
10/17/2011	2:42:19 PM	Helium MFC set to  0.000000
10/17/2011	2:42:19 PM	H2 MFC set to  0.000000
10/17/2011	2:42:19 PM	BCl3 MFC set to  0.000000
10/17/2011	2:42:19 PM	PHl3 MFC set to  0.000000
10/17/2011	2:42:19 PM	SiCl4 MFC set to  0.000000
10/17/2011	2:42:19 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	2:42:19 PM	Tube furnace set to 0
10/17/2011	2:43:24 PM	Helium valve closed
10/17/2011	2:43:24 PM	H2 valve closed
10/17/2011	2:43:24 PM	BCl3 valve closed
10/17/2011	2:43:24 PM	PH3 valve closed
10/17/2011	2:43:24 PM	SiCl4 pre valve closed
10/17/2011	2:43:24 PM	SiCl4 post valve closed
10/17/2011	2:43:24 PM	Main Vac valve closed
10/17/2011	2:43:24 PM	Bubbler valve closed
10/17/2011	2:43:24 PM	Bypass valve opened
10/17/2011	2:43:24 PM	Helium MFC set to  0.000000
10/17/2011	2:43:24 PM	H2 MFC set to  0.000000
10/17/2011	2:43:24 PM	BCl3 MFC set to  0.000000
10/17/2011	2:43:24 PM	PHl3 MFC set to  0.000000
10/17/2011	2:43:24 PM	SiCl4 MFC set to  0.000000
10/17/2011	2:43:24 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	2:43:24 PM	Tube furnace set to 0
10/17/2011	2:44:24 PM	Helium valve closed
10/17/2011	2:44:24 PM	H2 valve closed
10/17/2011	2:44:24 PM	BCl3 valve closed
10/17/2011	2:44:24 PM	PH3 valve closed
10/17/2011	2:44:24 PM	SiCl4 pre valve closed
10/17/2011	2:44:24 PM	SiCl4 post valve closed
10/17/2011	2:44:24 PM	Bypass valve closed
10/17/2011	2:44:24 PM	Bubbler valve closed
10/17/2011	2:44:24 PM	Main Vac valve opened
10/17/2011	2:44:24 PM	Helium MFC set to  0.000000
10/17/2011	2:44:24 PM	H2 MFC set to  0.000000
10/17/2011	2:44:24 PM	BCl3 MFC set to  0.000000
10/17/2011	2:44:24 PM	PHl3 MFC set to  0.000000
10/17/2011	2:44:24 PM	SiCl4 MFC set to  0.000000
10/17/2011	2:44:24 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	2:44:24 PM	Tube furnace set to 0
10/17/2011	2:44:25 PM	Run finished at 2:44 PM
10/17/2011	2:44:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2011	2:52:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/17/2011	2:52:37 PM	Recipe started at 2:52 PM
10/17/2011	2:52:37 PM	Helium valve closed
10/17/2011	2:52:37 PM	H2 valve closed
10/17/2011	2:52:37 PM	BCl3 valve closed
10/17/2011	2:52:37 PM	PH3 valve closed
10/17/2011	2:52:37 PM	SiCl4 pre valve closed
10/17/2011	2:52:37 PM	SiCl4 post valve closed
10/17/2011	2:52:37 PM	Main Vac valve closed
10/17/2011	2:52:37 PM	Bypass valve closed
10/17/2011	2:52:37 PM	Bubbler valve closed
10/17/2011	2:52:37 PM	Helium MFC set to  0.000000
10/17/2011	2:52:37 PM	H2 MFC set to  0.000000
10/17/2011	2:52:37 PM	BCl3 MFC set to  0.000000
10/17/2011	2:52:37 PM	PHl3 MFC set to  0.000000
10/17/2011	2:52:37 PM	SiCl4 MFC set to  0.000000
10/17/2011	2:52:37 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	2:52:37 PM	Tube furnace set to 0
10/17/2011	2:52:40 PM	H2 valve closed
10/17/2011	2:52:40 PM	BCl3 valve closed
10/17/2011	2:52:40 PM	PH3 valve closed
10/17/2011	2:52:40 PM	SiCl4 pre valve closed
10/17/2011	2:52:40 PM	SiCl4 post valve closed
10/17/2011	2:52:40 PM	Main Vac valve closed
10/17/2011	2:52:40 PM	Bypass valve closed
10/17/2011	2:52:40 PM	Bubbler valve closed
10/17/2011	2:52:40 PM	Helium valve opened
10/17/2011	2:52:40 PM	Helium MFC set to  500.000000
10/17/2011	2:52:40 PM	H2 MFC set to  0.000000
10/17/2011	2:52:40 PM	BCl3 MFC set to  0.000000
10/17/2011	2:52:40 PM	PHl3 MFC set to  0.000000
10/17/2011	2:52:40 PM	SiCl4 MFC set to  0.000000
10/17/2011	2:52:40 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	2:52:40 PM	Tube furnace set to 0
10/17/2011	2:53:44 PM	Helium valve closed
10/17/2011	2:53:44 PM	H2 valve closed
10/17/2011	2:53:44 PM	BCl3 valve closed
10/17/2011	2:53:44 PM	PH3 valve closed
10/17/2011	2:53:44 PM	SiCl4 pre valve closed
10/17/2011	2:53:44 PM	SiCl4 post valve closed
10/17/2011	2:53:44 PM	Main Vac valve closed
10/17/2011	2:53:44 PM	Bypass valve closed
10/17/2011	2:53:44 PM	Bubbler valve closed
10/17/2011	2:53:44 PM	Helium MFC set to  0.000000
10/17/2011	2:53:44 PM	H2 MFC set to  0.000000
10/17/2011	2:53:44 PM	BCl3 MFC set to  0.000000
10/17/2011	2:53:44 PM	PHl3 MFC set to  0.000000
10/17/2011	2:53:44 PM	SiCl4 MFC set to  0.000000
10/17/2011	2:53:44 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	2:53:44 PM	Tube furnace set to 0
10/17/2011	2:53:45 PM	Run finished at 2:53 PM
10/17/2011	2:53:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/17/2011	3:01:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2011	3:01:37 PM	Recipe started at 3:01 PM
10/17/2011	3:01:37 PM	Helium valve closed
10/17/2011	3:01:37 PM	H2 valve closed
10/17/2011	3:01:37 PM	BCl3 valve closed
10/17/2011	3:01:37 PM	PH3 valve closed
10/17/2011	3:01:37 PM	SiCl4 pre valve closed
10/17/2011	3:01:37 PM	SiCl4 post valve closed
10/17/2011	3:01:37 PM	Main Vac valve closed
10/17/2011	3:01:37 PM	Bubbler valve closed
10/17/2011	3:01:37 PM	Bypass valve opened
10/17/2011	3:01:37 PM	Helium MFC set to  0.000000
10/17/2011	3:01:37 PM	H2 MFC set to  0.000000
10/17/2011	3:01:37 PM	BCl3 MFC set to  0.000000
10/17/2011	3:01:37 PM	PHl3 MFC set to  0.000000
10/17/2011	3:01:37 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:01:37 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:01:37 PM	Tube furnace set to 0
10/17/2011	3:02:48 PM	Helium valve closed
10/17/2011	3:02:48 PM	H2 valve closed
10/17/2011	3:02:48 PM	BCl3 valve closed
10/17/2011	3:02:48 PM	PH3 valve closed
10/17/2011	3:02:48 PM	SiCl4 pre valve closed
10/17/2011	3:02:48 PM	SiCl4 post valve closed
10/17/2011	3:02:48 PM	Main Vac valve closed
10/17/2011	3:02:48 PM	Bubbler valve closed
10/17/2011	3:02:48 PM	Bypass valve opened
10/17/2011	3:02:48 PM	Helium MFC set to  0.000000
10/17/2011	3:02:48 PM	H2 MFC set to  0.000000
10/17/2011	3:02:48 PM	BCl3 MFC set to  0.000000
10/17/2011	3:02:48 PM	PHl3 MFC set to  0.000000
10/17/2011	3:02:48 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:02:48 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:02:48 PM	Tube furnace set to 0
10/17/2011	3:03:32 PM	Helium valve closed
10/17/2011	3:03:32 PM	H2 valve closed
10/17/2011	3:03:32 PM	BCl3 valve closed
10/17/2011	3:03:32 PM	PH3 valve closed
10/17/2011	3:03:32 PM	SiCl4 pre valve closed
10/17/2011	3:03:32 PM	SiCl4 post valve closed
10/17/2011	3:03:32 PM	Bypass valve closed
10/17/2011	3:03:32 PM	Bubbler valve closed
10/17/2011	3:03:32 PM	Main Vac valve opened
10/17/2011	3:03:32 PM	Helium MFC set to  0.000000
10/17/2011	3:03:32 PM	H2 MFC set to  0.000000
10/17/2011	3:03:32 PM	BCl3 MFC set to  0.000000
10/17/2011	3:03:32 PM	PHl3 MFC set to  0.000000
10/17/2011	3:03:32 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:03:32 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:03:33 PM	Tube furnace set to 0
10/17/2011	3:03:34 PM	Run finished at 3:03 PM
10/17/2011	3:03:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2011	3:11:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/17/2011	3:11:32 PM	Recipe started at 3:11 PM
10/17/2011	3:11:32 PM	Helium valve closed
10/17/2011	3:11:32 PM	H2 valve closed
10/17/2011	3:11:32 PM	BCl3 valve closed
10/17/2011	3:11:32 PM	PH3 valve closed
10/17/2011	3:11:32 PM	SiCl4 pre valve closed
10/17/2011	3:11:32 PM	SiCl4 post valve closed
10/17/2011	3:11:32 PM	Main Vac valve closed
10/17/2011	3:11:32 PM	Bubbler valve closed
10/17/2011	3:11:32 PM	Bypass valve opened
10/17/2011	3:11:32 PM	Helium MFC set to  0.000000
10/17/2011	3:11:32 PM	H2 MFC set to  0.000000
10/17/2011	3:11:32 PM	BCl3 MFC set to  0.000000
10/17/2011	3:11:32 PM	PHl3 MFC set to  0.000000
10/17/2011	3:11:32 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:11:32 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:11:32 PM	Tube furnace set to 0
10/17/2011	3:11:32 PM	Helium valve closed
10/17/2011	3:11:32 PM	H2 valve closed
10/17/2011	3:11:32 PM	BCl3 valve closed
10/17/2011	3:11:32 PM	PH3 valve closed
10/17/2011	3:11:32 PM	SiCl4 pre valve closed
10/17/2011	3:11:32 PM	SiCl4 post valve closed
10/17/2011	3:11:32 PM	Main Vac valve closed
10/17/2011	3:11:32 PM	Bubbler valve closed
10/17/2011	3:11:32 PM	Bypass valve opened
10/17/2011	3:11:32 PM	Helium MFC set to  0.000000
10/17/2011	3:11:32 PM	H2 MFC set to  0.000000
10/17/2011	3:11:32 PM	BCl3 MFC set to  0.000000
10/17/2011	3:11:32 PM	PHl3 MFC set to  0.000000
10/17/2011	3:11:32 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:11:32 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:11:32 PM	Tube furnace set to 0
10/17/2011	3:11:33 PM	Helium valve closed
10/17/2011	3:11:33 PM	H2 valve closed
10/17/2011	3:11:33 PM	BCl3 valve closed
10/17/2011	3:11:33 PM	PH3 valve closed
10/17/2011	3:11:33 PM	SiCl4 pre valve closed
10/17/2011	3:11:33 PM	SiCl4 post valve closed
10/17/2011	3:11:33 PM	Bypass valve closed
10/17/2011	3:11:33 PM	Bubbler valve closed
10/17/2011	3:11:33 PM	Main Vac valve opened
10/17/2011	3:11:33 PM	Helium MFC set to  0.000000
10/17/2011	3:11:33 PM	H2 MFC set to  0.000000
10/17/2011	3:11:33 PM	BCl3 MFC set to  0.000000
10/17/2011	3:11:33 PM	PHl3 MFC set to  0.000000
10/17/2011	3:11:33 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:11:33 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:11:33 PM	Tube furnace set to 0
10/17/2011	3:11:34 PM	H2 valve closed
10/17/2011	3:11:34 PM	BCl3 valve closed
10/17/2011	3:11:34 PM	PH3 valve closed
10/17/2011	3:11:34 PM	SiCl4 pre valve closed
10/17/2011	3:11:34 PM	SiCl4 post valve closed
10/17/2011	3:11:34 PM	Bypass valve closed
10/17/2011	3:11:34 PM	Bubbler valve closed
10/17/2011	3:11:34 PM	Helium valve opened
10/17/2011	3:11:34 PM	Main Vac valve opened
10/17/2011	3:11:34 PM	Helium MFC set to  20.000000
10/17/2011	3:11:34 PM	H2 MFC set to  0.000000
10/17/2011	3:11:34 PM	BCl3 MFC set to  0.000000
10/17/2011	3:11:34 PM	PHl3 MFC set to  0.000000
10/17/2011	3:11:34 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:11:34 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:11:34 PM	Tube furnace set to 0
10/17/2011	3:12:04 PM	Helium valve closed
10/17/2011	3:12:04 PM	H2 valve closed
10/17/2011	3:12:04 PM	BCl3 valve closed
10/17/2011	3:12:04 PM	PH3 valve closed
10/17/2011	3:12:04 PM	SiCl4 pre valve closed
10/17/2011	3:12:04 PM	SiCl4 post valve closed
10/17/2011	3:12:04 PM	Bypass valve closed
10/17/2011	3:12:04 PM	Bubbler valve closed
10/17/2011	3:12:04 PM	Main Vac valve opened
10/17/2011	3:12:04 PM	Helium MFC set to  0.000000
10/17/2011	3:12:04 PM	H2 MFC set to  0.000000
10/17/2011	3:12:04 PM	BCl3 MFC set to  0.000000
10/17/2011	3:12:04 PM	PHl3 MFC set to  0.000000
10/17/2011	3:12:04 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:12:04 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:12:04 PM	Tube furnace set to 0
10/17/2011	3:12:34 PM	H2 valve closed
10/17/2011	3:12:34 PM	BCl3 valve closed
10/17/2011	3:12:34 PM	PH3 valve closed
10/17/2011	3:12:34 PM	SiCl4 pre valve closed
10/17/2011	3:12:34 PM	SiCl4 post valve closed
10/17/2011	3:12:34 PM	Bypass valve closed
10/17/2011	3:12:34 PM	Bubbler valve closed
10/17/2011	3:12:34 PM	Helium valve opened
10/17/2011	3:12:34 PM	Main Vac valve opened
10/17/2011	3:12:34 PM	Helium MFC set to  20.000000
10/17/2011	3:12:34 PM	H2 MFC set to  0.000000
10/17/2011	3:12:34 PM	BCl3 MFC set to  0.000000
10/17/2011	3:12:34 PM	PHl3 MFC set to  0.000000
10/17/2011	3:12:34 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:12:34 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:12:34 PM	Tube furnace set to 0
10/17/2011	3:13:04 PM	Helium valve closed
10/17/2011	3:13:04 PM	H2 valve closed
10/17/2011	3:13:04 PM	BCl3 valve closed
10/17/2011	3:13:04 PM	PH3 valve closed
10/17/2011	3:13:04 PM	SiCl4 pre valve closed
10/17/2011	3:13:04 PM	SiCl4 post valve closed
10/17/2011	3:13:04 PM	Bypass valve closed
10/17/2011	3:13:04 PM	Bubbler valve closed
10/17/2011	3:13:04 PM	Main Vac valve opened
10/17/2011	3:13:04 PM	Helium MFC set to  0.000000
10/17/2011	3:13:04 PM	H2 MFC set to  0.000000
10/17/2011	3:13:04 PM	BCl3 MFC set to  0.000000
10/17/2011	3:13:04 PM	PHl3 MFC set to  0.000000
10/17/2011	3:13:04 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:13:04 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:13:05 PM	Tube furnace set to 0
10/17/2011	3:13:35 PM	H2 valve closed
10/17/2011	3:13:35 PM	BCl3 valve closed
10/17/2011	3:13:35 PM	PH3 valve closed
10/17/2011	3:13:35 PM	SiCl4 pre valve closed
10/17/2011	3:13:35 PM	SiCl4 post valve closed
10/17/2011	3:13:35 PM	Bypass valve closed
10/17/2011	3:13:35 PM	Bubbler valve closed
10/17/2011	3:13:35 PM	Helium valve opened
10/17/2011	3:13:35 PM	Main Vac valve opened
10/17/2011	3:13:35 PM	Helium MFC set to  20.000000
10/17/2011	3:13:35 PM	H2 MFC set to  0.000000
10/17/2011	3:13:35 PM	BCl3 MFC set to  0.000000
10/17/2011	3:13:35 PM	PHl3 MFC set to  0.000000
10/17/2011	3:13:35 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:13:35 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:13:35 PM	Tube furnace set to 0
10/17/2011	3:14:05 PM	Helium valve closed
10/17/2011	3:14:05 PM	H2 valve closed
10/17/2011	3:14:05 PM	BCl3 valve closed
10/17/2011	3:14:05 PM	PH3 valve closed
10/17/2011	3:14:05 PM	SiCl4 pre valve closed
10/17/2011	3:14:05 PM	SiCl4 post valve closed
10/17/2011	3:14:05 PM	Bypass valve closed
10/17/2011	3:14:05 PM	Bubbler valve closed
10/17/2011	3:14:05 PM	Main Vac valve opened
10/17/2011	3:14:05 PM	Helium MFC set to  0.000000
10/17/2011	3:14:05 PM	H2 MFC set to  0.000000
10/17/2011	3:14:05 PM	BCl3 MFC set to  0.000000
10/17/2011	3:14:05 PM	PHl3 MFC set to  0.000000
10/17/2011	3:14:05 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:14:05 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:14:05 PM	Tube furnace set to 0
10/17/2011	3:14:35 PM	H2 valve closed
10/17/2011	3:14:35 PM	BCl3 valve closed
10/17/2011	3:14:35 PM	PH3 valve closed
10/17/2011	3:14:35 PM	SiCl4 pre valve closed
10/17/2011	3:14:35 PM	SiCl4 post valve closed
10/17/2011	3:14:35 PM	Bypass valve closed
10/17/2011	3:14:35 PM	Bubbler valve closed
10/17/2011	3:14:35 PM	Helium valve opened
10/17/2011	3:14:35 PM	Main Vac valve opened
10/17/2011	3:14:35 PM	Helium MFC set to  20.000000
10/17/2011	3:14:35 PM	H2 MFC set to  0.000000
10/17/2011	3:14:35 PM	BCl3 MFC set to  0.000000
10/17/2011	3:14:35 PM	PHl3 MFC set to  0.000000
10/17/2011	3:14:35 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:14:35 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:14:35 PM	Tube furnace set to 0
10/17/2011	3:15:05 PM	Helium valve closed
10/17/2011	3:15:05 PM	H2 valve closed
10/17/2011	3:15:05 PM	BCl3 valve closed
10/17/2011	3:15:05 PM	PH3 valve closed
10/17/2011	3:15:05 PM	SiCl4 pre valve closed
10/17/2011	3:15:05 PM	SiCl4 post valve closed
10/17/2011	3:15:05 PM	Bypass valve closed
10/17/2011	3:15:05 PM	Bubbler valve closed
10/17/2011	3:15:05 PM	Main Vac valve opened
10/17/2011	3:15:05 PM	Helium MFC set to  0.000000
10/17/2011	3:15:05 PM	H2 MFC set to  0.000000
10/17/2011	3:15:05 PM	BCl3 MFC set to  0.000000
10/17/2011	3:15:05 PM	PHl3 MFC set to  0.000000
10/17/2011	3:15:05 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:15:05 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:15:05 PM	Tube furnace set to 0
10/17/2011	3:15:35 PM	H2 valve closed
10/17/2011	3:15:35 PM	BCl3 valve closed
10/17/2011	3:15:35 PM	PH3 valve closed
10/17/2011	3:15:35 PM	SiCl4 pre valve closed
10/17/2011	3:15:35 PM	SiCl4 post valve closed
10/17/2011	3:15:35 PM	Bypass valve closed
10/17/2011	3:15:35 PM	Bubbler valve closed
10/17/2011	3:15:35 PM	Helium valve opened
10/17/2011	3:15:35 PM	Main Vac valve opened
10/17/2011	3:15:35 PM	Helium MFC set to  20.000000
10/17/2011	3:15:35 PM	H2 MFC set to  0.000000
10/17/2011	3:15:35 PM	BCl3 MFC set to  0.000000
10/17/2011	3:15:35 PM	PHl3 MFC set to  0.000000
10/17/2011	3:15:35 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:15:35 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:15:36 PM	Tube furnace set to 0
10/17/2011	3:16:06 PM	Helium valve closed
10/17/2011	3:16:06 PM	H2 valve closed
10/17/2011	3:16:06 PM	BCl3 valve closed
10/17/2011	3:16:06 PM	PH3 valve closed
10/17/2011	3:16:06 PM	SiCl4 pre valve closed
10/17/2011	3:16:06 PM	SiCl4 post valve closed
10/17/2011	3:16:06 PM	Bypass valve closed
10/17/2011	3:16:06 PM	Bubbler valve closed
10/17/2011	3:16:06 PM	Main Vac valve opened
10/17/2011	3:16:06 PM	Helium MFC set to  0.000000
10/17/2011	3:16:06 PM	H2 MFC set to  0.000000
10/17/2011	3:16:06 PM	BCl3 MFC set to  0.000000
10/17/2011	3:16:06 PM	PHl3 MFC set to  0.000000
10/17/2011	3:16:06 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:16:06 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:16:06 PM	Tube furnace set to 0
10/17/2011	3:16:36 PM	H2 valve closed
10/17/2011	3:16:36 PM	BCl3 valve closed
10/17/2011	3:16:36 PM	PH3 valve closed
10/17/2011	3:16:36 PM	SiCl4 pre valve closed
10/17/2011	3:16:36 PM	SiCl4 post valve closed
10/17/2011	3:16:36 PM	Bypass valve closed
10/17/2011	3:16:36 PM	Bubbler valve closed
10/17/2011	3:16:36 PM	Helium valve opened
10/17/2011	3:16:36 PM	Main Vac valve opened
10/17/2011	3:16:36 PM	Helium MFC set to  20.000000
10/17/2011	3:16:36 PM	H2 MFC set to  0.000000
10/17/2011	3:16:36 PM	BCl3 MFC set to  0.000000
10/17/2011	3:16:36 PM	PHl3 MFC set to  0.000000
10/17/2011	3:16:36 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:16:36 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:16:36 PM	Tube furnace set to 0
10/17/2011	3:17:06 PM	Helium valve closed
10/17/2011	3:17:06 PM	H2 valve closed
10/17/2011	3:17:06 PM	BCl3 valve closed
10/17/2011	3:17:06 PM	PH3 valve closed
10/17/2011	3:17:06 PM	SiCl4 pre valve closed
10/17/2011	3:17:06 PM	SiCl4 post valve closed
10/17/2011	3:17:06 PM	Bypass valve closed
10/17/2011	3:17:06 PM	Bubbler valve closed
10/17/2011	3:17:06 PM	Main Vac valve opened
10/17/2011	3:17:06 PM	Helium MFC set to  0.000000
10/17/2011	3:17:06 PM	H2 MFC set to  0.000000
10/17/2011	3:17:06 PM	BCl3 MFC set to  0.000000
10/17/2011	3:17:06 PM	PHl3 MFC set to  0.000000
10/17/2011	3:17:06 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:17:06 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:17:06 PM	Tube furnace set to 0
10/17/2011	3:17:36 PM	H2 valve closed
10/17/2011	3:17:36 PM	BCl3 valve closed
10/17/2011	3:17:36 PM	PH3 valve closed
10/17/2011	3:17:36 PM	SiCl4 pre valve closed
10/17/2011	3:17:36 PM	SiCl4 post valve closed
10/17/2011	3:17:36 PM	Bypass valve closed
10/17/2011	3:17:36 PM	Bubbler valve closed
10/17/2011	3:17:36 PM	Helium valve opened
10/17/2011	3:17:36 PM	Main Vac valve opened
10/17/2011	3:17:36 PM	Helium MFC set to  20.000000
10/17/2011	3:17:36 PM	H2 MFC set to  0.000000
10/17/2011	3:17:36 PM	BCl3 MFC set to  0.000000
10/17/2011	3:17:36 PM	PHl3 MFC set to  0.000000
10/17/2011	3:17:36 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:17:36 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:17:36 PM	Tube furnace set to 0
10/17/2011	3:18:06 PM	Helium valve closed
10/17/2011	3:18:06 PM	H2 valve closed
10/17/2011	3:18:06 PM	BCl3 valve closed
10/17/2011	3:18:06 PM	PH3 valve closed
10/17/2011	3:18:06 PM	SiCl4 pre valve closed
10/17/2011	3:18:06 PM	SiCl4 post valve closed
10/17/2011	3:18:06 PM	Bypass valve closed
10/17/2011	3:18:06 PM	Bubbler valve closed
10/17/2011	3:18:06 PM	Main Vac valve opened
10/17/2011	3:18:06 PM	Helium MFC set to  0.000000
10/17/2011	3:18:06 PM	H2 MFC set to  0.000000
10/17/2011	3:18:06 PM	BCl3 MFC set to  0.000000
10/17/2011	3:18:06 PM	PHl3 MFC set to  0.000000
10/17/2011	3:18:06 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:18:06 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:18:07 PM	Tube furnace set to 0
10/17/2011	3:18:37 PM	H2 valve closed
10/17/2011	3:18:37 PM	BCl3 valve closed
10/17/2011	3:18:37 PM	PH3 valve closed
10/17/2011	3:18:37 PM	SiCl4 pre valve closed
10/17/2011	3:18:37 PM	SiCl4 post valve closed
10/17/2011	3:18:37 PM	Bypass valve closed
10/17/2011	3:18:37 PM	Bubbler valve closed
10/17/2011	3:18:37 PM	Helium valve opened
10/17/2011	3:18:37 PM	Main Vac valve opened
10/17/2011	3:18:37 PM	Helium MFC set to  20.000000
10/17/2011	3:18:37 PM	H2 MFC set to  0.000000
10/17/2011	3:18:37 PM	BCl3 MFC set to  0.000000
10/17/2011	3:18:37 PM	PHl3 MFC set to  0.000000
10/17/2011	3:18:37 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:18:37 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:18:37 PM	Tube furnace set to 0
10/17/2011	3:19:07 PM	Helium valve closed
10/17/2011	3:19:07 PM	H2 valve closed
10/17/2011	3:19:07 PM	BCl3 valve closed
10/17/2011	3:19:07 PM	PH3 valve closed
10/17/2011	3:19:07 PM	SiCl4 pre valve closed
10/17/2011	3:19:07 PM	SiCl4 post valve closed
10/17/2011	3:19:07 PM	Bypass valve closed
10/17/2011	3:19:07 PM	Bubbler valve closed
10/17/2011	3:19:07 PM	Main Vac valve opened
10/17/2011	3:19:07 PM	Helium MFC set to  0.000000
10/17/2011	3:19:07 PM	H2 MFC set to  0.000000
10/17/2011	3:19:07 PM	BCl3 MFC set to  0.000000
10/17/2011	3:19:07 PM	PHl3 MFC set to  0.000000
10/17/2011	3:19:07 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:19:07 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:19:07 PM	Tube furnace set to 0
10/17/2011	3:19:37 PM	H2 valve closed
10/17/2011	3:19:37 PM	BCl3 valve closed
10/17/2011	3:19:37 PM	PH3 valve closed
10/17/2011	3:19:37 PM	SiCl4 pre valve closed
10/17/2011	3:19:37 PM	SiCl4 post valve closed
10/17/2011	3:19:37 PM	Bypass valve closed
10/17/2011	3:19:37 PM	Bubbler valve closed
10/17/2011	3:19:37 PM	Helium valve opened
10/17/2011	3:19:37 PM	Main Vac valve opened
10/17/2011	3:19:37 PM	Helium MFC set to  20.000000
10/17/2011	3:19:37 PM	H2 MFC set to  0.000000
10/17/2011	3:19:37 PM	BCl3 MFC set to  0.000000
10/17/2011	3:19:37 PM	PHl3 MFC set to  0.000000
10/17/2011	3:19:37 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:19:37 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:19:37 PM	Tube furnace set to 0
10/17/2011	3:20:07 PM	Helium valve closed
10/17/2011	3:20:07 PM	H2 valve closed
10/17/2011	3:20:07 PM	BCl3 valve closed
10/17/2011	3:20:07 PM	PH3 valve closed
10/17/2011	3:20:07 PM	SiCl4 pre valve closed
10/17/2011	3:20:07 PM	SiCl4 post valve closed
10/17/2011	3:20:07 PM	Bypass valve closed
10/17/2011	3:20:07 PM	Bubbler valve closed
10/17/2011	3:20:07 PM	Main Vac valve opened
10/17/2011	3:20:07 PM	Helium MFC set to  0.000000
10/17/2011	3:20:07 PM	H2 MFC set to  0.000000
10/17/2011	3:20:07 PM	BCl3 MFC set to  0.000000
10/17/2011	3:20:07 PM	PHl3 MFC set to  0.000000
10/17/2011	3:20:07 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:20:07 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:20:07 PM	Tube furnace set to 0
10/17/2011	3:20:37 PM	H2 valve closed
10/17/2011	3:20:37 PM	BCl3 valve closed
10/17/2011	3:20:37 PM	PH3 valve closed
10/17/2011	3:20:37 PM	SiCl4 pre valve closed
10/17/2011	3:20:37 PM	SiCl4 post valve closed
10/17/2011	3:20:37 PM	Bypass valve closed
10/17/2011	3:20:37 PM	Bubbler valve closed
10/17/2011	3:20:37 PM	Helium valve opened
10/17/2011	3:20:37 PM	Main Vac valve opened
10/17/2011	3:20:37 PM	Helium MFC set to  20.000000
10/17/2011	3:20:37 PM	H2 MFC set to  0.000000
10/17/2011	3:20:37 PM	BCl3 MFC set to  0.000000
10/17/2011	3:20:37 PM	PHl3 MFC set to  0.000000
10/17/2011	3:20:37 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:20:37 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:20:37 PM	Tube furnace set to 0
10/17/2011	3:21:08 PM	Helium valve closed
10/17/2011	3:21:08 PM	H2 valve closed
10/17/2011	3:21:08 PM	BCl3 valve closed
10/17/2011	3:21:08 PM	PH3 valve closed
10/17/2011	3:21:08 PM	SiCl4 pre valve closed
10/17/2011	3:21:08 PM	SiCl4 post valve closed
10/17/2011	3:21:08 PM	Bypass valve closed
10/17/2011	3:21:08 PM	Bubbler valve closed
10/17/2011	3:21:08 PM	Main Vac valve opened
10/17/2011	3:21:08 PM	Helium MFC set to  0.000000
10/17/2011	3:21:08 PM	H2 MFC set to  0.000000
10/17/2011	3:21:08 PM	BCl3 MFC set to  0.000000
10/17/2011	3:21:08 PM	PHl3 MFC set to  0.000000
10/17/2011	3:21:08 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:21:08 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:21:08 PM	Tube furnace set to 0
10/17/2011	3:21:09 PM	Run finished at 3:21 PM
10/17/2011	3:21:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/17/2011	3:26:39 PM	Main Vac valve closed
10/17/2011	3:27:12 PM	Main Vac valve opened
10/17/2011	3:27:32 PM	Helium MFC set to  100.000000
10/17/2011	3:27:33 PM	Helium valve opened
10/17/2011	3:28:04 PM	Helium valve closed
10/17/2011	3:29:31 PM	Helium valve opened
10/17/2011	3:29:55 PM	Helium valve closed
10/17/2011	3:30:01 PM	Helium MFC set to  0.000000
10/17/2011	3:34:11 PM	Recipe started at 3:34 PM
10/17/2011	3:34:11 PM	Helium valve closed
10/17/2011	3:34:11 PM	H2 valve closed
10/17/2011	3:34:11 PM	BCl3 valve closed
10/17/2011	3:34:11 PM	PH3 valve closed
10/17/2011	3:34:11 PM	SiCl4 pre valve closed
10/17/2011	3:34:11 PM	SiCl4 post valve closed
10/17/2011	3:34:11 PM	Main Vac valve closed
10/17/2011	3:34:11 PM	Bypass valve closed
10/17/2011	3:34:11 PM	Bubbler valve closed
10/17/2011	3:34:11 PM	Helium MFC set to  0.000000
10/17/2011	3:34:11 PM	H2 MFC set to  0.000000
10/17/2011	3:34:11 PM	BCl3 MFC set to  0.000000
10/17/2011	3:34:11 PM	PHl3 MFC set to  0.000000
10/17/2011	3:34:11 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:34:11 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:34:11 PM	Tube furnace set to 0
10/17/2011	3:34:14 PM	Helium valve closed
10/17/2011	3:34:14 PM	BCl3 valve closed
10/17/2011	3:34:14 PM	PH3 valve closed
10/17/2011	3:34:14 PM	SiCl4 pre valve closed
10/17/2011	3:34:14 PM	SiCl4 post valve closed
10/17/2011	3:34:14 PM	Main Vac valve closed
10/17/2011	3:34:14 PM	Bypass valve closed
10/17/2011	3:34:14 PM	Bubbler valve closed
10/17/2011	3:34:14 PM	H2 valve opened
10/17/2011	3:34:14 PM	Helium MFC set to  0.000000
10/17/2011	3:34:14 PM	H2 MFC set to  500.000000
10/17/2011	3:34:14 PM	BCl3 MFC set to  0.000000
10/17/2011	3:34:14 PM	PHl3 MFC set to  0.000000
10/17/2011	3:34:14 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:34:14 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:34:14 PM	Tube furnace set to 0
10/17/2011	3:35:19 PM	Helium valve closed
10/17/2011	3:35:19 PM	BCl3 valve closed
10/17/2011	3:35:19 PM	PH3 valve closed
10/17/2011	3:35:19 PM	SiCl4 pre valve closed
10/17/2011	3:35:19 PM	SiCl4 post valve closed
10/17/2011	3:35:19 PM	Main Vac valve closed
10/17/2011	3:35:19 PM	Bypass valve closed
10/17/2011	3:35:19 PM	H2 valve opened
10/17/2011	3:35:19 PM	Bubbler valve opened
10/17/2011	3:35:19 PM	Helium MFC set to  0.000000
10/17/2011	3:35:19 PM	H2 MFC set to  500.000000
10/17/2011	3:35:19 PM	BCl3 MFC set to  0.000000
10/17/2011	3:35:19 PM	PHl3 MFC set to  0.000000
10/17/2011	3:35:19 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:35:19 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:35:19 PM	Tube furnace set to 0
10/17/2011	3:35:20 PM	Helium valve closed
10/17/2011	3:35:20 PM	BCl3 valve closed
10/17/2011	3:35:20 PM	PH3 valve closed
10/17/2011	3:35:20 PM	SiCl4 pre valve closed
10/17/2011	3:35:20 PM	SiCl4 post valve closed
10/17/2011	3:35:20 PM	Main Vac valve closed
10/17/2011	3:35:20 PM	Bypass valve closed
10/17/2011	3:35:20 PM	H2 valve opened
10/17/2011	3:35:20 PM	Bubbler valve opened
10/17/2011	3:35:20 PM	Helium MFC set to  0.000000
10/17/2011	3:35:20 PM	H2 MFC set to  500.000000
10/17/2011	3:35:20 PM	BCl3 MFC set to  0.000000
10/17/2011	3:35:20 PM	PHl3 MFC set to  0.000000
10/17/2011	3:35:20 PM	SiCl4 MFC set to  0.000000
10/17/2011	3:35:20 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:35:20 PM	Tube furnace set to 1000
10/17/2011	3:55:20 PM	Helium valve closed
10/17/2011	3:55:20 PM	PH3 valve closed
10/17/2011	3:55:20 PM	Main Vac valve closed
10/17/2011	3:55:20 PM	Bypass valve closed
10/17/2011	3:55:20 PM	H2 valve opened
10/17/2011	3:55:20 PM	BCl3 valve opened
10/17/2011	3:55:20 PM	SiCl4 pre valve opened
10/17/2011	3:55:20 PM	SiCl4 post valve opened
10/17/2011	3:55:20 PM	Bubbler valve opened
10/17/2011	3:55:20 PM	Helium MFC set to  0.000000
10/17/2011	3:55:20 PM	H2 MFC set to  500.000000
10/17/2011	3:55:20 PM	BCl3 MFC set to  2.500000
10/17/2011	3:55:20 PM	PHl3 MFC set to  0.000000
10/17/2011	3:55:20 PM	SiCl4 MFC set to  50.000000
10/17/2011	3:55:20 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	3:55:21 PM	Tube furnace set to 1000
10/17/2011	4:05:21 PM	Helium valve closed
10/17/2011	4:05:21 PM	BCl3 valve closed
10/17/2011	4:05:21 PM	PH3 valve closed
10/17/2011	4:05:21 PM	SiCl4 pre valve closed
10/17/2011	4:05:21 PM	SiCl4 post valve closed
10/17/2011	4:05:21 PM	Main Vac valve closed
10/17/2011	4:05:21 PM	Bypass valve closed
10/17/2011	4:05:21 PM	H2 valve opened
10/17/2011	4:05:21 PM	Bubbler valve opened
10/17/2011	4:05:21 PM	Helium MFC set to  0.000000
10/17/2011	4:05:21 PM	H2 MFC set to  500.000000
10/17/2011	4:05:21 PM	BCl3 MFC set to  0.000000
10/17/2011	4:05:21 PM	PHl3 MFC set to  0.000000
10/17/2011	4:05:21 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:05:21 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:05:21 PM	Tube furnace set to 750
10/17/2011	4:10:21 PM	H2 valve closed
10/17/2011	4:10:21 PM	BCl3 valve closed
10/17/2011	4:10:21 PM	PH3 valve closed
10/17/2011	4:10:21 PM	SiCl4 pre valve closed
10/17/2011	4:10:21 PM	SiCl4 post valve closed
10/17/2011	4:10:21 PM	Main Vac valve closed
10/17/2011	4:10:21 PM	Bypass valve closed
10/17/2011	4:10:21 PM	Helium valve opened
10/17/2011	4:10:21 PM	Bubbler valve opened
10/17/2011	4:10:21 PM	Helium MFC set to  500.000000
10/17/2011	4:10:21 PM	H2 MFC set to  0.000000
10/17/2011	4:10:21 PM	BCl3 MFC set to  0.000000
10/17/2011	4:10:21 PM	PHl3 MFC set to  0.000000
10/17/2011	4:10:21 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:10:21 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:10:21 PM	Tube furnace set to 0
10/17/2011	4:26:55 PM	Helium valve closed
10/17/2011	4:26:55 PM	H2 valve closed
10/17/2011	4:26:55 PM	BCl3 valve closed
10/17/2011	4:26:55 PM	PH3 valve closed
10/17/2011	4:26:55 PM	SiCl4 pre valve closed
10/17/2011	4:26:55 PM	SiCl4 post valve closed
10/17/2011	4:26:55 PM	Main Vac valve closed
10/17/2011	4:26:55 PM	Bypass valve closed
10/17/2011	4:26:55 PM	Bubbler valve closed
10/17/2011	4:26:55 PM	Helium MFC set to  0.000000
10/17/2011	4:26:55 PM	H2 MFC set to  0.000000
10/17/2011	4:26:55 PM	BCl3 MFC set to  0.000000
10/17/2011	4:26:55 PM	PHl3 MFC set to  0.000000
10/17/2011	4:26:55 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:26:55 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:26:55 PM	Tube furnace set to 0
10/17/2011	4:26:56 PM	Run finished at 4:26 PM
10/17/2011	4:35:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2011	4:35:46 PM	Recipe started at 4:35 PM
10/17/2011	4:35:46 PM	Helium valve closed
10/17/2011	4:35:46 PM	H2 valve closed
10/17/2011	4:35:46 PM	BCl3 valve closed
10/17/2011	4:35:46 PM	PH3 valve closed
10/17/2011	4:35:46 PM	SiCl4 pre valve closed
10/17/2011	4:35:46 PM	SiCl4 post valve closed
10/17/2011	4:35:46 PM	Main Vac valve closed
10/17/2011	4:35:46 PM	Bubbler valve closed
10/17/2011	4:35:46 PM	Bypass valve opened
10/17/2011	4:35:46 PM	Helium MFC set to  0.000000
10/17/2011	4:35:46 PM	H2 MFC set to  0.000000
10/17/2011	4:35:46 PM	BCl3 MFC set to  0.000000
10/17/2011	4:35:46 PM	PHl3 MFC set to  0.000000
10/17/2011	4:35:46 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:35:46 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:35:46 PM	Tube furnace set to 0
10/17/2011	4:36:57 PM	Helium valve closed
10/17/2011	4:36:57 PM	H2 valve closed
10/17/2011	4:36:57 PM	BCl3 valve closed
10/17/2011	4:36:57 PM	PH3 valve closed
10/17/2011	4:36:57 PM	SiCl4 pre valve closed
10/17/2011	4:36:57 PM	SiCl4 post valve closed
10/17/2011	4:36:57 PM	Main Vac valve closed
10/17/2011	4:36:57 PM	Bubbler valve closed
10/17/2011	4:36:57 PM	Bypass valve opened
10/17/2011	4:36:57 PM	Helium MFC set to  0.000000
10/17/2011	4:36:57 PM	H2 MFC set to  0.000000
10/17/2011	4:36:57 PM	BCl3 MFC set to  0.000000
10/17/2011	4:36:57 PM	PHl3 MFC set to  0.000000
10/17/2011	4:36:57 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:36:57 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:36:57 PM	Tube furnace set to 0
10/17/2011	4:37:57 PM	Helium valve closed
10/17/2011	4:37:57 PM	H2 valve closed
10/17/2011	4:37:57 PM	BCl3 valve closed
10/17/2011	4:37:57 PM	PH3 valve closed
10/17/2011	4:37:57 PM	SiCl4 pre valve closed
10/17/2011	4:37:57 PM	SiCl4 post valve closed
10/17/2011	4:37:57 PM	Bypass valve closed
10/17/2011	4:37:57 PM	Bubbler valve closed
10/17/2011	4:37:57 PM	Main Vac valve opened
10/17/2011	4:37:57 PM	Helium MFC set to  0.000000
10/17/2011	4:37:57 PM	H2 MFC set to  0.000000
10/17/2011	4:37:57 PM	BCl3 MFC set to  0.000000
10/17/2011	4:37:57 PM	PHl3 MFC set to  0.000000
10/17/2011	4:37:57 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:37:57 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:37:57 PM	Tube furnace set to 0
10/17/2011	4:37:58 PM	Run finished at 4:37 PM
10/17/2011	4:37:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2011	4:43:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/17/2011	4:43:38 PM	Recipe started at 4:43 PM
10/17/2011	4:43:38 PM	Helium valve closed
10/17/2011	4:43:38 PM	H2 valve closed
10/17/2011	4:43:38 PM	BCl3 valve closed
10/17/2011	4:43:38 PM	PH3 valve closed
10/17/2011	4:43:38 PM	SiCl4 pre valve closed
10/17/2011	4:43:38 PM	SiCl4 post valve closed
10/17/2011	4:43:38 PM	Main Vac valve closed
10/17/2011	4:43:38 PM	Bubbler valve closed
10/17/2011	4:43:38 PM	Bypass valve opened
10/17/2011	4:43:38 PM	Helium MFC set to  0.000000
10/17/2011	4:43:38 PM	H2 MFC set to  0.000000
10/17/2011	4:43:38 PM	BCl3 MFC set to  0.000000
10/17/2011	4:43:38 PM	PHl3 MFC set to  0.000000
10/17/2011	4:43:38 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:43:38 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:43:38 PM	Tube furnace set to 0
10/17/2011	4:43:38 PM	Helium valve closed
10/17/2011	4:43:38 PM	H2 valve closed
10/17/2011	4:43:38 PM	BCl3 valve closed
10/17/2011	4:43:38 PM	PH3 valve closed
10/17/2011	4:43:38 PM	SiCl4 pre valve closed
10/17/2011	4:43:38 PM	SiCl4 post valve closed
10/17/2011	4:43:38 PM	Main Vac valve closed
10/17/2011	4:43:38 PM	Bubbler valve closed
10/17/2011	4:43:38 PM	Bypass valve opened
10/17/2011	4:43:38 PM	Helium MFC set to  0.000000
10/17/2011	4:43:38 PM	H2 MFC set to  0.000000
10/17/2011	4:43:38 PM	BCl3 MFC set to  0.000000
10/17/2011	4:43:38 PM	PHl3 MFC set to  0.000000
10/17/2011	4:43:38 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:43:38 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:43:39 PM	Tube furnace set to 0
10/17/2011	4:43:39 PM	Helium valve closed
10/17/2011	4:43:39 PM	H2 valve closed
10/17/2011	4:43:39 PM	BCl3 valve closed
10/17/2011	4:43:39 PM	PH3 valve closed
10/17/2011	4:43:39 PM	SiCl4 pre valve closed
10/17/2011	4:43:39 PM	SiCl4 post valve closed
10/17/2011	4:43:39 PM	Bypass valve closed
10/17/2011	4:43:39 PM	Bubbler valve closed
10/17/2011	4:43:39 PM	Main Vac valve opened
10/17/2011	4:43:39 PM	Helium MFC set to  0.000000
10/17/2011	4:43:39 PM	H2 MFC set to  0.000000
10/17/2011	4:43:39 PM	BCl3 MFC set to  0.000000
10/17/2011	4:43:39 PM	PHl3 MFC set to  0.000000
10/17/2011	4:43:39 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:43:39 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:43:40 PM	Tube furnace set to 0
10/17/2011	4:43:42 PM	H2 valve closed
10/17/2011	4:43:42 PM	BCl3 valve closed
10/17/2011	4:43:42 PM	PH3 valve closed
10/17/2011	4:43:42 PM	SiCl4 pre valve closed
10/17/2011	4:43:42 PM	SiCl4 post valve closed
10/17/2011	4:43:42 PM	Bypass valve closed
10/17/2011	4:43:42 PM	Bubbler valve closed
10/17/2011	4:43:42 PM	Helium valve opened
10/17/2011	4:43:42 PM	Main Vac valve opened
10/17/2011	4:43:42 PM	Helium MFC set to  20.000000
10/17/2011	4:43:42 PM	H2 MFC set to  0.000000
10/17/2011	4:43:42 PM	BCl3 MFC set to  0.000000
10/17/2011	4:43:42 PM	PHl3 MFC set to  0.000000
10/17/2011	4:43:42 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:43:42 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:43:42 PM	Tube furnace set to 0
10/17/2011	4:44:13 PM	Helium valve closed
10/17/2011	4:44:13 PM	H2 valve closed
10/17/2011	4:44:13 PM	BCl3 valve closed
10/17/2011	4:44:13 PM	PH3 valve closed
10/17/2011	4:44:13 PM	SiCl4 pre valve closed
10/17/2011	4:44:13 PM	SiCl4 post valve closed
10/17/2011	4:44:13 PM	Bypass valve closed
10/17/2011	4:44:13 PM	Bubbler valve closed
10/17/2011	4:44:13 PM	Main Vac valve opened
10/17/2011	4:44:13 PM	Helium MFC set to  0.000000
10/17/2011	4:44:13 PM	H2 MFC set to  0.000000
10/17/2011	4:44:13 PM	BCl3 MFC set to  0.000000
10/17/2011	4:44:13 PM	PHl3 MFC set to  0.000000
10/17/2011	4:44:13 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:44:13 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:44:13 PM	Tube furnace set to 0
10/17/2011	4:44:43 PM	H2 valve closed
10/17/2011	4:44:43 PM	BCl3 valve closed
10/17/2011	4:44:43 PM	PH3 valve closed
10/17/2011	4:44:43 PM	SiCl4 pre valve closed
10/17/2011	4:44:43 PM	SiCl4 post valve closed
10/17/2011	4:44:43 PM	Bypass valve closed
10/17/2011	4:44:43 PM	Bubbler valve closed
10/17/2011	4:44:43 PM	Helium valve opened
10/17/2011	4:44:43 PM	Main Vac valve opened
10/17/2011	4:44:43 PM	Helium MFC set to  20.000000
10/17/2011	4:44:43 PM	H2 MFC set to  0.000000
10/17/2011	4:44:43 PM	BCl3 MFC set to  0.000000
10/17/2011	4:44:43 PM	PHl3 MFC set to  0.000000
10/17/2011	4:44:43 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:44:43 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:44:43 PM	Tube furnace set to 0
10/17/2011	4:45:13 PM	Helium valve closed
10/17/2011	4:45:13 PM	H2 valve closed
10/17/2011	4:45:13 PM	BCl3 valve closed
10/17/2011	4:45:13 PM	PH3 valve closed
10/17/2011	4:45:13 PM	SiCl4 pre valve closed
10/17/2011	4:45:13 PM	SiCl4 post valve closed
10/17/2011	4:45:13 PM	Bypass valve closed
10/17/2011	4:45:13 PM	Bubbler valve closed
10/17/2011	4:45:13 PM	Main Vac valve opened
10/17/2011	4:45:13 PM	Helium MFC set to  0.000000
10/17/2011	4:45:13 PM	H2 MFC set to  0.000000
10/17/2011	4:45:13 PM	BCl3 MFC set to  0.000000
10/17/2011	4:45:13 PM	PHl3 MFC set to  0.000000
10/17/2011	4:45:13 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:45:13 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:45:13 PM	Tube furnace set to 0
10/17/2011	4:45:43 PM	H2 valve closed
10/17/2011	4:45:43 PM	BCl3 valve closed
10/17/2011	4:45:43 PM	PH3 valve closed
10/17/2011	4:45:43 PM	SiCl4 pre valve closed
10/17/2011	4:45:43 PM	SiCl4 post valve closed
10/17/2011	4:45:43 PM	Bypass valve closed
10/17/2011	4:45:43 PM	Bubbler valve closed
10/17/2011	4:45:43 PM	Helium valve opened
10/17/2011	4:45:43 PM	Main Vac valve opened
10/17/2011	4:45:43 PM	Helium MFC set to  20.000000
10/17/2011	4:45:43 PM	H2 MFC set to  0.000000
10/17/2011	4:45:43 PM	BCl3 MFC set to  0.000000
10/17/2011	4:45:43 PM	PHl3 MFC set to  0.000000
10/17/2011	4:45:43 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:45:43 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:45:43 PM	Tube furnace set to 0
10/17/2011	4:46:13 PM	Helium valve closed
10/17/2011	4:46:13 PM	H2 valve closed
10/17/2011	4:46:13 PM	BCl3 valve closed
10/17/2011	4:46:13 PM	PH3 valve closed
10/17/2011	4:46:13 PM	SiCl4 pre valve closed
10/17/2011	4:46:13 PM	SiCl4 post valve closed
10/17/2011	4:46:13 PM	Bypass valve closed
10/17/2011	4:46:13 PM	Bubbler valve closed
10/17/2011	4:46:13 PM	Main Vac valve opened
10/17/2011	4:46:13 PM	Helium MFC set to  0.000000
10/17/2011	4:46:13 PM	H2 MFC set to  0.000000
10/17/2011	4:46:13 PM	BCl3 MFC set to  0.000000
10/17/2011	4:46:13 PM	PHl3 MFC set to  0.000000
10/17/2011	4:46:13 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:46:13 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:46:13 PM	Tube furnace set to 0
10/17/2011	4:46:43 PM	H2 valve closed
10/17/2011	4:46:43 PM	BCl3 valve closed
10/17/2011	4:46:44 PM	PH3 valve closed
10/17/2011	4:46:44 PM	SiCl4 pre valve closed
10/17/2011	4:46:44 PM	SiCl4 post valve closed
10/17/2011	4:46:44 PM	Bypass valve closed
10/17/2011	4:46:44 PM	Bubbler valve closed
10/17/2011	4:46:44 PM	Helium valve opened
10/17/2011	4:46:44 PM	Main Vac valve opened
10/17/2011	4:46:44 PM	Helium MFC set to  20.000000
10/17/2011	4:46:44 PM	H2 MFC set to  0.000000
10/17/2011	4:46:44 PM	BCl3 MFC set to  0.000000
10/17/2011	4:46:44 PM	PHl3 MFC set to  0.000000
10/17/2011	4:46:44 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:46:44 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:46:44 PM	Tube furnace set to 0
10/17/2011	4:47:14 PM	Helium valve closed
10/17/2011	4:47:14 PM	H2 valve closed
10/17/2011	4:47:14 PM	BCl3 valve closed
10/17/2011	4:47:14 PM	PH3 valve closed
10/17/2011	4:47:14 PM	SiCl4 pre valve closed
10/17/2011	4:47:14 PM	SiCl4 post valve closed
10/17/2011	4:47:14 PM	Bypass valve closed
10/17/2011	4:47:14 PM	Bubbler valve closed
10/17/2011	4:47:14 PM	Main Vac valve opened
10/17/2011	4:47:14 PM	Helium MFC set to  0.000000
10/17/2011	4:47:14 PM	H2 MFC set to  0.000000
10/17/2011	4:47:14 PM	BCl3 MFC set to  0.000000
10/17/2011	4:47:14 PM	PHl3 MFC set to  0.000000
10/17/2011	4:47:14 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:47:14 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:47:14 PM	Tube furnace set to 0
10/17/2011	4:47:44 PM	H2 valve closed
10/17/2011	4:47:44 PM	BCl3 valve closed
10/17/2011	4:47:44 PM	PH3 valve closed
10/17/2011	4:47:44 PM	SiCl4 pre valve closed
10/17/2011	4:47:44 PM	SiCl4 post valve closed
10/17/2011	4:47:44 PM	Bypass valve closed
10/17/2011	4:47:44 PM	Bubbler valve closed
10/17/2011	4:47:44 PM	Helium valve opened
10/17/2011	4:47:44 PM	Main Vac valve opened
10/17/2011	4:47:44 PM	Helium MFC set to  20.000000
10/17/2011	4:47:44 PM	H2 MFC set to  0.000000
10/17/2011	4:47:44 PM	BCl3 MFC set to  0.000000
10/17/2011	4:47:44 PM	PHl3 MFC set to  0.000000
10/17/2011	4:47:44 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:47:44 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:47:44 PM	Tube furnace set to 0
10/17/2011	4:48:14 PM	Helium valve closed
10/17/2011	4:48:14 PM	H2 valve closed
10/17/2011	4:48:14 PM	BCl3 valve closed
10/17/2011	4:48:14 PM	PH3 valve closed
10/17/2011	4:48:14 PM	SiCl4 pre valve closed
10/17/2011	4:48:14 PM	SiCl4 post valve closed
10/17/2011	4:48:14 PM	Bypass valve closed
10/17/2011	4:48:14 PM	Bubbler valve closed
10/17/2011	4:48:14 PM	Main Vac valve opened
10/17/2011	4:48:14 PM	Helium MFC set to  0.000000
10/17/2011	4:48:14 PM	H2 MFC set to  0.000000
10/17/2011	4:48:14 PM	BCl3 MFC set to  0.000000
10/17/2011	4:48:14 PM	PHl3 MFC set to  0.000000
10/17/2011	4:48:14 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:48:14 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:48:14 PM	Tube furnace set to 0
10/17/2011	4:48:44 PM	H2 valve closed
10/17/2011	4:48:44 PM	BCl3 valve closed
10/17/2011	4:48:44 PM	PH3 valve closed
10/17/2011	4:48:44 PM	SiCl4 pre valve closed
10/17/2011	4:48:44 PM	SiCl4 post valve closed
10/17/2011	4:48:44 PM	Bypass valve closed
10/17/2011	4:48:44 PM	Bubbler valve closed
10/17/2011	4:48:44 PM	Helium valve opened
10/17/2011	4:48:44 PM	Main Vac valve opened
10/17/2011	4:48:44 PM	Helium MFC set to  20.000000
10/17/2011	4:48:44 PM	H2 MFC set to  0.000000
10/17/2011	4:48:44 PM	BCl3 MFC set to  0.000000
10/17/2011	4:48:44 PM	PHl3 MFC set to  0.000000
10/17/2011	4:48:44 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:48:44 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:48:44 PM	Tube furnace set to 0
10/17/2011	4:49:14 PM	Helium valve closed
10/17/2011	4:49:14 PM	H2 valve closed
10/17/2011	4:49:14 PM	BCl3 valve closed
10/17/2011	4:49:14 PM	PH3 valve closed
10/17/2011	4:49:14 PM	SiCl4 pre valve closed
10/17/2011	4:49:14 PM	SiCl4 post valve closed
10/17/2011	4:49:14 PM	Bypass valve closed
10/17/2011	4:49:14 PM	Bubbler valve closed
10/17/2011	4:49:14 PM	Main Vac valve opened
10/17/2011	4:49:14 PM	Helium MFC set to  0.000000
10/17/2011	4:49:14 PM	H2 MFC set to  0.000000
10/17/2011	4:49:15 PM	BCl3 MFC set to  0.000000
10/17/2011	4:49:15 PM	PHl3 MFC set to  0.000000
10/17/2011	4:49:15 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:49:15 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:49:15 PM	Tube furnace set to 0
10/17/2011	4:49:45 PM	H2 valve closed
10/17/2011	4:49:45 PM	BCl3 valve closed
10/17/2011	4:49:45 PM	PH3 valve closed
10/17/2011	4:49:45 PM	SiCl4 pre valve closed
10/17/2011	4:49:45 PM	SiCl4 post valve closed
10/17/2011	4:49:45 PM	Bypass valve closed
10/17/2011	4:49:45 PM	Bubbler valve closed
10/17/2011	4:49:45 PM	Helium valve opened
10/17/2011	4:49:45 PM	Main Vac valve opened
10/17/2011	4:49:45 PM	Helium MFC set to  20.000000
10/17/2011	4:49:45 PM	H2 MFC set to  0.000000
10/17/2011	4:49:45 PM	BCl3 MFC set to  0.000000
10/17/2011	4:49:45 PM	PHl3 MFC set to  0.000000
10/17/2011	4:49:45 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:49:45 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:49:45 PM	Tube furnace set to 0
10/17/2011	4:50:15 PM	Helium valve closed
10/17/2011	4:50:15 PM	H2 valve closed
10/17/2011	4:50:15 PM	BCl3 valve closed
10/17/2011	4:50:15 PM	PH3 valve closed
10/17/2011	4:50:15 PM	SiCl4 pre valve closed
10/17/2011	4:50:15 PM	SiCl4 post valve closed
10/17/2011	4:50:15 PM	Bypass valve closed
10/17/2011	4:50:15 PM	Bubbler valve closed
10/17/2011	4:50:15 PM	Main Vac valve opened
10/17/2011	4:50:15 PM	Helium MFC set to  0.000000
10/17/2011	4:50:15 PM	H2 MFC set to  0.000000
10/17/2011	4:50:15 PM	BCl3 MFC set to  0.000000
10/17/2011	4:50:15 PM	PHl3 MFC set to  0.000000
10/17/2011	4:50:15 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:50:15 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:50:15 PM	Tube furnace set to 0
10/17/2011	4:50:45 PM	H2 valve closed
10/17/2011	4:50:45 PM	BCl3 valve closed
10/17/2011	4:50:45 PM	PH3 valve closed
10/17/2011	4:50:45 PM	SiCl4 pre valve closed
10/17/2011	4:50:45 PM	SiCl4 post valve closed
10/17/2011	4:50:45 PM	Bypass valve closed
10/17/2011	4:50:45 PM	Bubbler valve closed
10/17/2011	4:50:45 PM	Helium valve opened
10/17/2011	4:50:45 PM	Main Vac valve opened
10/17/2011	4:50:45 PM	Helium MFC set to  20.000000
10/17/2011	4:50:45 PM	H2 MFC set to  0.000000
10/17/2011	4:50:45 PM	BCl3 MFC set to  0.000000
10/17/2011	4:50:45 PM	PHl3 MFC set to  0.000000
10/17/2011	4:50:45 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:50:45 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:50:45 PM	Tube furnace set to 0
10/17/2011	4:51:15 PM	Helium valve closed
10/17/2011	4:51:15 PM	H2 valve closed
10/17/2011	4:51:15 PM	BCl3 valve closed
10/17/2011	4:51:15 PM	PH3 valve closed
10/17/2011	4:51:15 PM	SiCl4 pre valve closed
10/17/2011	4:51:15 PM	SiCl4 post valve closed
10/17/2011	4:51:15 PM	Bypass valve closed
10/17/2011	4:51:15 PM	Bubbler valve closed
10/17/2011	4:51:15 PM	Main Vac valve opened
10/17/2011	4:51:15 PM	Helium MFC set to  0.000000
10/17/2011	4:51:15 PM	H2 MFC set to  0.000000
10/17/2011	4:51:15 PM	BCl3 MFC set to  0.000000
10/17/2011	4:51:15 PM	PHl3 MFC set to  0.000000
10/17/2011	4:51:15 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:51:15 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:51:15 PM	Tube furnace set to 0
10/17/2011	4:51:45 PM	H2 valve closed
10/17/2011	4:51:45 PM	BCl3 valve closed
10/17/2011	4:51:45 PM	PH3 valve closed
10/17/2011	4:51:45 PM	SiCl4 pre valve closed
10/17/2011	4:51:45 PM	SiCl4 post valve closed
10/17/2011	4:51:45 PM	Bypass valve closed
10/17/2011	4:51:45 PM	Bubbler valve closed
10/17/2011	4:51:45 PM	Helium valve opened
10/17/2011	4:51:45 PM	Main Vac valve opened
10/17/2011	4:51:45 PM	Helium MFC set to  20.000000
10/17/2011	4:51:45 PM	H2 MFC set to  0.000000
10/17/2011	4:51:45 PM	BCl3 MFC set to  0.000000
10/17/2011	4:51:45 PM	PHl3 MFC set to  0.000000
10/17/2011	4:51:45 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:51:45 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:51:46 PM	Tube furnace set to 0
10/17/2011	4:52:16 PM	Helium valve closed
10/17/2011	4:52:16 PM	H2 valve closed
10/17/2011	4:52:16 PM	BCl3 valve closed
10/17/2011	4:52:16 PM	PH3 valve closed
10/17/2011	4:52:16 PM	SiCl4 pre valve closed
10/17/2011	4:52:16 PM	SiCl4 post valve closed
10/17/2011	4:52:16 PM	Bypass valve closed
10/17/2011	4:52:16 PM	Bubbler valve closed
10/17/2011	4:52:16 PM	Main Vac valve opened
10/17/2011	4:52:16 PM	Helium MFC set to  0.000000
10/17/2011	4:52:16 PM	H2 MFC set to  0.000000
10/17/2011	4:52:16 PM	BCl3 MFC set to  0.000000
10/17/2011	4:52:16 PM	PHl3 MFC set to  0.000000
10/17/2011	4:52:16 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:52:16 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:52:16 PM	Tube furnace set to 0
10/17/2011	4:52:46 PM	H2 valve closed
10/17/2011	4:52:46 PM	BCl3 valve closed
10/17/2011	4:52:46 PM	PH3 valve closed
10/17/2011	4:52:46 PM	SiCl4 pre valve closed
10/17/2011	4:52:46 PM	SiCl4 post valve closed
10/17/2011	4:52:46 PM	Bypass valve closed
10/17/2011	4:52:46 PM	Bubbler valve closed
10/17/2011	4:52:46 PM	Helium valve opened
10/17/2011	4:52:46 PM	Main Vac valve opened
10/17/2011	4:52:46 PM	Helium MFC set to  20.000000
10/17/2011	4:52:46 PM	H2 MFC set to  0.000000
10/17/2011	4:52:46 PM	BCl3 MFC set to  0.000000
10/17/2011	4:52:46 PM	PHl3 MFC set to  0.000000
10/17/2011	4:52:46 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:52:46 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:52:46 PM	Tube furnace set to 0
10/17/2011	4:53:16 PM	Helium valve closed
10/17/2011	4:53:16 PM	H2 valve closed
10/17/2011	4:53:16 PM	BCl3 valve closed
10/17/2011	4:53:16 PM	PH3 valve closed
10/17/2011	4:53:16 PM	SiCl4 pre valve closed
10/17/2011	4:53:16 PM	SiCl4 post valve closed
10/17/2011	4:53:16 PM	Bypass valve closed
10/17/2011	4:53:16 PM	Bubbler valve closed
10/17/2011	4:53:16 PM	Main Vac valve opened
10/17/2011	4:53:16 PM	Helium MFC set to  0.000000
10/17/2011	4:53:16 PM	H2 MFC set to  0.000000
10/17/2011	4:53:16 PM	BCl3 MFC set to  0.000000
10/17/2011	4:53:16 PM	PHl3 MFC set to  0.000000
10/17/2011	4:53:16 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:53:16 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:53:16 PM	Tube furnace set to 0
10/17/2011	4:53:17 PM	Run finished at 4:53 PM
10/17/2011	4:53:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/17/2011	4:54:31 PM	Main Vac valve closed
10/17/2011	4:54:45 PM	Main Vac valve opened
10/17/2011	4:56:00 PM	Main Vac valve closed
10/17/2011	4:56:14 PM	Main Vac valve opened
10/17/2011	4:56:52 PM	Recipe started at 4:56 PM
10/17/2011	4:56:52 PM	Helium valve closed
10/17/2011	4:56:52 PM	H2 valve closed
10/17/2011	4:56:52 PM	BCl3 valve closed
10/17/2011	4:56:52 PM	PH3 valve closed
10/17/2011	4:56:52 PM	SiCl4 pre valve closed
10/17/2011	4:56:52 PM	SiCl4 post valve closed
10/17/2011	4:56:52 PM	Main Vac valve closed
10/17/2011	4:56:52 PM	Bypass valve closed
10/17/2011	4:56:52 PM	Bubbler valve closed
10/17/2011	4:56:52 PM	Helium MFC set to  0.000000
10/17/2011	4:56:52 PM	H2 MFC set to  0.000000
10/17/2011	4:56:52 PM	BCl3 MFC set to  0.000000
10/17/2011	4:56:52 PM	PHl3 MFC set to  0.000000
10/17/2011	4:56:52 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:56:52 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:56:52 PM	Tube furnace set to 0
10/17/2011	4:56:55 PM	Helium valve closed
10/17/2011	4:56:55 PM	BCl3 valve closed
10/17/2011	4:56:55 PM	PH3 valve closed
10/17/2011	4:56:55 PM	SiCl4 pre valve closed
10/17/2011	4:56:55 PM	SiCl4 post valve closed
10/17/2011	4:56:55 PM	Main Vac valve closed
10/17/2011	4:56:55 PM	Bypass valve closed
10/17/2011	4:56:55 PM	Bubbler valve closed
10/17/2011	4:56:55 PM	H2 valve opened
10/17/2011	4:56:55 PM	Helium MFC set to  0.000000
10/17/2011	4:56:55 PM	H2 MFC set to  500.000000
10/17/2011	4:56:55 PM	BCl3 MFC set to  0.000000
10/17/2011	4:56:55 PM	PHl3 MFC set to  0.000000
10/17/2011	4:56:55 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:56:55 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:56:56 PM	Tube furnace set to 0
10/17/2011	4:57:59 PM	Helium valve closed
10/17/2011	4:57:59 PM	BCl3 valve closed
10/17/2011	4:57:59 PM	PH3 valve closed
10/17/2011	4:57:59 PM	SiCl4 pre valve closed
10/17/2011	4:57:59 PM	SiCl4 post valve closed
10/17/2011	4:57:59 PM	Main Vac valve closed
10/17/2011	4:57:59 PM	Bypass valve closed
10/17/2011	4:57:59 PM	H2 valve opened
10/17/2011	4:57:59 PM	Bubbler valve opened
10/17/2011	4:57:59 PM	Helium MFC set to  0.000000
10/17/2011	4:57:59 PM	H2 MFC set to  500.000000
10/17/2011	4:57:59 PM	BCl3 MFC set to  0.000000
10/17/2011	4:57:59 PM	PHl3 MFC set to  0.000000
10/17/2011	4:57:59 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:57:59 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:57:59 PM	Tube furnace set to 0
10/17/2011	4:58:00 PM	Helium valve closed
10/17/2011	4:58:00 PM	BCl3 valve closed
10/17/2011	4:58:00 PM	PH3 valve closed
10/17/2011	4:58:00 PM	SiCl4 pre valve closed
10/17/2011	4:58:00 PM	SiCl4 post valve closed
10/17/2011	4:58:00 PM	Main Vac valve closed
10/17/2011	4:58:00 PM	Bypass valve closed
10/17/2011	4:58:00 PM	H2 valve opened
10/17/2011	4:58:00 PM	Bubbler valve opened
10/17/2011	4:58:00 PM	Helium MFC set to  0.000000
10/17/2011	4:58:00 PM	H2 MFC set to  500.000000
10/17/2011	4:58:00 PM	BCl3 MFC set to  0.000000
10/17/2011	4:58:00 PM	PHl3 MFC set to  0.000000
10/17/2011	4:58:00 PM	SiCl4 MFC set to  0.000000
10/17/2011	4:58:00 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	4:58:00 PM	Tube furnace set to 1000
10/17/2011	5:18:00 PM	Helium valve closed
10/17/2011	5:18:00 PM	PH3 valve closed
10/17/2011	5:18:00 PM	Main Vac valve closed
10/17/2011	5:18:00 PM	Bypass valve closed
10/17/2011	5:18:00 PM	H2 valve opened
10/17/2011	5:18:00 PM	BCl3 valve opened
10/17/2011	5:18:00 PM	SiCl4 pre valve opened
10/17/2011	5:18:00 PM	SiCl4 post valve opened
10/17/2011	5:18:00 PM	Bubbler valve opened
10/17/2011	5:18:00 PM	Helium MFC set to  0.000000
10/17/2011	5:18:00 PM	H2 MFC set to  500.000000
10/17/2011	5:18:00 PM	BCl3 MFC set to  2.500000
10/17/2011	5:18:00 PM	PHl3 MFC set to  0.000000
10/17/2011	5:18:00 PM	SiCl4 MFC set to  50.000000
10/17/2011	5:18:00 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	5:18:00 PM	Tube furnace set to 1000
10/17/2011	5:28:00 PM	Helium valve closed
10/17/2011	5:28:00 PM	BCl3 valve closed
10/17/2011	5:28:00 PM	PH3 valve closed
10/17/2011	5:28:00 PM	SiCl4 pre valve closed
10/17/2011	5:28:00 PM	SiCl4 post valve closed
10/17/2011	5:28:00 PM	Main Vac valve closed
10/17/2011	5:28:00 PM	Bypass valve closed
10/17/2011	5:28:00 PM	H2 valve opened
10/17/2011	5:28:00 PM	Bubbler valve opened
10/17/2011	5:28:00 PM	Helium MFC set to  0.000000
10/17/2011	5:28:00 PM	H2 MFC set to  500.000000
10/17/2011	5:28:00 PM	BCl3 MFC set to  0.000000
10/17/2011	5:28:00 PM	PHl3 MFC set to  0.000000
10/17/2011	5:28:00 PM	SiCl4 MFC set to  0.000000
10/17/2011	5:28:00 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	5:28:01 PM	Tube furnace set to 750
10/17/2011	5:33:01 PM	H2 valve closed
10/17/2011	5:33:01 PM	BCl3 valve closed
10/17/2011	5:33:01 PM	PH3 valve closed
10/17/2011	5:33:01 PM	SiCl4 pre valve closed
10/17/2011	5:33:01 PM	SiCl4 post valve closed
10/17/2011	5:33:01 PM	Main Vac valve closed
10/17/2011	5:33:01 PM	Bypass valve closed
10/17/2011	5:33:01 PM	Helium valve opened
10/17/2011	5:33:01 PM	Bubbler valve opened
10/17/2011	5:33:01 PM	Helium MFC set to  500.000000
10/17/2011	5:33:01 PM	H2 MFC set to  0.000000
10/17/2011	5:33:01 PM	BCl3 MFC set to  0.000000
10/17/2011	5:33:01 PM	PHl3 MFC set to  0.000000
10/17/2011	5:33:01 PM	SiCl4 MFC set to  0.000000
10/17/2011	5:33:01 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	5:33:01 PM	Tube furnace set to 0
10/17/2011	5:53:01 PM	Helium valve closed
10/17/2011	5:53:01 PM	H2 valve closed
10/17/2011	5:53:01 PM	BCl3 valve closed
10/17/2011	5:53:01 PM	PH3 valve closed
10/17/2011	5:53:01 PM	SiCl4 pre valve closed
10/17/2011	5:53:01 PM	SiCl4 post valve closed
10/17/2011	5:53:01 PM	Main Vac valve closed
10/17/2011	5:53:01 PM	Bypass valve closed
10/17/2011	5:53:01 PM	Bubbler valve closed
10/17/2011	5:53:01 PM	Helium MFC set to  0.000000
10/17/2011	5:53:01 PM	H2 MFC set to  0.000000
10/17/2011	5:53:01 PM	BCl3 MFC set to  0.000000
10/17/2011	5:53:01 PM	PHl3 MFC set to  0.000000
10/17/2011	5:53:01 PM	SiCl4 MFC set to  0.000000
10/17/2011	5:53:01 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	5:53:01 PM	Tube furnace set to 0
10/17/2011	5:53:02 PM	Run finished at 5:53 PM
10/17/2011	5:59:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2011	5:59:58 PM	Recipe started at 5:59 PM
10/17/2011	5:59:58 PM	Helium valve closed
10/17/2011	5:59:58 PM	H2 valve closed
10/17/2011	5:59:58 PM	BCl3 valve closed
10/17/2011	5:59:58 PM	PH3 valve closed
10/17/2011	5:59:58 PM	SiCl4 pre valve closed
10/17/2011	5:59:58 PM	SiCl4 post valve closed
10/17/2011	5:59:58 PM	Main Vac valve closed
10/17/2011	5:59:58 PM	Bubbler valve closed
10/17/2011	5:59:58 PM	Bypass valve opened
10/17/2011	5:59:58 PM	Helium MFC set to  0.000000
10/17/2011	5:59:58 PM	H2 MFC set to  0.000000
10/17/2011	5:59:58 PM	BCl3 MFC set to  0.000000
10/17/2011	5:59:58 PM	PHl3 MFC set to  0.000000
10/17/2011	5:59:58 PM	SiCl4 MFC set to  0.000000
10/17/2011	5:59:58 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	5:59:58 PM	Tube furnace set to 0
10/17/2011	6:01:04 PM	Helium valve closed
10/17/2011	6:01:04 PM	H2 valve closed
10/17/2011	6:01:04 PM	BCl3 valve closed
10/17/2011	6:01:04 PM	PH3 valve closed
10/17/2011	6:01:04 PM	SiCl4 pre valve closed
10/17/2011	6:01:04 PM	SiCl4 post valve closed
10/17/2011	6:01:04 PM	Main Vac valve closed
10/17/2011	6:01:04 PM	Bubbler valve closed
10/17/2011	6:01:04 PM	Bypass valve opened
10/17/2011	6:01:04 PM	Helium MFC set to  0.000000
10/17/2011	6:01:04 PM	H2 MFC set to  0.000000
10/17/2011	6:01:04 PM	BCl3 MFC set to  0.000000
10/17/2011	6:01:04 PM	PHl3 MFC set to  0.000000
10/17/2011	6:01:04 PM	SiCl4 MFC set to  0.000000
10/17/2011	6:01:04 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	6:01:04 PM	Tube furnace set to 0
10/17/2011	6:02:04 PM	Helium valve closed
10/17/2011	6:02:04 PM	H2 valve closed
10/17/2011	6:02:04 PM	BCl3 valve closed
10/17/2011	6:02:04 PM	PH3 valve closed
10/17/2011	6:02:04 PM	SiCl4 pre valve closed
10/17/2011	6:02:04 PM	SiCl4 post valve closed
10/17/2011	6:02:04 PM	Bypass valve closed
10/17/2011	6:02:04 PM	Bubbler valve closed
10/17/2011	6:02:04 PM	Main Vac valve opened
10/17/2011	6:02:04 PM	Helium MFC set to  0.000000
10/17/2011	6:02:04 PM	H2 MFC set to  0.000000
10/17/2011	6:02:04 PM	BCl3 MFC set to  0.000000
10/17/2011	6:02:04 PM	PHl3 MFC set to  0.000000
10/17/2011	6:02:04 PM	SiCl4 MFC set to  0.000000
10/17/2011	6:02:04 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	6:02:05 PM	Tube furnace set to 0
10/17/2011	6:02:06 PM	Run finished at 6:02 PM
10/17/2011	6:02:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2011	7:11:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/17/2011	7:11:54 PM	Recipe started at 7:11 PM
10/17/2011	7:11:54 PM	Helium valve closed
10/17/2011	7:11:54 PM	H2 valve closed
10/17/2011	7:11:54 PM	BCl3 valve closed
10/17/2011	7:11:54 PM	PH3 valve closed
10/17/2011	7:11:54 PM	SiCl4 pre valve closed
10/17/2011	7:11:54 PM	SiCl4 post valve closed
10/17/2011	7:11:54 PM	Main Vac valve closed
10/17/2011	7:11:54 PM	Bubbler valve closed
10/17/2011	7:11:54 PM	Bypass valve opened
10/17/2011	7:11:54 PM	Helium MFC set to  0.000000
10/17/2011	7:11:54 PM	H2 MFC set to  0.000000
10/17/2011	7:11:54 PM	BCl3 MFC set to  0.000000
10/17/2011	7:11:54 PM	PHl3 MFC set to  0.000000
10/17/2011	7:11:54 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:11:54 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:11:54 PM	Tube furnace set to 0
10/17/2011	7:11:54 PM	Helium valve closed
10/17/2011	7:11:54 PM	H2 valve closed
10/17/2011	7:11:54 PM	BCl3 valve closed
10/17/2011	7:11:54 PM	PH3 valve closed
10/17/2011	7:11:54 PM	SiCl4 pre valve closed
10/17/2011	7:11:54 PM	SiCl4 post valve closed
10/17/2011	7:11:54 PM	Main Vac valve closed
10/17/2011	7:11:54 PM	Bubbler valve closed
10/17/2011	7:11:54 PM	Bypass valve opened
10/17/2011	7:11:54 PM	Helium MFC set to  0.000000
10/17/2011	7:11:54 PM	H2 MFC set to  0.000000
10/17/2011	7:11:54 PM	BCl3 MFC set to  0.000000
10/17/2011	7:11:54 PM	PHl3 MFC set to  0.000000
10/17/2011	7:11:54 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:11:54 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:11:54 PM	Tube furnace set to 0
10/17/2011	7:11:55 PM	Helium valve closed
10/17/2011	7:11:55 PM	H2 valve closed
10/17/2011	7:11:55 PM	BCl3 valve closed
10/17/2011	7:11:55 PM	PH3 valve closed
10/17/2011	7:11:55 PM	SiCl4 pre valve closed
10/17/2011	7:11:55 PM	SiCl4 post valve closed
10/17/2011	7:11:55 PM	Bypass valve closed
10/17/2011	7:11:55 PM	Bubbler valve closed
10/17/2011	7:11:55 PM	Main Vac valve opened
10/17/2011	7:11:55 PM	Helium MFC set to  0.000000
10/17/2011	7:11:55 PM	H2 MFC set to  0.000000
10/17/2011	7:11:55 PM	BCl3 MFC set to  0.000000
10/17/2011	7:11:55 PM	PHl3 MFC set to  0.000000
10/17/2011	7:11:55 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:11:55 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:11:55 PM	Tube furnace set to 0
10/17/2011	7:11:56 PM	H2 valve closed
10/17/2011	7:11:56 PM	BCl3 valve closed
10/17/2011	7:11:56 PM	PH3 valve closed
10/17/2011	7:11:56 PM	SiCl4 pre valve closed
10/17/2011	7:11:56 PM	SiCl4 post valve closed
10/17/2011	7:11:56 PM	Bypass valve closed
10/17/2011	7:11:56 PM	Bubbler valve closed
10/17/2011	7:11:56 PM	Helium valve opened
10/17/2011	7:11:56 PM	Main Vac valve opened
10/17/2011	7:11:56 PM	Helium MFC set to  20.000000
10/17/2011	7:11:56 PM	H2 MFC set to  0.000000
10/17/2011	7:11:56 PM	BCl3 MFC set to  0.000000
10/17/2011	7:11:56 PM	PHl3 MFC set to  0.000000
10/17/2011	7:11:56 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:11:56 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:11:56 PM	Tube furnace set to 0
10/17/2011	7:12:26 PM	Helium valve closed
10/17/2011	7:12:26 PM	H2 valve closed
10/17/2011	7:12:26 PM	BCl3 valve closed
10/17/2011	7:12:26 PM	PH3 valve closed
10/17/2011	7:12:26 PM	SiCl4 pre valve closed
10/17/2011	7:12:26 PM	SiCl4 post valve closed
10/17/2011	7:12:26 PM	Bypass valve closed
10/17/2011	7:12:26 PM	Bubbler valve closed
10/17/2011	7:12:26 PM	Main Vac valve opened
10/17/2011	7:12:26 PM	Helium MFC set to  0.000000
10/17/2011	7:12:26 PM	H2 MFC set to  0.000000
10/17/2011	7:12:26 PM	BCl3 MFC set to  0.000000
10/17/2011	7:12:26 PM	PHl3 MFC set to  0.000000
10/17/2011	7:12:26 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:12:26 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:12:26 PM	Tube furnace set to 0
10/17/2011	7:12:56 PM	H2 valve closed
10/17/2011	7:12:56 PM	BCl3 valve closed
10/17/2011	7:12:56 PM	PH3 valve closed
10/17/2011	7:12:56 PM	SiCl4 pre valve closed
10/17/2011	7:12:56 PM	SiCl4 post valve closed
10/17/2011	7:12:56 PM	Bypass valve closed
10/17/2011	7:12:56 PM	Bubbler valve closed
10/17/2011	7:12:56 PM	Helium valve opened
10/17/2011	7:12:56 PM	Main Vac valve opened
10/17/2011	7:12:56 PM	Helium MFC set to  20.000000
10/17/2011	7:12:56 PM	H2 MFC set to  0.000000
10/17/2011	7:12:56 PM	BCl3 MFC set to  0.000000
10/17/2011	7:12:56 PM	PHl3 MFC set to  0.000000
10/17/2011	7:12:56 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:12:56 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:12:56 PM	Tube furnace set to 0
10/17/2011	7:13:26 PM	Helium valve closed
10/17/2011	7:13:26 PM	H2 valve closed
10/17/2011	7:13:26 PM	BCl3 valve closed
10/17/2011	7:13:26 PM	PH3 valve closed
10/17/2011	7:13:26 PM	SiCl4 pre valve closed
10/17/2011	7:13:26 PM	SiCl4 post valve closed
10/17/2011	7:13:26 PM	Bypass valve closed
10/17/2011	7:13:26 PM	Bubbler valve closed
10/17/2011	7:13:26 PM	Main Vac valve opened
10/17/2011	7:13:26 PM	Helium MFC set to  0.000000
10/17/2011	7:13:26 PM	H2 MFC set to  0.000000
10/17/2011	7:13:26 PM	BCl3 MFC set to  0.000000
10/17/2011	7:13:26 PM	PHl3 MFC set to  0.000000
10/17/2011	7:13:26 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:13:26 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:13:27 PM	Tube furnace set to 0
10/17/2011	7:13:57 PM	H2 valve closed
10/17/2011	7:13:57 PM	BCl3 valve closed
10/17/2011	7:13:57 PM	PH3 valve closed
10/17/2011	7:13:57 PM	SiCl4 pre valve closed
10/17/2011	7:13:57 PM	SiCl4 post valve closed
10/17/2011	7:13:57 PM	Bypass valve closed
10/17/2011	7:13:57 PM	Bubbler valve closed
10/17/2011	7:13:57 PM	Helium valve opened
10/17/2011	7:13:57 PM	Main Vac valve opened
10/17/2011	7:13:57 PM	Helium MFC set to  20.000000
10/17/2011	7:13:57 PM	H2 MFC set to  0.000000
10/17/2011	7:13:57 PM	BCl3 MFC set to  0.000000
10/17/2011	7:13:57 PM	PHl3 MFC set to  0.000000
10/17/2011	7:13:57 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:13:57 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:13:57 PM	Tube furnace set to 0
10/17/2011	7:14:27 PM	Helium valve closed
10/17/2011	7:14:27 PM	H2 valve closed
10/17/2011	7:14:27 PM	BCl3 valve closed
10/17/2011	7:14:27 PM	PH3 valve closed
10/17/2011	7:14:27 PM	SiCl4 pre valve closed
10/17/2011	7:14:27 PM	SiCl4 post valve closed
10/17/2011	7:14:27 PM	Bypass valve closed
10/17/2011	7:14:27 PM	Bubbler valve closed
10/17/2011	7:14:27 PM	Main Vac valve opened
10/17/2011	7:14:27 PM	Helium MFC set to  0.000000
10/17/2011	7:14:27 PM	H2 MFC set to  0.000000
10/17/2011	7:14:27 PM	BCl3 MFC set to  0.000000
10/17/2011	7:14:27 PM	PHl3 MFC set to  0.000000
10/17/2011	7:14:27 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:14:27 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:14:27 PM	Tube furnace set to 0
10/17/2011	7:14:57 PM	H2 valve closed
10/17/2011	7:14:57 PM	BCl3 valve closed
10/17/2011	7:14:57 PM	PH3 valve closed
10/17/2011	7:14:57 PM	SiCl4 pre valve closed
10/17/2011	7:14:57 PM	SiCl4 post valve closed
10/17/2011	7:14:57 PM	Bypass valve closed
10/17/2011	7:14:57 PM	Bubbler valve closed
10/17/2011	7:14:57 PM	Helium valve opened
10/17/2011	7:14:57 PM	Main Vac valve opened
10/17/2011	7:14:57 PM	Helium MFC set to  20.000000
10/17/2011	7:14:57 PM	H2 MFC set to  0.000000
10/17/2011	7:14:57 PM	BCl3 MFC set to  0.000000
10/17/2011	7:14:57 PM	PHl3 MFC set to  0.000000
10/17/2011	7:14:57 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:14:57 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:14:57 PM	Tube furnace set to 0
10/17/2011	7:15:27 PM	Helium valve closed
10/17/2011	7:15:27 PM	H2 valve closed
10/17/2011	7:15:27 PM	BCl3 valve closed
10/17/2011	7:15:27 PM	PH3 valve closed
10/17/2011	7:15:27 PM	SiCl4 pre valve closed
10/17/2011	7:15:27 PM	SiCl4 post valve closed
10/17/2011	7:15:27 PM	Bypass valve closed
10/17/2011	7:15:27 PM	Bubbler valve closed
10/17/2011	7:15:27 PM	Main Vac valve opened
10/17/2011	7:15:27 PM	Helium MFC set to  0.000000
10/17/2011	7:15:27 PM	H2 MFC set to  0.000000
10/17/2011	7:15:27 PM	BCl3 MFC set to  0.000000
10/17/2011	7:15:27 PM	PHl3 MFC set to  0.000000
10/17/2011	7:15:27 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:15:27 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:15:27 PM	Tube furnace set to 0
10/17/2011	7:15:57 PM	H2 valve closed
10/17/2011	7:15:57 PM	BCl3 valve closed
10/17/2011	7:15:57 PM	PH3 valve closed
10/17/2011	7:15:57 PM	SiCl4 pre valve closed
10/17/2011	7:15:57 PM	SiCl4 post valve closed
10/17/2011	7:15:57 PM	Bypass valve closed
10/17/2011	7:15:57 PM	Bubbler valve closed
10/17/2011	7:15:57 PM	Helium valve opened
10/17/2011	7:15:57 PM	Main Vac valve opened
10/17/2011	7:15:57 PM	Helium MFC set to  20.000000
10/17/2011	7:15:57 PM	H2 MFC set to  0.000000
10/17/2011	7:15:57 PM	BCl3 MFC set to  0.000000
10/17/2011	7:15:57 PM	PHl3 MFC set to  0.000000
10/17/2011	7:15:57 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:15:57 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:15:58 PM	Tube furnace set to 0
10/17/2011	7:16:28 PM	Helium valve closed
10/17/2011	7:16:28 PM	H2 valve closed
10/17/2011	7:16:28 PM	BCl3 valve closed
10/17/2011	7:16:28 PM	PH3 valve closed
10/17/2011	7:16:28 PM	SiCl4 pre valve closed
10/17/2011	7:16:28 PM	SiCl4 post valve closed
10/17/2011	7:16:28 PM	Bypass valve closed
10/17/2011	7:16:28 PM	Bubbler valve closed
10/17/2011	7:16:28 PM	Main Vac valve opened
10/17/2011	7:16:28 PM	Helium MFC set to  0.000000
10/17/2011	7:16:28 PM	H2 MFC set to  0.000000
10/17/2011	7:16:28 PM	BCl3 MFC set to  0.000000
10/17/2011	7:16:28 PM	PHl3 MFC set to  0.000000
10/17/2011	7:16:28 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:16:28 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:16:28 PM	Tube furnace set to 0
10/17/2011	7:16:58 PM	H2 valve closed
10/17/2011	7:16:58 PM	BCl3 valve closed
10/17/2011	7:16:58 PM	PH3 valve closed
10/17/2011	7:16:58 PM	SiCl4 pre valve closed
10/17/2011	7:16:58 PM	SiCl4 post valve closed
10/17/2011	7:16:58 PM	Bypass valve closed
10/17/2011	7:16:58 PM	Bubbler valve closed
10/17/2011	7:16:58 PM	Helium valve opened
10/17/2011	7:16:58 PM	Main Vac valve opened
10/17/2011	7:16:58 PM	Helium MFC set to  20.000000
10/17/2011	7:16:58 PM	H2 MFC set to  0.000000
10/17/2011	7:16:58 PM	BCl3 MFC set to  0.000000
10/17/2011	7:16:58 PM	PHl3 MFC set to  0.000000
10/17/2011	7:16:58 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:16:58 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:16:58 PM	Tube furnace set to 0
10/17/2011	7:17:28 PM	Helium valve closed
10/17/2011	7:17:28 PM	H2 valve closed
10/17/2011	7:17:28 PM	BCl3 valve closed
10/17/2011	7:17:28 PM	PH3 valve closed
10/17/2011	7:17:28 PM	SiCl4 pre valve closed
10/17/2011	7:17:28 PM	SiCl4 post valve closed
10/17/2011	7:17:28 PM	Bypass valve closed
10/17/2011	7:17:28 PM	Bubbler valve closed
10/17/2011	7:17:28 PM	Main Vac valve opened
10/17/2011	7:17:28 PM	Helium MFC set to  0.000000
10/17/2011	7:17:28 PM	H2 MFC set to  0.000000
10/17/2011	7:17:28 PM	BCl3 MFC set to  0.000000
10/17/2011	7:17:28 PM	PHl3 MFC set to  0.000000
10/17/2011	7:17:28 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:17:28 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:17:28 PM	Tube furnace set to 0
10/17/2011	7:17:58 PM	H2 valve closed
10/17/2011	7:17:58 PM	BCl3 valve closed
10/17/2011	7:17:58 PM	PH3 valve closed
10/17/2011	7:17:58 PM	SiCl4 pre valve closed
10/17/2011	7:17:58 PM	SiCl4 post valve closed
10/17/2011	7:17:58 PM	Bypass valve closed
10/17/2011	7:17:58 PM	Bubbler valve closed
10/17/2011	7:17:58 PM	Helium valve opened
10/17/2011	7:17:58 PM	Main Vac valve opened
10/17/2011	7:17:58 PM	Helium MFC set to  20.000000
10/17/2011	7:17:58 PM	H2 MFC set to  0.000000
10/17/2011	7:17:58 PM	BCl3 MFC set to  0.000000
10/17/2011	7:17:58 PM	PHl3 MFC set to  0.000000
10/17/2011	7:17:58 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:17:58 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:17:58 PM	Tube furnace set to 0
10/17/2011	7:18:28 PM	Helium valve closed
10/17/2011	7:18:28 PM	H2 valve closed
10/17/2011	7:18:28 PM	BCl3 valve closed
10/17/2011	7:18:28 PM	PH3 valve closed
10/17/2011	7:18:28 PM	SiCl4 pre valve closed
10/17/2011	7:18:29 PM	SiCl4 post valve closed
10/17/2011	7:18:29 PM	Bypass valve closed
10/17/2011	7:18:29 PM	Bubbler valve closed
10/17/2011	7:18:29 PM	Main Vac valve opened
10/17/2011	7:18:29 PM	Helium MFC set to  0.000000
10/17/2011	7:18:29 PM	H2 MFC set to  0.000000
10/17/2011	7:18:29 PM	BCl3 MFC set to  0.000000
10/17/2011	7:18:29 PM	PHl3 MFC set to  0.000000
10/17/2011	7:18:29 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:18:29 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:18:29 PM	Tube furnace set to 0
10/17/2011	7:18:59 PM	H2 valve closed
10/17/2011	7:18:59 PM	BCl3 valve closed
10/17/2011	7:18:59 PM	PH3 valve closed
10/17/2011	7:18:59 PM	SiCl4 pre valve closed
10/17/2011	7:18:59 PM	SiCl4 post valve closed
10/17/2011	7:18:59 PM	Bypass valve closed
10/17/2011	7:18:59 PM	Bubbler valve closed
10/17/2011	7:18:59 PM	Helium valve opened
10/17/2011	7:18:59 PM	Main Vac valve opened
10/17/2011	7:18:59 PM	Helium MFC set to  20.000000
10/17/2011	7:18:59 PM	H2 MFC set to  0.000000
10/17/2011	7:18:59 PM	BCl3 MFC set to  0.000000
10/17/2011	7:18:59 PM	PHl3 MFC set to  0.000000
10/17/2011	7:18:59 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:18:59 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:18:59 PM	Tube furnace set to 0
10/17/2011	7:19:29 PM	Helium valve closed
10/17/2011	7:19:29 PM	H2 valve closed
10/17/2011	7:19:29 PM	BCl3 valve closed
10/17/2011	7:19:29 PM	PH3 valve closed
10/17/2011	7:19:29 PM	SiCl4 pre valve closed
10/17/2011	7:19:29 PM	SiCl4 post valve closed
10/17/2011	7:19:29 PM	Bypass valve closed
10/17/2011	7:19:29 PM	Bubbler valve closed
10/17/2011	7:19:29 PM	Main Vac valve opened
10/17/2011	7:19:29 PM	Helium MFC set to  0.000000
10/17/2011	7:19:29 PM	H2 MFC set to  0.000000
10/17/2011	7:19:29 PM	BCl3 MFC set to  0.000000
10/17/2011	7:19:29 PM	PHl3 MFC set to  0.000000
10/17/2011	7:19:29 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:19:29 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:19:29 PM	Tube furnace set to 0
10/17/2011	7:19:59 PM	H2 valve closed
10/17/2011	7:19:59 PM	BCl3 valve closed
10/17/2011	7:19:59 PM	PH3 valve closed
10/17/2011	7:19:59 PM	SiCl4 pre valve closed
10/17/2011	7:19:59 PM	SiCl4 post valve closed
10/17/2011	7:19:59 PM	Bypass valve closed
10/17/2011	7:19:59 PM	Bubbler valve closed
10/17/2011	7:19:59 PM	Helium valve opened
10/17/2011	7:19:59 PM	Main Vac valve opened
10/17/2011	7:19:59 PM	Helium MFC set to  20.000000
10/17/2011	7:19:59 PM	H2 MFC set to  0.000000
10/17/2011	7:19:59 PM	BCl3 MFC set to  0.000000
10/17/2011	7:19:59 PM	PHl3 MFC set to  0.000000
10/17/2011	7:19:59 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:19:59 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:19:59 PM	Tube furnace set to 0
10/17/2011	7:20:29 PM	Helium valve closed
10/17/2011	7:20:29 PM	H2 valve closed
10/17/2011	7:20:29 PM	BCl3 valve closed
10/17/2011	7:20:29 PM	PH3 valve closed
10/17/2011	7:20:29 PM	SiCl4 pre valve closed
10/17/2011	7:20:29 PM	SiCl4 post valve closed
10/17/2011	7:20:29 PM	Bypass valve closed
10/17/2011	7:20:29 PM	Bubbler valve closed
10/17/2011	7:20:29 PM	Main Vac valve opened
10/17/2011	7:20:29 PM	Helium MFC set to  0.000000
10/17/2011	7:20:29 PM	H2 MFC set to  0.000000
10/17/2011	7:20:29 PM	BCl3 MFC set to  0.000000
10/17/2011	7:20:29 PM	PHl3 MFC set to  0.000000
10/17/2011	7:20:29 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:20:29 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:20:30 PM	Tube furnace set to 0
10/17/2011	7:21:00 PM	H2 valve closed
10/17/2011	7:21:00 PM	BCl3 valve closed
10/17/2011	7:21:00 PM	PH3 valve closed
10/17/2011	7:21:00 PM	SiCl4 pre valve closed
10/17/2011	7:21:00 PM	SiCl4 post valve closed
10/17/2011	7:21:00 PM	Bypass valve closed
10/17/2011	7:21:00 PM	Bubbler valve closed
10/17/2011	7:21:00 PM	Helium valve opened
10/17/2011	7:21:00 PM	Main Vac valve opened
10/17/2011	7:21:00 PM	Helium MFC set to  20.000000
10/17/2011	7:21:00 PM	H2 MFC set to  0.000000
10/17/2011	7:21:00 PM	BCl3 MFC set to  0.000000
10/17/2011	7:21:00 PM	PHl3 MFC set to  0.000000
10/17/2011	7:21:00 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:21:00 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:21:00 PM	Tube furnace set to 0
10/17/2011	7:21:30 PM	Helium valve closed
10/17/2011	7:21:30 PM	H2 valve closed
10/17/2011	7:21:30 PM	BCl3 valve closed
10/17/2011	7:21:30 PM	PH3 valve closed
10/17/2011	7:21:30 PM	SiCl4 pre valve closed
10/17/2011	7:21:30 PM	SiCl4 post valve closed
10/17/2011	7:21:30 PM	Bypass valve closed
10/17/2011	7:21:30 PM	Bubbler valve closed
10/17/2011	7:21:30 PM	Main Vac valve opened
10/17/2011	7:21:30 PM	Helium MFC set to  0.000000
10/17/2011	7:21:30 PM	H2 MFC set to  0.000000
10/17/2011	7:21:30 PM	BCl3 MFC set to  0.000000
10/17/2011	7:21:30 PM	PHl3 MFC set to  0.000000
10/17/2011	7:21:30 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:21:30 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:21:30 PM	Tube furnace set to 0
10/17/2011	7:21:31 PM	Run finished at 7:21 PM
10/17/2011	7:21:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/17/2011	7:23:43 PM	Main Vac valve closed
10/17/2011	7:24:27 PM	Main Vac valve opened
10/17/2011	7:34:22 PM	Recipe started at 7:34 PM
10/17/2011	7:34:22 PM	Helium valve closed
10/17/2011	7:34:22 PM	H2 valve closed
10/17/2011	7:34:22 PM	BCl3 valve closed
10/17/2011	7:34:22 PM	PH3 valve closed
10/17/2011	7:34:22 PM	SiCl4 pre valve closed
10/17/2011	7:34:22 PM	SiCl4 post valve closed
10/17/2011	7:34:22 PM	Main Vac valve closed
10/17/2011	7:34:22 PM	Bypass valve closed
10/17/2011	7:34:22 PM	Bubbler valve closed
10/17/2011	7:34:22 PM	Helium MFC set to  0.000000
10/17/2011	7:34:22 PM	H2 MFC set to  0.000000
10/17/2011	7:34:22 PM	BCl3 MFC set to  0.000000
10/17/2011	7:34:22 PM	PHl3 MFC set to  0.000000
10/17/2011	7:34:22 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:34:22 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:34:22 PM	Tube furnace set to 0
10/17/2011	7:34:25 PM	Helium valve closed
10/17/2011	7:34:25 PM	BCl3 valve closed
10/17/2011	7:34:25 PM	PH3 valve closed
10/17/2011	7:34:25 PM	SiCl4 pre valve closed
10/17/2011	7:34:25 PM	SiCl4 post valve closed
10/17/2011	7:34:25 PM	Main Vac valve closed
10/17/2011	7:34:25 PM	Bypass valve closed
10/17/2011	7:34:25 PM	Bubbler valve closed
10/17/2011	7:34:25 PM	H2 valve opened
10/17/2011	7:34:25 PM	Helium MFC set to  0.000000
10/17/2011	7:34:25 PM	H2 MFC set to  500.000000
10/17/2011	7:34:25 PM	BCl3 MFC set to  0.000000
10/17/2011	7:34:25 PM	PHl3 MFC set to  0.000000
10/17/2011	7:34:25 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:34:25 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:34:25 PM	Tube furnace set to 0
10/17/2011	7:35:33 PM	Helium valve closed
10/17/2011	7:35:33 PM	BCl3 valve closed
10/17/2011	7:35:33 PM	PH3 valve closed
10/17/2011	7:35:33 PM	SiCl4 pre valve closed
10/17/2011	7:35:33 PM	SiCl4 post valve closed
10/17/2011	7:35:33 PM	Main Vac valve closed
10/17/2011	7:35:33 PM	Bypass valve closed
10/17/2011	7:35:33 PM	H2 valve opened
10/17/2011	7:35:33 PM	Bubbler valve opened
10/17/2011	7:35:33 PM	Helium MFC set to  0.000000
10/17/2011	7:35:33 PM	H2 MFC set to  500.000000
10/17/2011	7:35:33 PM	BCl3 MFC set to  0.000000
10/17/2011	7:35:33 PM	PHl3 MFC set to  0.000000
10/17/2011	7:35:33 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:35:33 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:35:33 PM	Tube furnace set to 0
10/17/2011	7:35:34 PM	Helium valve closed
10/17/2011	7:35:34 PM	BCl3 valve closed
10/17/2011	7:35:34 PM	PH3 valve closed
10/17/2011	7:35:34 PM	SiCl4 pre valve closed
10/17/2011	7:35:34 PM	SiCl4 post valve closed
10/17/2011	7:35:34 PM	Main Vac valve closed
10/17/2011	7:35:34 PM	Bypass valve closed
10/17/2011	7:35:34 PM	H2 valve opened
10/17/2011	7:35:34 PM	Bubbler valve opened
10/17/2011	7:35:34 PM	Helium MFC set to  0.000000
10/17/2011	7:35:34 PM	H2 MFC set to  500.000000
10/17/2011	7:35:34 PM	BCl3 MFC set to  0.000000
10/17/2011	7:35:34 PM	PHl3 MFC set to  0.000000
10/17/2011	7:35:34 PM	SiCl4 MFC set to  0.000000
10/17/2011	7:35:34 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:35:34 PM	Tube furnace set to 1000
10/17/2011	7:55:34 PM	Helium valve closed
10/17/2011	7:55:34 PM	PH3 valve closed
10/17/2011	7:55:34 PM	Main Vac valve closed
10/17/2011	7:55:34 PM	Bypass valve closed
10/17/2011	7:55:34 PM	H2 valve opened
10/17/2011	7:55:34 PM	BCl3 valve opened
10/17/2011	7:55:34 PM	SiCl4 pre valve opened
10/17/2011	7:55:34 PM	SiCl4 post valve opened
10/17/2011	7:55:34 PM	Bubbler valve opened
10/17/2011	7:55:34 PM	Helium MFC set to  0.000000
10/17/2011	7:55:34 PM	H2 MFC set to  500.000000
10/17/2011	7:55:34 PM	BCl3 MFC set to  2.500000
10/17/2011	7:55:34 PM	PHl3 MFC set to  0.000000
10/17/2011	7:55:34 PM	SiCl4 MFC set to  50.000000
10/17/2011	7:55:34 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	7:55:34 PM	Tube furnace set to 1000
10/17/2011	8:05:34 PM	Helium valve closed
10/17/2011	8:05:34 PM	BCl3 valve closed
10/17/2011	8:05:34 PM	PH3 valve closed
10/17/2011	8:05:34 PM	SiCl4 pre valve closed
10/17/2011	8:05:34 PM	SiCl4 post valve closed
10/17/2011	8:05:34 PM	Main Vac valve closed
10/17/2011	8:05:34 PM	Bypass valve closed
10/17/2011	8:05:34 PM	H2 valve opened
10/17/2011	8:05:34 PM	Bubbler valve opened
10/17/2011	8:05:34 PM	Helium MFC set to  0.000000
10/17/2011	8:05:34 PM	H2 MFC set to  500.000000
10/17/2011	8:05:34 PM	BCl3 MFC set to  0.000000
10/17/2011	8:05:34 PM	PHl3 MFC set to  0.000000
10/17/2011	8:05:34 PM	SiCl4 MFC set to  0.000000
10/17/2011	8:05:34 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	8:05:34 PM	Tube furnace set to 750
10/17/2011	8:10:34 PM	H2 valve closed
10/17/2011	8:10:34 PM	BCl3 valve closed
10/17/2011	8:10:34 PM	PH3 valve closed
10/17/2011	8:10:34 PM	SiCl4 pre valve closed
10/17/2011	8:10:34 PM	SiCl4 post valve closed
10/17/2011	8:10:34 PM	Main Vac valve closed
10/17/2011	8:10:34 PM	Bypass valve closed
10/17/2011	8:10:34 PM	Helium valve opened
10/17/2011	8:10:34 PM	Bubbler valve opened
10/17/2011	8:10:34 PM	Helium MFC set to  500.000000
10/17/2011	8:10:34 PM	H2 MFC set to  0.000000
10/17/2011	8:10:34 PM	BCl3 MFC set to  0.000000
10/17/2011	8:10:34 PM	PHl3 MFC set to  0.000000
10/17/2011	8:10:34 PM	SiCl4 MFC set to  0.000000
10/17/2011	8:10:34 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	8:10:34 PM	Tube furnace set to 0
10/17/2011	8:30:34 PM	Helium valve closed
10/17/2011	8:30:34 PM	H2 valve closed
10/17/2011	8:30:34 PM	BCl3 valve closed
10/17/2011	8:30:34 PM	PH3 valve closed
10/17/2011	8:30:34 PM	SiCl4 pre valve closed
10/17/2011	8:30:34 PM	SiCl4 post valve closed
10/17/2011	8:30:34 PM	Main Vac valve closed
10/17/2011	8:30:34 PM	Bypass valve closed
10/17/2011	8:30:34 PM	Bubbler valve closed
10/17/2011	8:30:34 PM	Helium MFC set to  0.000000
10/17/2011	8:30:34 PM	H2 MFC set to  0.000000
10/17/2011	8:30:34 PM	BCl3 MFC set to  0.000000
10/17/2011	8:30:34 PM	PHl3 MFC set to  0.000000
10/17/2011	8:30:34 PM	SiCl4 MFC set to  0.000000
10/17/2011	8:30:34 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	8:30:35 PM	Tube furnace set to 0
10/17/2011	8:30:36 PM	Run finished at 8:30 PM
10/17/2011	8:32:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/17/2011	8:32:24 PM	Recipe started at 8:32 PM
10/17/2011	8:32:24 PM	Helium valve closed
10/17/2011	8:32:24 PM	H2 valve closed
10/17/2011	8:32:24 PM	BCl3 valve closed
10/17/2011	8:32:24 PM	PH3 valve closed
10/17/2011	8:32:24 PM	SiCl4 pre valve closed
10/17/2011	8:32:24 PM	SiCl4 post valve closed
10/17/2011	8:32:24 PM	Main Vac valve closed
10/17/2011	8:32:24 PM	Bubbler valve closed
10/17/2011	8:32:24 PM	Bypass valve opened
10/17/2011	8:32:24 PM	Helium MFC set to  0.000000
10/17/2011	8:32:24 PM	H2 MFC set to  0.000000
10/17/2011	8:32:24 PM	BCl3 MFC set to  0.000000
10/17/2011	8:32:24 PM	PHl3 MFC set to  0.000000
10/17/2011	8:32:24 PM	SiCl4 MFC set to  0.000000
10/17/2011	8:32:24 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	8:32:24 PM	Tube furnace set to 0
10/17/2011	8:33:25 PM	Helium valve closed
10/17/2011	8:33:25 PM	H2 valve closed
10/17/2011	8:33:25 PM	BCl3 valve closed
10/17/2011	8:33:25 PM	PH3 valve closed
10/17/2011	8:33:25 PM	SiCl4 pre valve closed
10/17/2011	8:33:25 PM	SiCl4 post valve closed
10/17/2011	8:33:25 PM	Main Vac valve closed
10/17/2011	8:33:25 PM	Bubbler valve closed
10/17/2011	8:33:25 PM	Bypass valve opened
10/17/2011	8:33:25 PM	Helium MFC set to  0.000000
10/17/2011	8:33:25 PM	H2 MFC set to  0.000000
10/17/2011	8:33:25 PM	BCl3 MFC set to  0.000000
10/17/2011	8:33:25 PM	PHl3 MFC set to  0.000000
10/17/2011	8:33:25 PM	SiCl4 MFC set to  0.000000
10/17/2011	8:33:25 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	8:33:26 PM	Tube furnace set to 0
10/17/2011	8:34:26 PM	Helium valve closed
10/17/2011	8:34:26 PM	H2 valve closed
10/17/2011	8:34:26 PM	BCl3 valve closed
10/17/2011	8:34:26 PM	PH3 valve closed
10/17/2011	8:34:26 PM	SiCl4 pre valve closed
10/17/2011	8:34:26 PM	SiCl4 post valve closed
10/17/2011	8:34:26 PM	Bypass valve closed
10/17/2011	8:34:26 PM	Bubbler valve closed
10/17/2011	8:34:26 PM	Main Vac valve opened
10/17/2011	8:34:26 PM	Helium MFC set to  0.000000
10/17/2011	8:34:26 PM	H2 MFC set to  0.000000
10/17/2011	8:34:26 PM	BCl3 MFC set to  0.000000
10/17/2011	8:34:26 PM	PHl3 MFC set to  0.000000
10/17/2011	8:34:26 PM	SiCl4 MFC set to  0.000000
10/17/2011	8:34:26 PM	Bypass solenoid MFC set to  0.000000
10/17/2011	8:34:26 PM	Tube furnace set to 0
10/17/2011	8:34:27 PM	Run finished at 8:34 PM
10/17/2011	8:34:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
